White Knight CBU 시리즈 Debubblers

Remove Bubbles from High-Temperature Chemical Delivery Processes

개요

CBU Series debubblers reduce bubbles from high-temperature, ultrapure chemical delivery and wafer process systems. They redirect flow to the surface so that bubbles rise out of the fluid. Their tongue-and-groove seals and dual-static crush seals ensure safe, reliable operation.

CBU Debubbler for High Temperature Chemicals
CBU 시리즈 사양 시트
CBU 매뉴얼
CBU 분해도
CBU 주문 지침견적 요청대리점 위치 및 연락처
White Knight 2 년 품질 보증
White Knight 초순수 테플론 PTFE 재질의 펌프
화학 약품 이송 및 순환 용 압력 7 Bar (100 psi) 테플론 펌프
White Knight 최대 210C까지 작동 가능한 반도체 펌프

기능 및 이점

  • 공정에 안전한 PTFE 및 PFA 로 구성된 유체경로
  • ≤ 7 Bar (100 psi) 압력 for high flow rates and faster processes
  • ≤ 210°C 온도
  • Chemical delivery and wafer process debubbling
  • Synchro-Thread™ for fluids up to 210°C (410°F)
  • 누수없는, 가공된 설계, Tongue 와 Groove seals
  • 누수가 없는 이중-고정 압착 Seal
  • Easy setup and maintenance without welding
CBU Debubbler Operation Diagram with Deionized Water and Sensors

펌프 운전

CBU Series debubblers redirect flow upward and slows the fluid so that air bubbles rise within the chamber. As air collects at the top, air pressure builds, and the liquid level drops. As air vents, the liquid level rises.

Debubbler Applications

Remove Bubbles After Pumps

Chemical enters the debubbler through the stand tube. Level sensors 1 and 2 control the collected air volume in the debubbler. Collected air exits through the vent line.

Debubbler Removing Bubbles After Pump
Debubbler Removing Bubbles After Pump

Remove Bubbles Before Pumps

Chemical is pulled into the debubbler through the stand tube. Level sensors 1 and 2 control air collection level to purge the collected air, a vacuum is required to remove collected air. This can be achieved using a venturi-type vacuum.

Debubbler Removing Bubbles Before Pump
Debubbler Removing Bubbles Before Pump

Automate Drum Change

Level sensors 1 and 2 act to keep bubbles from the drums from continuing through to the pump. Level 3 indicates an empty drum. This can be used as an automatic drum switch or as a drum empty signal.

Debubbler Automated Drum Change with Empty Signal
Debubbler Automated Drum Change with Empty Signal

치수

치수 [mm] 인치

구성

견적 요청대리점 위치 및 연락처