White Knight CBU Series Debubblers

Remove Bubbles from High-Temperature Chemical Delivery Processes

Overview

CBU Series debubblers reduce bubbles from high-temperature, ultrapure chemical delivery and wafer process systems. They redirect flow to the surface so that bubbles rise out of the fluid. Their tongue-and-groove seals and dual-static crush seals ensure safe, reliable operation.

CBU Debubbler for High Temperature Chemicals
CBU Series Specification Sheet

Owner's Manuals

CBU Owner’s Manual

Ordering Instructions

CBU Ordering Instructions
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White Knight Two-Year Warranty
White Knight Ultra-Pure Teflon PTFE and PFA Pump Materials
Chemical Recirculation and Delivery 7 Bar (100 psi) Pressures
Fluid Temperatures to 210 Celsius (410 Fahrenheit)

Features & Benefits

  • Process-safe, chemically-resistant PTFE and PFA flow paths
  • 7 Bar (100 psi) pressures for high flow rates and faster processes
  • Up to 210°C (410°F) temperatures
  • Chemical delivery and wafer process debubbling
  • Synchro-Thread™ for fluids up to 210°C (410°F)
  • Leak-Free Tongue-and-Groove seals
  • Reliable, adjustable dual-static crush O-ring seals
  • Easy setup and maintenance without welding
CBU Debubbler Operation Diagram with Deionized Water and Sensors

Operation

CBU Series debubblers redirect flow upward and slows the fluid so that air bubbles rise within the chamber. As air collects at the top, air pressure builds, and the liquid level drops. As air vents, the liquid level rises.

Debubbler Applications

Remove Bubbles After Pumps

Chemical enters the debubbler through the stand tube. Level sensors 1 and 2 control the collected air volume in the debubbler. Collected air exits through the vent line.

Debubbler Removing Bubbles After Pump
Debubbler Removing Bubbles After Pump

Remove Bubbles Before Pumps

Chemical is pulled into the debubbler through the stand tube. Level sensors 1 and 2 control air collection level to purge the collected air, a vacuum is required to remove collected air. This can be achieved using a venturi-type vacuum.

Debubbler Removing Bubbles Before Pump
Debubbler Removing Bubbles Before Pump

Automate Drum Change

Level sensors 1 and 2 act to keep bubbles from the drums from continuing through to the pump. Level 3 indicates an empty drum. This can be used as an automatic drum switch or as a drum empty signal.

Debubbler Automated Drum Change with Empty Signal
Debubbler Automated Drum Change with Empty Signal

Dimensions

[mm] inches

Configuration

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