Accubath™ Heated Quartz Wet Process Tanks
Accubath™ heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…
Heated Quartz Wet Process Tanks
Accubath™ PTFE, PVDF, PFA, NPP Wet Process Tanks
Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
PTFE, PVDF, PFA, NPP Tanks
Accubath™ Sapphire Wet Etching Process Tanks
Accubath™ sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…
Sapphire Wet Etch Tanks
PVDF, PFA, or Quartz Megasonic Systems
Accumeg™ Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays
Accumeg™ Megasonic Systems