개요
HFI Series immersion heaters are the perfect solution for heating harsh chemicals or DI water to constant temperatures in ultrapure tanks, including PVDF, PFA, and quartz tanks. Their PFA/PTFE wetted surfaces are ideal for use in high-purity applications where chemical compatibility is of utmost importance. HFI heaters utilize the Heateflex® element to provide high-efficiency heating with superior temperature control and maximum power output in a compact footprint. The heaters are available in various sizes that easily fit new and existing systems common to semiconductor, solar, MEMs, and other technological industries.
기능 및 이점
- Ultrapure PTFE/PFA wetted surfaces
- Reliable heating of harsh chemicals
- Maximum power in compact footprint
- Maximum 200°C heating capability
- Fast temperature response and efficiency
- Each configuration capable of various voltage-to-wattage combinations
- Integrate easily into most PVDF, PFA, and quartz wet process tanks
- Sizes for many tank dimensions
- Compact height of 1-5/8 inch
- Safety features include hi-limit sensor and encapsulated ground wire
- No N2 purge required
Floor Grid 구성
- Top grids separate heaters from wafer carriers and components to increase the available tank space
- Bottom grids separate heaters from the tank floor
- Available for all frame sizes
- Adds 1/8 inch to height
*Shown with top and bottom grid.
사양서
| 히터 요소 | Heateflex® Coil |
|---|---|
| 젖은 표면 | PFA/PTFE |
| 와트수 | 1.0 – 20 kW |
| 전압 | 120 – 480 VAC 1 or 3 phase |
| 크기 (LxW) | 7x5 to 19x14 inch |
| 키 | 1-5/8 inch |
| 온도 | 200°C (392°F) |
| Hi-Limit Sensor | Type-J thermocouple |
| 접지선 | Encapsulated |
| 리드선 | 15-ft |
*All specifications depend on size, voltage, wattage, and customer utilization. See configurations for sizing, capability, and compatibility.
견적 요청대리점 위치 및 연락처
구성
Filter by:
| Model | Size | Wattage | Voltage | Phase |
|---|---|---|---|---|
| HFI-0705-010-B-J-GE | 7 x 5 in | 1.0 kW | 120 VAC | 1-Phase |
| HFI-0705-023-E-J-GE | 7 x 5 in | 1.7 kW | 200 VAC | 1-Phase |
| HFI-0705-023-E-J-GE | 7 x 5 in | 1.9 kW | 208 VAC | 1-Phase |
| HFI-0707-020-B-J-GE | 7 x 7 in | 2.0 kW | 120 VAC | 1-Phase |
| HFI-0705-023-E-J-GE | 7 x 5 in | 2.1 kW | 220 VAC | 1-Phase |
| HFI-0707-030-F-J-GE | 7 x 7 in | 2.1 kW | 200 VAC | 1-Phase |
| HFI-0705-023-E-J-GE | 7 x 5 in | 2.3 kW | 230 VAC | 1-Phase |
| HFI-0707-030-F-J-GE | 7 x 7 in | 2.3 kW | 208 VAC | 1-Phase |
| HFI-0707-030-F-J-GE | 7 x 7 in | 2.5 kW | 220 VAC | 1-Phase |
| HFI-0707-030-F-J-GE | 7 x 7 in | 2.8 kW | 230 VAC | 1-Phase |
| HFI-0707-030-F-J-GE | 7 x 7 in | 3.0 kW | 240 VAC | 1-Phase |
| HFI-0905-020-B-J-GE | 9 x 5 in | 2.0 kW | 120 VAC | 1-Phase |
| HFI-0905-030-F-J-GE | 9 x 5 in | 2.1 kW | 200 VAC | 1-Phase |
| HFI-0905-030-F-J-GE | 9 x 5 in | 2.3 kW | 208 VAC | 1-Phase |
| HFI-0905-030-F-J-GE | 9 x 5 in | 2.5 kW | 220 VAC | 1-Phase |
| HFI-0905-030-XX-J-GE | 9 x 5 in | 2.7 kW | 380 VAC | 1-Phase |
| HFI-0905-030-F-J-GE | 9 x 5 in | 2.8 kW | 230 VAC | 1-Phase |
| HFI-0905-030-XX-J-GE | 9 x 5 in | 3.0 kW | 400 VAC | 1-Phase |
| HFI-0905-030-F-J-GE | 9 x 5 in | 3.0 kW | 240 VAC | 1-Phase |
| HFI-0907-040-D-J-GE | 9 x 7 in | 3.3 kW | 200 VAC | 1-Phase |
| HFI-0909-055-L-J-GE | 9 x 9 in | 3.4 kW | 380 VAC | 1-Phase |
| HFI-0909-050-F-J-GE | 9 x 9 in | 3.5 kW | 200 VAC | 1-Phase |
| HFI-0907-040-D-J-GE | 9 x 7 in | 3.6 kW | 208 VAC | 1-Phase |
| HFI-0909-050-F-J-GE | 9 x 9 in | 3.7 kW | 208 VAC | 1-Phase |
| HFI-0909-055-L-J-GE | 9 x 9 in | 3.8 kW | 400 VAC | 1-Phase |
| HFI-0907-040-D-J-GE | 9 x 7 in | 4.0 kW | 220 VAC | 1-Phase |
| HFI-0909-050-F-J-GE | 9 x 9 in | 4.2 kW | 220 VAC | 1-Phase |
| HFI-0909-050-F-J-GE | 9 x 9 in | 4.6 kW | 230 VAC | 1-Phase |
| HFI-0909-050-F-J-GE | 9 x 9 in | 5.0 kW | 240 VAC | 1-Phase |
| HFI-0909-055-L-J-GE | 9 x 9 in | 5.5 kW | 480 VAC | 1-Phase |
| HFI-1105-040-D-J-GE | 11 x 5 in | 3.3 kW | 200 VAC | 1-Phase |
| HFI-1107-050-F-J-GE | 11 x 7 in | 3.5 kW | 200 VAC | 1-Phase |
| HFI-1107-055-L-J-GE | 11 x 7 in | 3.5 kW | 380 VAC | 1-Phase |
| HFI-1105-040-D-J-GE | 11 x 5 in | 3.6 kW | 208 VAC | 1-Phase |
| HFI-1107-050-F-J-GE | 11 x 7 in | 3.7 kW | 208 VAC | 1-Phase |
| HFI-1107-055-L-J-GE | 11 x 7 in | 3.8 kW | 400 VAC | 1-Phase |
| HFI-1105-040-D-J-GE | 11 x 5 in | 4.0 kW | 220 VAC | 1-Phase |
| HFI-1107-050-F-J-GE | 11 x 7 in | 4.2 kW | 220 VAC | 1-Phase |
| HFI-1107-050-F-J-GE | 11 x 7 in | 4.6 kW | 230 VAC | 1-Phase |
| HFI-1109-070-F-J-GE | 11 x 9 in | 4.8 kW | 200 VAC | 1-Phase |
| HFI-1107-050-F-J-GE | 11 x 7 in | 5.0 kW | 240 VAC | 1-Phase |
| HFI-1109-070-F-J-GE | 11 x 9 in | 5.2 kW | 208 VAC | 1-Phase |
| HFI-1111-088-L-J-GE | 11 x 11 in | 5.5 kW | 380 VAC | 1-Phase |
| HFI-1107-055-L-J-GE | 11 x 7 in | 5.5 kW | 480 VAC | 1-Phase |
| HFI-1109-070-F-J-GE | 11 x 9 in | 5.9 kW | 220 VAC | 1-Phase |
| HFI-1111-088-L-J-GE | 11 x 11 in | 6.1 kW | 400 VAC | 1-Phase |
| HFI-1109-070-F-J-GE | 11 x 9 in | 6.4 kW | 230 VAC | 1-Phase |
| HFI-1109-070-F-J-GE | 11 x 9 in | 7.0 kW | 240 VAC | 1-Phase |
| HFI-1111-088-L-J-GE | 11 x 11 in | 8.8 kW | 480 VAC | 1-Phase |
| HFI-1305-045-L-J-GE | 13 x 5 in | 2.8 kW | 380 VAC | 1-Phase |
| HFI-1305-045-L-J-GE | 13 x 5 in | 3.1 kW | 400 VAC | 1-Phase |
| HFI-1305-050-F-J-GE | 13 x 5 in | 3.5 kW | 200 VAC | 1-Phase |
| HFI-1305-050-F-J-GE | 13 x 5 in | 3.7 kW | 208 VAC | 1-Phase |
| HFI-1305-050-F-J-GE | 13 x 5 in | 4.2 kW | 220 VAC | 1-Phase |
| HFI-1309-068-L-J-GE | 13 x 9 in | 4.3 kW | 380 VAC | 1-Phase |
| HFI-1305-045-L-J-GE | 13 x 5 in | 4.5 kW | 480 VAC | 1-Phase |
| HFI-1305-050-F-J-GE | 13 x 5 in | 4.6 kW | 230 VAC | 1-Phase |
| HFI-1309-068-L-J-GE | 13 x 9 in | 4.7 kW | 400 VAC | 1-Phase |
| HFI-1307-070-F-J-GE | 13 x 7 in | 4.8 kW | 200 VAC | 1-Phase |
| HFI-1309-070-F-J-GE | 13 x 9 in | 4.8 kW | 200 VAC | 1-Phase |
| HFI-1305-050-F-J-GE | 13 x 5 in | 5.0 kW | 240 VAC | 1-Phase |
| HFI-1309-070-F-J-GE | 13 x 9 in | 5.2 kW | 208 VAC | 1-Phase |
| HFI-1307-070-F-J-GE | 13 x 7 in | 5.2 kW | 208 VAC | 1-Phase |
| HFI-1309-070-F-J-GE | 13 x 9 in | 5.9 kW | 220 VAC | 1-Phase |
| HFI-1307-070-F-J-GE | 13 x 7 in | 5.9 kW | 220 VAC | 1-Phase |
| HFI-1311-090-Q-J-GE | 13 x 11 in | 6.2 kW | 200 VAC | 3-Phase |
| HFI-1309-070-F-J-GE | 13 x 9 in | 6.4 kW | 230 VAC | 1-Phase |
| HFI-1307-070-F-J-GE | 13 x 7 in | 6.4 kW | 230 VAC | 1-Phase |
| HFI-1309-068-L-J-GE | 13 x 9 in | 6.8 kW | 480 VAC | 1-Phase |
| HFI-1311-090-Q-J-GE | 13 x 11 in | 6.8 kW | 208 VAC | 3-Phase |
| HFI-1311-110-L-J-GE | 13 x 11 in | 6.9 kW | 380 VAC | 1-Phase |
| HFI-1309-070-F-J-GE | 13 x 9 in | 7.0 kW | 240 VAC | 1-Phase |
| HFI-1307-070-F-J-GE | 13 x 7 in | 7.0 kW | 240 VAC | 1-Phase |
| HFI-1311-110-L-J-GE | 13 x 11 in | 7.6 kW | 400 VAC | 1-Phase |
| HFI-1311-090-Q-J-GE | 13 x 11 in | 7.6 kW | 220 VAC | 3-Phase |
| HFI-1311-104-E-J-GE | 13 x 11 in | 7.9 kW | 200 VAC | 1-Phase |
| HFI-1311-090-W-J-GE | 13 x 11 in | 8.1 kW | 380 VAC | 3-Phase |
| HFI-1311-090-Q-J-GE | 13 x 11 in | 8.3 kW | 230 VAC | 3-Phase |
| HFI-1311-104-E-J-GE | 13 x 11 in | 8.5 kW | 208 VAC | 1-Phase |
| HFI-1311-090-Q-J-GE | 13 x 11 in | 9.0 kW | 240 VAC | 3-Phase |
| HFI-1311-090-W-J-GE | 13 x 11 in | 9.0 kW | 400 VAC | 3-Phase |
| HFI-1311-104-E-J-GE | 13 x 11 in | 9.5 kW | 220 VAC | 1-Phase |
| HFI-1311-104-E-J-GE | 13 x 11 in | 10.4 kW | 230 VAC | 1-Phase |
| HFI-1311-110-L-J-GE | 13 x 11 in | 11.0 kW | 480 VAC | 1-Phase |
| HFI-1505-055-L-J-GE | 15 x 5 in | 3.4 kW | 380 VAC | 1-Phase |
| HFI-1505-050-F-J-GE | 15 x 5 in | 3.5 kW | 200 VAC | 1-Phase |
| HFI-1505-050-F-J-GE | 15 x 5 in | 3.7 kW | 208 VAC | 1-Phase |
| HFI-1505-055-L-J-GE | 15 x 5 in | 3.8 kW | 400 VAC | 1-Phase |
| HFI-1505-050-F-J-GE | 15 x 5 in | 4.2 kW | 220 VAC | 1-Phase |
| HFI-1505-050-F-J-GE | 15 x 5 in | 4.6 kW | 230 VAC | 1-Phase |
| HFI-1505-050-F-J-GE | 15 x 5 in | 5 kW | 240 VAC | 1-Phase |
| HFI-1505-055-L-J-GE | 15 x 5 in | 5.5 kW | 480 VAC | 1-Phase |
| HFI-1509-090-L-J-GE | 15 x 9 in | 5.6 kW | 380 VAC | 1-Phase |
| HFI-1509-090-L-J-GE | 15 x 9 in | 6.3 kW | 400 VAC | 1-Phase |
| HFI-1507-070-XX-J-GE | 15 x 7 in | 6.3 kW | 380 VAC | 1-Phase |
| HFI-1509-100-F-J-GE | 15 x 9 in | 6.9 kW | 200 VAC | 1-Phase |
| HFI-1507-070-XX-J-GE | 15 x 7 in | 7 kW | 400 VAC | 1-Phase |
| HFI-1509-100-F-J-GE | 15 x 9 in | 7.5 kW | 208 VAC | 1-Phase |
| HFI-1509-100-F-J-GE | 15 x 9 in | 8.4 kW | 220 VAC | 1-Phase |
| HFI-1509-090-L-J-GE | 15 x 9 in | 9.0 kW | 480 VAC | 1-Phase |
| HFI-1509-100-F-J-GE | 15 x 9 in | 9.2 kW | 230 VAC | 1-Phase |
| HFI-1511-120-O-J-GE | 15 x 11 in | 9.9 kW | 200 VAC | 3-Phase |
| HFI-1509-100-F-J-GE | 15 x 9 in | 10.0 kW | 240 VAC | 1-Phase |
| HFI-1511-113-W-J-GE | 15 x 11 in | 10.2 kW | 380 VAC | 3-Phase |
| HFI-1514-165-V-J-GE | 15 x 14 in | 10.3 kW | 380 VAC | 3-Phase |
| HFI-1514-150-Q-J-GE | 15 x 14 in | 10.4 kW | 200 VAC | 3-Phase |
| HFI-1511-120-O-J-GE | 15 x 11 in | 10.7 kW | 208 VAC | 3-Phase |
| HFI-1514-150-Q-J-GE | 15 x 14 in | 11.2 kW | 208 VAC | 3-Phase |
| HFI-1511-113-W-J-GE | 15 x 11 in | 11.3 kW | 400 VAC | 3-Phase |
| HFI-1514-165-V-J-GE | 15 x 14 in | 11.4 kW | 400 VAC | 3-Phase |
| HFI-1511-120-O-J-GE | 15 x 11 in | 12.0 kW | 220 VAC | 3-Phase |
| HFI-1514-150-Q-J-GE | 15 x 14 in | 12.6 kW | 220 VAC | 3-Phase |
| HFI-1514-150-Q-J-GE | 15 x 14 in | 13.7 kW | 230 VAC | 3-Phase |
| HFI-1514-150-Q-J-GE | 15 x 14 in | 15.0 kW | 240 VAC | 3-Phase |
| HFI-1514-165-V-J-GE | 15 x 14 in | 16.5 kW | 480 VAC | 3-Phase |
| HFI-1907-088-L-J-GE | 19 x 7 in | 5.5 kW | 380 VAC | 1-Phase |
| HFI-1907-088-L-J-GE | 19 x 7 in | 6.1 kW | 400 VAC | 1-Phase |
| HFI-1909-090-Q-J-GE | 19 x 9 in | 6.2 kW | 200 VAC | 3-Phase |
| HFI-1905-070-XX-J-GE | 19 x 5 in | 6.3 kW | 380 VAC | 1-Phase |
| HFI-1909-090-Q-J-GE | 19 x 9 in | 6.8 kW | 208 VAC | 3-Phase |
| HFI-1905-070-XX-J-GE | 19 x 5 in | 7.0 kW | 400 VAC | 1-Phase |
| HFI-1909-090-Q-J-GE | 19 x 9 in | 7.6 kW | 220 VAC | 3-Phase |
| HFI-1909-090-W-J-GE | 19 x 9 in | 8.1 kW | 380 VAC | 3-Phase |
| HFI-1909-090-Q-J-GE | 19 x 9 in | 8.3 kW | 230 VAC | 3-Phase |
| HFI-1911-135-V-J-GE | 19 x 11 in | 8.5 kW | 380 VAC | 3-Phase |
| HFI-1907-088-L-J-GE | 19 x 7 in | 8.8 kW | 480 VAC | 1-Phase |
| HFI-1909-090-Q-J-GE | 19 x 9 in | 9.0 kW | 240 VAC | 3-Phase |
| HFI-1909-090-W-J-GE | 19 x 9 in | 9.0 kW | 400 VAC | 3-Phase |
| HFI-1911-135-V-J-GE | 19 x 11 in | 9.4 kW | 400 VAC | 3-Phase |
| HFI-1911-150-Q-J-GE | 19 x 11 in | 10.4 kW | 200 VAC | 3-Phase |
| HFI-1911-150-Q-J-GE | 19 x 11 in | 11.2 kW | 208 VAC | 3-Phase |
| HFI-1911-150-Q-J-GE | 19 x 11 in | 12.6 kW | 220 VAC | 3-Phase |
| HFI-1914-205-V-J-GE | 19 x 14 in | 12.8 kW | 380 VAC | 3-Phase |
| HFI-1911-135-V-J-GE | 19 x 11 in | 13.5 kW | 480 VAC | 3-Phase |
| HFI-1911-150-Q-J-GE | 19 x 11 in | 13.7 kW | 230 VAC | 3-Phase |
| HFI-1914-205-V-J-GE | 19 x 14 in | 14.2 kW | 400 VAC | 3-Phase |
| HFI-1914-208-Q-J-GE | 19 x 14 in | 14.5 kW | 200 VAC | 3-Phase |
| HFI-1911-150-Q-J-GE | 19 x 11 in | 15.0 kW | 240 VAC | 3-Phase |
| HFI-1914-208-Q-J-GE | 19 x 14 in | 15.6 kW | 208 VAC | 3-Phase |
| HFI-1914-208-Q-J-GE | 19 x 14 in | 17.5 kW | 220 VAC | 3-Phase |
| HFI-1914-208-Q-J-GE | 19 x 14 in | 19.2 kW | 230 VAC | 3-Phase |
| HFI-1914-205-V-J-GE | 19 x 14 in | 20.5 kW | 480 VAC | 3-Phase |
| HFI-1914-208-Q-J-GE | 19 x 14 in | 20.8 kW | 240 VAC | 3-Phase |