Accubath® 湿式工艺罐

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath® 加热的石英湿式工艺罐

Accubath® 加热的石英湿式工艺罐 processes using quartz-compatible chemistries up to 190°C…

Accubath® 加热的石英湿式工艺罐
Accubath PVDF QDR Process Tank

Accubath® Teflon, PVDF, PFA, NPP 湿式工艺罐

Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

Accubath® Teflon, PVDF, PFA, NPP 湿式工艺罐
Accubath Stainless Steel Recirculating Heated Tank

Accubath® 加热的不锈钢湿式工艺罐

Accubath® 加热的不锈钢湿式工艺罐 for reliable and safe performance in static and recirculating systems…

Accubath® 加热的不锈钢湿式工艺罐
Accubath XE-Lab System Wet Etch Bath

Accubath® 高温蓝宝石湿蚀刻处理罐

Accubath® 高温蓝宝石湿蚀刻处理罐 safely and reliably heat chemistries up to 300°C…

Accubath® 蓝宝石湿蚀刻处理罐
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, 石英, 或不锈钢 Megasonic Systems

Accumeg® Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems