Accubath® 加熱的石英濕式工藝罐
Accubath® 加熱的石英濕式工藝罐 processes using quartz-compatible chemistries up to 190°C…
Accubath® 加熱的石英濕式工藝罐
Accubath® Teflon, PVDF, PFA, NPP 濕式工藝罐
Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
Accubath® Teflon, PVDF, PFA, NPP 濕式工藝罐
Accubath® 加熱的不銹鋼濕式工藝罐
Accubath® 加熱的不銹鋼濕式工藝罐 for reliable and safe performance in static and recirculating systems…
Accubath® 加熱的不銹鋼濕式工藝罐
Accubath® 高溫藍寶石濕蝕刻處理罐
Accubath® 高溫藍寶石濕蝕刻處理罐 safely and reliably heat chemistries up to 300°C…
Accubath® 藍寶石濕蝕刻處理罐
PVDF, 石英, 或不銹鋼 Megasonic Systems
Accumeg® Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems