HFI Series immersion heaters are the perfect solution for heating harsh chemicals or DI water to constant temperatures in ultrapure tanks, including PVDF, PFA, and quartz tanks. Their PFA/PTFE wetted surfaces are ideal for use in high-purity applications where chemical compatibility is of utmost importance. HFI heaters utilize the Heateflex® element to provide high-efficiency heating with superior temperature control and maximum power output in a compact footprint. The heaters are available in various sizes that easily fit new and existing systems common to semiconductor, solar, MEMs, and other technological industries.

Heateflex PFA浸入式水箱加熱器


  • Ultrapure PTFE/PFA wetted surfaces
  • Reliable heating of harsh chemicals
  • Maximum power in compact footprint
  • Maximum 200°C heating capability
  • Fast temperature response and efficiency
  • Each configuration capable of various voltage-to-wattage combinations
  • Integrate easily into most PVDF, PFA, and quartz wet process tanks
  • Sizes for many tank dimensions
  • Compact height of 1-5/8 inch
  • Safety features include hi-limit sensor and encapsulated ground wire
  • No N2 purge required

Floor Grid 配置

  • Top grids separate heaters from wafer carriers and components to increase the available tank space
  • Bottom grids separate heaters from the tank floor
  • Available for all frame sizes
  • Adds 1/8 inch to height
Heateflex PFA浸入式水箱加熱器 Perforated Grids

*Shown with top and bottom grid.


加熱元件 Heateflex® Coil
瓦數 1.0 – 20 kW
電壓 120 – 480 VAC
1 or 3 phase
尺寸 (LxW) 7x5 to 19x14 inch
高度 1-5/8 inch
溫度 200°C (392°F)
Hi-Limit Sensor Type-J thermocouple
接地線 Encapsulated
鉛絲 15-ft

*All specifications depend on size, voltage, wattage, and customer utilization. See configuration instructions for sizing, capability, and compatibility.



Filter by:

Model Size Length Width Wattage Wattage Voltage Phase
HFI-0705-010-B-J7 x 5 in751.0 kW0-1.9120 VAC1-Phase
HFI-0705-023-E-J7 x 5 in751.7 kW0-1.9200 VAC1-Phase
HFI-0705-023-E-J7 x 5 in751.9 kW0-1.9208 VAC1-Phase
HFI-0707-020-B-J7 x 7 in772.0 kW2-3.9120 VAC1-Phase
HFI-0705-023-E-J7 x 5 in752.1 kW2-3.9220 VAC1-Phase
HFI-0707-030-F-J7 x 7 in772.1 kW2-3.9200 VAC1-Phase
HFI-0705-023-E-J7 x 5 in752.3 kW2-3.9230 VAC1-Phase
HFI-0707-030-F-J7 x 7 in772.3 kW2-3.9208 VAC1-Phase
HFI-0707-030-F-J7 x 7 in772.5 kW2-3.9220 VAC1-Phase
HFI-0707-030-F-J7 x 7 in772.8 kW2-3.9230 VAC1-Phase
HFI-0707-030-F-J7 x 7 in773.0 kW2-3.9240 VAC1-Phase
HFI-0905-020-B-J9 x 5 in952.0 kW2-3.9120 VAC1-Phase
HFI-0905-030-F-J9 x 5 in952.1 kW2-3.9200 VAC1-Phase
HFI-0905-030-F-J9 x 5 in952.3 kW2-3.9208 VAC1-Phase
HFI-0905-030-F-J9 x 5 in952.5 kW2-3.9220 VAC1-Phase
HFI-0905-030-XX-J9 x 5 in952.7 kW2-3.9380 VAC1-Phase
HFI-0905-030-F-J9 x 5 in952.8 kW2-3.9230 VAC1-Phase
HFI-0905-030-XX-J9 x 5 in953.0 kW2-3.9400 VAC1-Phase
HFI-0905-030-F-J9 x 5 in953.0 kW2-3.9240 VAC1-Phase
HFI-0907-040-D-J9 x 7 in973.3 kW2-3.9200 VAC1-Phase
HFI-0909-055-L-J9 x 9 in993.4 kW2-3.9380 VAC1-Phase
HFI-0909-050-F-J9 x 9 in993.5 kW2-3.9200 VAC1-Phase
HFI-0907-040-D-J9 x 7 in973.6 kW2-3.9208 VAC1-Phase
HFI-0909-050-F-J9 x 9 in993.7 kW2-3.9208 VAC1-Phase
HFI-0909-055-L-J9 x 9 in993.8 kW2-3.9400 VAC1-Phase
HFI-0907-040-D-J9 x 7 in974.0 kW4-5.9220 VAC1-Phase
HFI-0909-050-F-J9 x 9 in994.2 kW4-5.9220 VAC1-Phase
HFI-0909-050-F-J9 x 9 in994.6 kW4-5.9230 VAC1-Phase
HFI-0909-050-F-J9 x 9 in995.0 kW4-5.9240 VAC1-Phase
HFI-0909-055-L-J9 x 9 in995.5 kW4-5.9480 VAC1-Phase
HFI-1105-040-D-J11 x 5 in1153.3 kW2-3.9200 VAC1-Phase
HFI-1107-050-F-J11 x 7 in1173.5 kW2-3.9200 VAC1-Phase
HFI-1107-055-L-J11 x 7 in1173.5 kW2-3.9380 VAC1-Phase
HFI-1105-040-D-J11 x 5 in1153.6 kW2-3.9208 VAC1-Phase
HFI-1107-050-F-J11 x 7 in1173.7 kW2-3.9208 VAC1-Phase
HFI-1107-055-L-J11 x 7 in1173.8 kW2-3.9400 VAC1-Phase
HFI-1105-040-D-J11 x 5 in1154.0 kW4-5.9220 VAC1-Phase
HFI-1107-050-F-J11 x 7 in1174.2 kW4-5.9220 VAC1-Phase
HFI-1107-050-F-J11 x 7 in1174.6 kW4-5.9230 VAC1-Phase
HFI-1109-070-F-J11 x 9 in1194.8 kW4-5.9200 VAC1-Phase
HFI-1107-050-F-J11 x 7 in1175.0 kW4-5.9240 VAC1-Phase
HFI-1109-070-F-J11 x 9 in1195.2 kW4-5.9208 VAC1-Phase
HFI-1111-088-L-J11 x 11 in11115.5 kW4-5.9380 VAC1-Phase
HFI-1107-055-L-J11 x 7 in1175.5 kW4-5.9480 VAC1-Phase
HFI-1109-070-F-J11 x 9 in1195.9 kW4-5.9220 VAC1-Phase
HFI-1111-088-L-J11 x 11 in11116.1 kW6-7.9400 VAC1-Phase
HFI-1109-070-F-J11 x 9 in1196.4 kW6-7.9230 VAC1-Phase
HFI-1109-070-F-J11 x 9 in1197.0 kW6-7.9240 VAC1-Phase
HFI-1111-088-L-J11 x 11 in11118.8 kW8-9.9480 VAC1-Phase
HFI-1305-045-L-J13 x 5 in1352.8 kW2-3.9380 VAC1-Phase
HFI-1305-045-L-J13 x 5 in1353.1 kW2-3.9400 VAC1-Phase
HFI-1305-050-F-J13 x 5 in1353.5 kW2-3.9200 VAC1-Phase
HFI-1305-050-F-J13 x 5 in1353.7 kW2-3.9208 VAC1-Phase
HFI-1305-050-F-J13 x 5 in1354.2 kW4-5.9220 VAC1-Phase
HFI-1309-068-L-J13 x 9 in1394.3 kW4-5.9380 VAC1-Phase
HFI-1305-045-L-J13 x 5 in1354.5 kW4-5.9480 VAC1-Phase
HFI-1305-050-F-J13 x 5 in1354.6 kW4-5.9230 VAC1-Phase
HFI-1309-068-L-J13 x 9 in1394.7 kW4-5.9400 VAC1-Phase
HFI-1307-070-F-J13 x 7 in1374.8 kW4-5.9200 VAC1-Phase
HFI-1309-070-F-J13 x 9 in1394.8 kW4-5.9200 VAC1-Phase
HFI-1305-050-F-J13 x 5 in1355.0 kW4-5.9240 VAC1-Phase
HFI-1309-070-F-J13 x 9 in1395.2 kW4-5.9208 VAC1-Phase
HFI-1307-070-F-J13 x 7 in1375.2 kW4-5.9208 VAC1-Phase
HFI-1309-070-F-J13 x 9 in1395.9 kW4-5.9220 VAC1-Phase
HFI-1307-070-F-J13 x 7 in1375.9 kW4-5.9220 VAC1-Phase
HFI-1311-090-Q-J13 x 11 in13116.2 kW6-7.9200 VAC3-Phase
HFI-1309-070-F-J13 x 9 in1396.4 kW6-7.9230 VAC1-Phase
HFI-1307-070-F-J13 x 7 in1376.4 kW6-7.9230 VAC1-Phase
HFI-1309-068-L-J13 x 9 in1396.8 kW6-7.9480 VAC1-Phase
HFI-1311-090-Q-J13 x 11 in13116.8 kW6-7.9208 VAC3-Phase
HFI-1311-110-L-J13 x 11 in13116.9 kW6-7.9380 VAC1-Phase
HFI-1309-070-F-J13 x 9 in1397.0 kW6-7.9240 VAC1-Phase
HFI-1307-070-F-J13 x 7 in1377.0 kW6-7.9240 VAC1-Phase
HFI-1311-110-L-J13 x 11 in13117.6 kW6-7.9400 VAC1-Phase
HFI-1311-090-Q-J13 x 11 in13117.6 kW6-7.9220 VAC3-Phase
HFI-1311-104-E-J13 x 11 in13117.9 kW6-7.9200 VAC1-Phase
HFI-1311-090-W-J13 x 11 in13118.1 kW8-9.9380 VAC3-Phase
HFI-1311-090-Q-J13 x 11 in13118.3 kW8-9.9230 VAC3-Phase
HFI-1311-104-E-J13 x 11 in13118.5 kW8-9.9208 VAC1-Phase
HFI-1311-090-Q-J13 x 11 in13119.0 kW8-9.9240 VAC3-Phase
HFI-1311-090-W-J13 x 11 in13119.0 kW8-9.9400 VAC3-Phase
HFI-1311-104-E-J13 x 11 in13119.5 kW8-9.9220 VAC1-Phase
HFI-1311-104-E-J13 x 11 in131110.4 kW10-11.9230 VAC1-Phase
HFI-1311-110-L-J13 x 11 in131111.0 kW10-11.9480 VAC1-Phase
HFI-1505-055-L-J15 x 5 in1553.4 kW2-3.9380 VAC1-Phase
HFI-1505-050-F-J15 x 5 in1553.5 kW2-3.9200 VAC1-Phase
HFI-1505-050-F-J15 x 5 in1553.7 kW2-3.9208 VAC1-Phase
HFI-1505-055-L-J15 x 5 in1553.8 kW2-3.9400 VAC1-Phase
HFI-1505-050-F-J15 x 5 in1554.2 kW4-5.9220 VAC1-Phase
HFI-1505-050-F-J15 x 5 in1554.6 kW4-5.9230 VAC1-Phase
HFI-1505-050-F-J15 x 5 in1555 kW4-5.9240 VAC1-Phase
HFI-1505-055-L-J15 x 5 in1555.5 kW4-5.9480 VAC1-Phase
HFI-1509-090-L-J15 x 9 in1595.6 kW4-5.9380 VAC1-Phase
HFI-1509-090-L-J15 x 9 in1596.3 kW6-7.9400 VAC1-Phase
HFI-1507-070-XX-J15 x 7 in1576.3 kW6-7.9380 VAC1-Phase
HFI-1509-100-F-J15 x 9 in1596.9 kW6-7.9200 VAC1-Phase
HFI-1507-070-XX-J15 x 7 in1577 kW6-7.9400 VAC1-Phase
HFI-1509-100-F-J15 x 9 in1597.5 kW6-7.9208 VAC1-Phase
HFI-1509-100-F-J15 x 9 in1598.4 kW8-9.9220 VAC1-Phase
HFI-1509-090-L-J15 x 9 in1599.0 kW8-9.9480 VAC1-Phase
HFI-1509-100-F-J15 x 9 in1599.2 kW8-9.9230 VAC1-Phase
HFI-1511-120-O-J15 x 11 in15119.9 kW8-9.9200 VAC3-Phase
HFI-1509-100-F-J15 x 9 in15910.0 kW10-11.9240 VAC1-Phase
HFI-1511-113-W-J15 x 11 in151110.2 kW10-11.9380 VAC3-Phase
HFI-1514-165-V-J15 x 14 in151410.3 kW10-11.9380 VAC3-Phase
HFI-1514-150-Q-J15 x 14 in151410.4 kW10-11.9200 VAC3-Phase
HFI-1511-120-O-J15 x 11 in151110.7 kW10-11.9208 VAC3-Phase
HFI-1514-150-Q-J15 x 14 in151411.2 kW10-11.9208 VAC3-Phase
HFI-1511-113-W-J15 x 11 in151111.3 kW10-11.9400 VAC3-Phase
HFI-1514-165-V-J15 x 14 in151411.4 kW10-11.9400 VAC3-Phase
HFI-1511-120-O-J15 x 11 in151112.0 kW12-13.9220 VAC3-Phase
HFI-1514-150-Q-J15 x 14 in151412.6 kW12-13.9220 VAC3-Phase
HFI-1514-150-Q-J15 x 14 in151413.7 kW12-13.9230 VAC3-Phase
HFI-1514-150-Q-J15 x 14 in151415.0 kW14-15.9240 VAC3-Phase
HFI-1514-165-V-J15 x 14 in151416.4 kW16-17.9480 VAC3-Phase
HFI-1907-088-L-J19 x 7 in1975.5 kW4-5.9380 VAC1-Phase
HFI-1907-088-L-J19 x 7 in1976.1 kW6-7.9400 VAC1-Phase
HFI-1909-090-Q-J19 x 9 in1996.2 kW6-7.9200 VAC3-Phase
HFI-1905-070-XX-J19 x 5 in1956.3 kW6-7.9380 VAC1-Phase
HFI-1909-090-Q-J19 x 9 in1996.8 kW6-7.9208 VAC3-Phase
HFI-1905-070-XX-J19 x 5 in1957.0 kW6-7.9400 VAC1-Phase
HFI-1909-090-Q-J19 x 9 in1997.6 kW6-7.9220 VAC3-Phase
HFI-1909-090-W-J19 x 9 in1998.1 kW8-9.9380 VAC3-Phase
HFI-1909-090-Q-J19 x 9 in1998.3 kW8-9.9230 VAC3-Phase
HFI-1911-135-V-J19 x 11 in19118.5 kW8-9.9380 VAC3-Phase
HFI-1907-088-L-J19 x 7 in1978.8 kW8-9.9480 VAC1-Phase
HFI-1909-090-Q-J19 x 9 in1999.0 kW8-9.9240 VAC3-Phase
HFI-1909-090-W-J19 x 9 in1999.0 kW8-9.9400 VAC3-Phase
HFI-1911-135-V-J19 x 11 in19119.4 kW8-9.9400 VAC3-Phase
HFI-1911-150-Q-J19 x 11 in191110.4 kW10-11.9200 VAC3-Phase
HFI-1911-150-Q-J19 x 11 in191111.2 kW10-11.9208 VAC3-Phase
HFI-1911-150-Q-J19 x 11 in191112.6 kW12-13.9220 VAC3-Phase
HFI-1914-205-V-J19 x 14 in191412.8 kW12-13.9380 VAC3-Phase
HFI-1911-135-V-J19 x 11 in191113.5 kW12-13.9480 VAC3-Phase
HFI-1911-150-Q-J19 x 11 in191113.7 kW12-13.9230 VAC3-Phase
HFI-1914-205-V-J19 x 14 in191414.2 kW14-15.9400 VAC3-Phase
HFI-1914-208-Q-J19 x 14 in191414.5 kW14-15.9200 VAC3-Phase
HFI-1911-150-Q-J19 x 11 in191115.0 kW14-15.9240 VAC3-Phase
HFI-1914-208-Q-J19 x 14 in191415.6 kW14-15.9208 VAC3-Phase
HFI-1914-208-Q-J19 x 14 in191417.5 kW16-17.9220 VAC3-Phase
HFI-1914-208-Q-J19 x 14 in191419.2 kW18-19.9230 VAC3-Phase
HFI-1914-205-V-J19 x 14 in191420.5 kW20-21.9480 VAC3-Phase
HFI-1914-208-Q-J19 x 14 in191420.8 kW20-21.9240 VAC3-Phase