Wet Process Tanks

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath™ Heated Quartz Wet Process Tanks

Accubath™ heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

Heated Quartz Wet Process Tanks
Accubath PFA Process Tank with Quickdump

Accubath™ PTFE, PVDF, PFA, NPP Wet Process Tanks

Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

PTFE, PVDF, PFA, NPP Tanks
Accubath XE-Lab Sapphire Wet Etch Bath

Accubath™ Sapphire Wet Etching Process Tanks

Accubath™ sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Sapphire Wet Etch Tanks
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating

PVDF, PFA, or Quartz Megasonic Systems

Accumeg™ Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays
Accumeg™ Megasonic Systems