Accubath® Heated Quartz Wet Process Tanks
Accubath® heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…
Accubath® Teflon, PVDF, PFA, NPP Wet Process Tanks
Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
Accubath® Heated SS Wet Process Tanks
Accubath® heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…
Accubath® Sapphire Wet Etching Process Tanks
Accubath® sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…
PVDF, Quartz, or Stainless Steel Megasonic Systems
Accumeg® Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems