Accubath™ 加熱的石英濕式工藝罐
Accubath™ 加熱的石英濕式工藝罐 processes using quartz-compatible chemistries up to 190°C…
Accubath™ 加熱的石英濕式工藝罐
Accubath™ PTFE, PVDF, PFA, NPP 濕式工藝罐
Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
Accubath™ PTFE, PVDF, PFA, NPP 濕式工藝罐
Accubath™ 高溫藍寶石濕蝕刻處理罐
Accubath™ 高溫藍寶石濕蝕刻處理罐 safely and reliably heat chemistries up to 300°C…
Accubath™ 藍寶石濕蝕刻處理罐
PVDF、PFA、石英或 Megasonic 系統
Accumeg™ Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays
Accumeg™ Megasonic Systems