Accubath™濕式工藝罐

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath™ 加熱的石英濕式工藝罐

Accubath™ 加熱的石英濕式工藝罐 processes using quartz-compatible chemistries up to 190°C…

Accubath™ 加熱的石英濕式工藝罐
Accubath PFA Process Tank

Accubath™ PTFE, PVDF, PFA, NPP 濕式工藝罐

Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

Accubath™ PTFE, PVDF, PFA, NPP 濕式工藝罐
Accubath XE-Lab System Wet Etch Bath

Accubath™ 高溫藍寶石濕蝕刻處理罐

Accubath™ 高溫藍寶石濕蝕刻處理罐 safely and reliably heat chemistries up to 300°C…

Accubath™ 藍寶石濕蝕刻處理罐
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, 石英, 或不銹鋼 Megasonic Systems

Accumeg™ Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays
Accumeg™ Megasonic Systems