Aquarius® 去離子(DIW)熱水器系統

Heateflex Aquarius Deionized (DI) Water Heater Systems

概述

Aquarius® water (DI water, DIW) heating systems are ideal for high-purity processes that require continuous flows of hot DIW with accurate and precise temperature control. The heaters feature the ultrapure Heateflex® heating coil, Power-to-Flow™ control systems, and many operator safeties. Various output options help meet demanding flow and temperature requirements. Aquarius® provides an operational cost savings by reducing the need for multiple heaters.

內置安全

Aquarius® systems include various safety features. They have an advanced ground fault circuit interrupter (GFCI) system with a sub-30 mAmp rating. It has a Short Circuit Current Rating (SCCR) of 100,000 Amps. The door interlocks, the EMO, and the GFCIs feature redundant safety PLC systems, and NIST-certified thermocouples. Finally, dual pressure relief valves ensure rapid dissipation for both input and output flows.

Power-to-Flow™ Control

Power-to-Flow™ controls provide accurate temperature output in single-pass heating applications. It eliminates undesirable overshoots or drops in temperature. The sophisticated control systems feature multi-loop capability and feed-forward functions to moderate variations in the process flow rate. It measures flow and temperature at various stages, and adjusts the power applied to each heating zone accordingly. This advanced integrated system reacts quickly to flow variations to provide a steady stream of DIW at a stable temperature.

Aquarius® 小冊Advantages of Using Hot DIW
Aquarius 系統用戶手冊Aquarius 控制器用戶手冊
Aquarius System DrawingAquarius 系統圖紙
SEMI S2, S3, S8 和 UL 認證
Replacing Fuses
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特點和優點

  • Ultrapure PVDF/PFA wetted surfaces
  • High-resolution touch-screen
  • User-friendly graphical user interface (GUI)
  • Plug-and-play system with complete integration of controls
  • No N2 purge required

溫度控制

  • Excellent temperature stability
  • Fast response to temperature and flow variations
  • Eliminates excessive overshoots and drops in temperature
  • Programmable logic controller (PLC) with Power-to-Flow™ control delivers constant, stable, and accurate temperature output
  • Ethernet read/write connection enables rapid transfer of heater data to fab SECS/GEM systems (other communications available)

安全特性

  • Meets or exceeds stringent requirements for UL-499, SEMI S2, SEMI S3, and CE
  • Short circuit current rating at 100 kA
  • Ground fault circuit interrupter, sub-30 mA rating
  • Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and hi-limit thermocouples
  • Redundant safety monitoring relay for door interlock switch and EMO
  • NIST-certified thermocouples
  • Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation
  • Ground options for electrical safety and DIW compatibility

規範

Heater Element
Heateflex® Coil
Wetted Surfaces
PVDF/PFA
Sizes
40-225 kW
(voltage dependent)
Voltages
200-480 VAC, 3-ph
(wattage dependent)
Temperature
95º C (203º F)
Temperature Accuracy
+/- 0.1º C
(usage dependent)
Flow
0.5-32 GPM
(1.9-122 LPM)
Pressure
60 PSIG @ 95ºC
Efficiency
>99 %

*All specifications dependent on configuration.

尺寸圖

Inches H x W x D

Model
kW
Low VAC
High VAC
DI-40
40
78 x 24 x 24
78 x 24 x 24
DI-80
80
78 x 32 x 24
78 x 24 x 24
DI-100
100
78 x 39 x 24
78 x 32 x 24
DI-120
120
78 x 39 x 24
78 x 32 x 24
DI-140
140
N/A
78 x 32 x 24
DI-160
160
N/A
78 x 32 x 24
DI-200
200
N/A
78 x 39 x 24
DI-225
225
N/A
78 x 39 x 24
Model
kW
Low VAC
High VAC

*Low VAC: 200-240 VAC, 3-Phase
*High VAC: 380-480 VAC, 3-Phase

配置

  • Fusible Disconnect with Lock-out/Tag-out
  • Auto Purge (Pump Not Included)
  • Resistivity Sensor
  • Leak Alarms (Critical and Non-Critical)
  • Discrete Interface
  • Analog Interface
  • Dry Contact Interface
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