Wet Process Tanks

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath® Heated Quartz Wet Process Tanks

Accubath® heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

Heated Quartz Wet Process Tanks
Accubath PVDF QDR Process Tank

Accubath® Teflon, PVDF, PFA, NPP Wet Process Tanks

Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

PTFE, PVDF, PFA, NPP Tanks
Accubath Stainless Steel Recirculating Heated Tank

Accubath® Heated SS Wet Process Tanks

Accubath® heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…

Heated SS Wet Process Tanks
Accubath XE-Lab System Wet Etch Bath

Accubath® Sapphire Wet Etching Process Tanks

Accubath® sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Sapphire Wet Etch Tanks
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, Quartz, or Stainless Steel Megasonic Systems

Accumeg® Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems