Original Mini-Meg 100

The original Mini-Meg 100 Lab System was designed for organizations looking to get better value from their equipment budgets. Mini-Megs are fully functional megasonic system with the portability to allow them to be used in a fume hood or mounted on a small wet bench. Just as with fully featured megasonic systems, virtually any megasonic action can be tested with Mini-Meg.

PCT Systems Megasonic Original Mini Meg 100

Mini-Meg 100 Product Features

GENERATOR

  • Small Size
  • 2 Channels
  • 2 Outputs / Channels
  • 350 watts/channel
  • Phase Shifting
  • Programmable Recipes
  • 700 kHz or 950 kHz Frequency

PROCESS TANK

  • Tank Material Options
    • PVDF
    • Stainless Steel

TRANSDUCER

  • Ambient to 70°C Liquids
  • Multiplexing / Full On

Perfect for R&D Lab Applications & Processes

  • Semiconductor
  • MEMs
  • Disk Drives
  • Optics
  • Solar
  • Particle Removal
  • Post CMP Clean
  • 2D Graphene Particles
  • Wet Etch
  • SCI Clean
  • Resist Removal

Specifications

Model 6000 Mini-Meg Generator Mechanical Specifications

Size Width 14.0”, Length 14.0”, Height 5.0”
Material of Construction Anodized Aluminum
Mounting Horizontal or Vertical

 

Electrical Specifications

Voltage Rating 208-240 VAC, 50/60 Hz
Current Rating Max 10 amps
Environmental Operating Range 0° to 27°C
Storage Temperature Range -25° to 50°C

 

Megasonic Amplifier Operation Specifications

Independent Power & Frequency Control for each RF Output
Number of Channels 2
Number of Outputs per Channel 2
Maximum RF Output per Channel 350 watts
Programmable RF Output Range 0 to 500 watts per Channe
Programmable Recipes / Channel 7
Frequency Changes / Recipe 4
RF Output Power Tolerance +/- 10%
Output Designations Array 1, Array 2
Frequency Bands (Choice of 1) 700kHz, 950kHz
Frequency Resolution 100 Hz
Frequency Accuracy +/- 100 Hz
Programmable Sweep Functionality 1-10 KHz
RF Output Connectors DB15F

 

External Interface

External Interlock DB15 Male Connector, +5v Loopback – Liquid Level
Communication Ports SECS II: RS232: DB15 Male connector
Transducer Connections 4 each DB15 Female connectors
Power Plug 3 – prong IEC Appliance Connector

 

Displays/User Interface

Power On/Off Switch
4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more

 

Facilities Requirements

N2 or CDA supply 1-2 psi @ 1/4 scfm

Mini‐Meg 100 Tank PVDF Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 9.50” x 9.55”
6.75” x 7.50” x 5.80”
Material of Construction PVDF Plastic
Drain Port PVDF Drain 1/2″ NPT

 

Stainless Steel Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 10.58” x 10.51”
6.75” x 7.50” x 5.81”
Material of Construction Electro Polished Stainless Steel PFA Coated Stainless
Drain Port SS drain with 1/2” ball valve

 

Quartz Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 9.75” x 10.25”
5.5” x 6.50” x 5.81”
Material of Construction Quartz with plastic housing
Drain Port (Optional) Drain with 1/2” ball valve
PCT Systems Plastic Tank Example
PCT Systems Mini‐Meg 100 Tank Dimensions