概述
White Knight 计量泵提供在单晶片处理工具或预混容器使用，以确保精确的化学混合物，并且允许在原位直接在头部混合调节流速。 泵是在高纯化学品的精确分配补充，混合，计量等应用，以及清洗CVD设备和光刻。 他们是理想的光致抗蚀剂，蚀刻和清洗工艺，食人鱼过氧化混合物扣球，和之前推出基板化学混合物进入处理槽等混合。
特点和优点
- 完全可调的行程速度
- 安全、无泄漏操作，不需要维护
- 无暴露的金属防止腐蚀和污染
- 高纯度化学品完全包揽PTFE流体通道
- PP外壳的PTFE材质的旋转膜片
- 易于安装和检查
- 嵌入或外挂的组件易于安装和维护
- 易于安装在任意方向
- 洁净室内组装，测试及包装
- 泄漏检测口
- 自吸式
- 占用空间小
- 最小的保持量
- 正面的进/出口阀可防止气体通过
泵的规范
| Dispense Range | 1 - 50 ml per stroke |
10 - 100 ml per stroke |
| Dispense Repeatability | ± 0.01% (Full Scale) |
± 0.1% (Full Scale) |
| Cycles Per Minute | up to 6 CPM |
up to 12 CPM |
| Air Consumption SCF per Cycle |
1-3 SCFM |
0.038-0.048 SCFM |
| Fluid Path Materials | PTFE |
PTFE |
| Valve Actuation Air Pressure |
4.14 - 5.52 Bar (60 - 80 psi) |
4.14 - 5.86 Bar (60 - 85 psi) |
| Max Discharge Pressure | 3.8 Bar (55 psi) |
5.86 Bar (85 psi) |
| Temperature Capability | up to 100°C (212°F) |
up to 100°C (212°F) |
| Weight | 2.95 kg 6.5 lb |
1.6 kg (3.5 lb) |
| Suction Lift* | 4.6 Meter 15 Feet |
4.6 Meter 15 Feet |
| Communication | Serial, Ethernet, or Digital (0-5 V, 0-10 V, 4-20 mA) |
- |
| Leak Detection Options | Valve Position Sensing |
Valve Position Sensing |
*Suction lift diminishes over time. Recommended installation level less than 4.6 m (15 ft) above source. Optimized parameters can improve repeatability (up to ± 0.01%). Minimize suction lift to maximize repeatability. Tests conducted with water at ambient temperature. Dispense range measured at full stroke with maximum and minimum supply pressures at 80 psi and 60 psi. Contact White Knight for details.
泵的尺寸
"A" |
"B" |
|
|---|---|---|
| PEM050-02 | 2.7 (69) |
11.0 (279) |
| PEM050-03 | 4.2 (107) |
12.5 (318) |
| PEM050-04 | 4.2 (107) |
12.5 (318) |
| PEM050-05 | 5.7 (145) |
14.0 (356) |
| PEM050-06 | 5.7 (145) |
14.0 (356) |
下载 PEM050 尺寸图(PDF)
