CPC-1 피드백 제어기
The 피드백 제어기 (CPC-1) automatically adjusts to maintain a set pressure or flow rate in high purity, closed-loop chemical pumping systems to compensate for variables in wafer processes, such as opening/closing chamber valves or clogging filters. The controlled closed-loop system improves process repeatability, increases chip yields, and simplifies automation to save customers time and resources. It also eliminates the need for expensive pressure systems.