Accubath™ 石英ウェットプロセスタンク
Accubath™ heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…
石英ウェットプロセスタンク
Accubath™ PTFE, PVDF, PFA, NPP ウェットプロセスタンク
Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
PTFE, PVDF, PFA, NPP プロセスタンク
Accubath™ Sapphire ウェーハの洗浄・剥離プロセスタンク
Accubath™ sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…
Sapphire ウェーハの洗浄・剥離プロセスタンク
PVDF, Quartz, or Stainless Steel メガソニック洗浄装置
Accumeg™ Megasonic メガソニック洗浄装置
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays
Accumeg™ Megasonic メガソニック洗浄装置