Megasonic Generators

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Megasonic performance starts with the generator and not all generators are created equal. Simply put, PCT offers the most versatile and fully featured megasonic generators on the market. PCT has pioneered and developed the leading megasonic technology available in the global market with numerous patents and pending applications. Customers around the world have come to depend on PCT for the highest quality and performance megasonic systems today. With the development of super fine geometries with more fragile structures and substrates, customers need more process development options than ever before to be successful, productive and profitable. HyperClean™ incorporates PCT’s unique energy-transfer technology for superior submicron cleaning, reduced operating costs and high reliability.

PCT Systems Megasonic HyperClean Generator

Unmatched Process Control & Flexibility

No matter what the application, HyperClean™ Megasonic Generators have become the standard by which others are measured. No other manufacturer’s generators are able to drive virtually any make megasonic transducer array. So whether a new system or replacement generator is needed, PCT can provide Process improvement with our patented HyperClean™ technology.PCT Systems, Inc. offers complete HyperClean™ Megasonic Systems including a wide tank selection of quartz, plastics and stainless steel for any size application or substrate. Customizable transducer arrays in either direct bond or indirect transfer configurations to offer an unequalled selection for users to optimize their systems.

Features

Multiplexing operation for 2-8 transducers per output.
Optional embedded temperature controller for heaters
Individually Configurable and Tunable for Optimum Process Results
Programmable RF Output Range up to 350 Watts per Channel
2 Independent Channels with 8 outputs per Channel
Synchronized or Individual Control of Each Channel
Patented Multiplexing for On/Off Control of Individual Transducers
Process Variables and Real Time Data Monitoring
Multiple Frequency Bands Individually Controlled (600 kHz – 1 MHz)

Model 6000 Series Generator Dimensions

Width	14.0”
Length	14.0”
Height	7.0”

Megasonic Amplifier Operation

Controller	Multiplexing operation for 2-8 transducers per output. Optional embedded temperature controller for heaters.
Number of Channels	2
Number of Outputs per Channel	8
Maximum RF Output/Channel	350 watts
Maximum RF Output per Unit	–
Programmable RF Output Range	0 to 350 watts per Channel
Programmable Recipes / Channel	–
Frequency Changes / Recipe	–
RF Output Power Tolerance	+/- 10%
Frequency Bands	600Khz-1MHz

Mechanical Specifications

Voltage Rating	208-240 VAC, 50/60 Hz
Current Rating	Max 10 amps non-heated (Max 30 amps heated with Model 6000)
Environmental Operating Range	0° to 27°C Operating Range, -25° to 50°C Storage Temperature Range
Frequency Resolution	100 Hz
Frequency Accuracy	+/- 100 Hz
Programmable Sweep Functionality	1-10 KHz
RF Output Connectors	DB15F

External Interface

External Interface	DB15 Male Connector, +5v Loopback – Pin 10, Liquid Level – Pin 4, Ground – Pin 8, 9, 12,
Communication Ports	SECS II: RS232: DB15 Male connector, Receive – Pin 6, Transmit – Pin 7,
Transducer Connections	DB15 Female connectors for each array/channel

Displays/User Interface/Data Storage

Display	4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more
Data Storage Capacity	2 GB
Data Export	XML Format

Certifications

ETL File No. 567511 per UL 3101-1 and CSA 1010.1
CE EN 61010-1 European Safety Approval
CE EN 55011 European EMI Approval
CE EN 50082-2 European ESD, RF, and Transient Susceptibility Approval