Accubath™ Sapphire Wet Etching High-Temperature Process Tanks

Designed to Take the Heat – The liquid in the Accubath Xe tank comes in contact with nothing but high purity quartz. No PTFE connections, sensors, or any other parts are used in the process area. Even the built in automated lid is quartz. For reliability, a special version of IMTEC’s patented Aquaseal was developed to prevent a failure of the critical seal material that isolates the heater components from the environment. Even the housing is special, utilizing ECTFE for its superior temperature and chemical compatibility as well as special construction techniques to isolate the heat inside.

Auxiliary Modules Make it Complete – No drain valve works at these temperatures so a quartz aspirator was designed and built in IMTEC’s quartz fabrication facility to remove the chemistry without having to wait for it to cool. The aspirator drains the tank to a cool-down module below the tank. The cool down module has quartz cooling coils to assist in lowering the chemistry temperature quickly. The modules working together create a system that addresses all the challenges of working with extreme temperature chemistries allowing you the freedom to experiment with processes previously not possible.