Accubath™ 加熱的石英濕式工藝罐
Accubath™ 加熱的石英濕式工藝罐 processes using quartz-compatible chemistries up to 190°C…
Accubath™ 加熱的石英濕式工藝罐
Accubath™ PTFE, PVDF, PFA, NPP 濕式工藝罐
Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
Accubath™ PTFE, PVDF, PFA, NPP 濕式工藝罐
Accubath™ 高溫藍寶石濕蝕刻處理罐
Accubath™ 高溫藍寶石濕蝕刻處理罐 safely and reliably heat chemistries up to 300°C…
Accubath™ 藍寶石濕蝕刻處理罐
Wet Process Tank Compatibility
Get the best wet process tank for your processes, chemistries, and applications.
Our material compatibility guide helps engineers specify which tank and cleaning systems best fit their needs.
Material Compatibility with Common Chemistries
PVDF、PFA、石英或 Megasonic 系統
Accumeg™ Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays
Accumeg™ Megasonic Systems