Accubath® ウェットプロセスタンク

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath® 石英ウェットプロセスタンク

Accubath® heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

石英ウェットプロセスタンク
Accubath PVDF QDR Process Tank

Accubath® Teflon, PVDF, PFA, NPP ウェットプロセスタンク

Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

PTFE, PVDF, PFA, NPP プロセスタンク
Accubath Stainless Steel Recirculating Heated Tank

Accubath® ステンレス鋼ウェットプロセスタンク

Accubath® heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…

ステンレス鋼ウェットプロセスタンク
Accubath XE-Lab System Wet Etch Bath

Accubath® Sapphire ウェーハの洗浄・剥離プロセスタンク

Accubath® sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Sapphire ウェーハの洗浄・剥離プロセスタンク
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, Quartz, or Stainless Steel メガソニック洗浄装置

Accumeg® Megasonic メガソニック洗浄装置

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic メガソニック洗浄装置