Wet Process Tanks

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath® Heated Quartz Wet Process Tanks

Accubath® heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

Accubath PVDF QDR Process Tank

Accubath® Teflon, PVDF, PFA, NPP Wet Process Tanks

Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

Accubath Stainless Steel Recirculating Heated Tank

Accubath® Heated SS Wet Process Tanks

Accubath® heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…

Accubath XE-Lab System Wet Etch Bath

Accubath® Sapphire Wet Etching Process Tanks

Accubath® sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, Quartz, or Stainless Steel Megasonic Systems

Accumeg® Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems