PFA 液浸タンクヒーター


HFI Series immersion heaters are the perfect solution for heating harsh chemicals or DI water to constant temperatures in ultrapure tanks, including PVDF, PFA, and quartz tanks. Their PFA/PTFE wetted surfaces are ideal for use in high-purity applications where chemical compatibility is of utmost importance. HFI heaters utilize the Heateflex® element to provide high-efficiency heating with superior temperature control and maximum power output in a compact footprint. The heaters are available in various sizes that easily fit new and existing systems common to semiconductor, solar, MEMs, and other technological industries.

Heateflex PFA 液浸タンクヒーター
HFI ヒーター御注文手順御見積書の取得現地代理店


  • Ultrapure PTFE/PFA wetted surfaces
  • Reliable heating of harsh chemicals
  • Maximum power in compact footprint
  • Maximum 200°C heating capability
  • Fast temperature response and efficiency
  • Each configuration capable of various voltage-to-wattage combinations
  • Integrate easily into most PVDF, PFA, and quartz wet process tanks
  • Sizes for many tank dimensions
  • Compact height of 1-5/8 inch
  • Safety features include hi-limit sensor and encapsulated ground wire
  • No N2 purge required

Floor Grid 構成

  • Top grids separate heaters from wafer carriers and components to increase the available tank space
  • Bottom grids separate heaters from the tank floor
  • Available for all frame sizes
  • Adds 1/8 inch to height
Perforated Grids for Heateflex PFA 液浸タンクヒーター

*Shown with top and bottom grid.


Heater Element Heateflex® Coil
ワット数 1.0 – 20 kW
電圧 120 – 480 VAC
1 or 3 phase
長さ幅 (LxW) 7x5 to 19x14 inch
身長 1-5/8 inch
温度 200°C (392°F)
Hi-Limit Sensor Type-J thermocouple
アース線 Encapsulated
リード線 15-ft

*All specifications depend on size, voltage, wattage, and customer utilization. See configurations for sizing, capability, and compatibility.



Filter by:

Model Size Length Width Wattage Wattage Voltage Phase
HFI-0705-010-B-J-GE7 x 5 in751.0 kW0-1.9120 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in751.7 kW0-1.9200 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in751.9 kW0-1.9208 VAC1-Phase
HFI-0707-020-B-J-GE7 x 7 in772.0 kW2-3.9120 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in752.1 kW2-3.9220 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.1 kW2-3.9200 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in752.3 kW2-3.9230 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.3 kW2-3.9208 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.5 kW2-3.9220 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.8 kW2-3.9230 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in773.0 kW2-3.9240 VAC1-Phase
HFI-0905-020-B-J-GE9 x 5 in952.0 kW2-3.9120 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.1 kW2-3.9200 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.3 kW2-3.9208 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.5 kW2-3.9220 VAC1-Phase
HFI-0905-030-XX-J-GE9 x 5 in952.7 kW2-3.9380 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.8 kW2-3.9230 VAC1-Phase
HFI-0905-030-XX-J-GE9 x 5 in953.0 kW2-3.9400 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in953.0 kW2-3.9240 VAC1-Phase
HFI-0907-040-D-J-GE9 x 7 in973.3 kW2-3.9200 VAC1-Phase
HFI-0909-055-L-J-GE9 x 9 in993.4 kW2-3.9380 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in993.5 kW2-3.9200 VAC1-Phase
HFI-0907-040-D-J-GE9 x 7 in973.6 kW2-3.9208 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in993.7 kW2-3.9208 VAC1-Phase
HFI-0909-055-L-J-GE9 x 9 in993.8 kW2-3.9400 VAC1-Phase
HFI-0907-040-D-J-GE9 x 7 in974.0 kW4-5.9220 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in994.2 kW4-5.9220 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in994.6 kW4-5.9230 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in995.0 kW4-5.9240 VAC1-Phase
HFI-0909-055-L-J-GE9 x 9 in995.5 kW4-5.9480 VAC1-Phase
HFI-1105-040-D-J-GE11 x 5 in1153.3 kW2-3.9200 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1173.5 kW2-3.9200 VAC1-Phase
HFI-1107-055-L-J-GE11 x 7 in1173.5 kW2-3.9380 VAC1-Phase
HFI-1105-040-D-J-GE11 x 5 in1153.6 kW2-3.9208 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1173.7 kW2-3.9208 VAC1-Phase
HFI-1107-055-L-J-GE11 x 7 in1173.8 kW2-3.9400 VAC1-Phase
HFI-1105-040-D-J-GE11 x 5 in1154.0 kW4-5.9220 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1174.2 kW4-5.9220 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1174.6 kW4-5.9230 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1194.8 kW4-5.9200 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1175.0 kW4-5.9240 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1195.2 kW4-5.9208 VAC1-Phase
HFI-1111-088-L-J-GE11 x 11 in11115.5 kW4-5.9380 VAC1-Phase
HFI-1107-055-L-J-GE11 x 7 in1175.5 kW4-5.9480 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1195.9 kW4-5.9220 VAC1-Phase
HFI-1111-088-L-J-GE11 x 11 in11116.1 kW6-7.9400 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1196.4 kW6-7.9230 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1197.0 kW6-7.9240 VAC1-Phase
HFI-1111-088-L-J-GE11 x 11 in11118.8 kW8-9.9480 VAC1-Phase
HFI-1305-045-L-J-GE13 x 5 in1352.8 kW2-3.9380 VAC1-Phase
HFI-1305-045-L-J-GE13 x 5 in1353.1 kW2-3.9400 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1353.5 kW2-3.9200 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1353.7 kW2-3.9208 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1354.2 kW4-5.9220 VAC1-Phase
HFI-1309-068-L-J-GE13 x 9 in1394.3 kW4-5.9380 VAC1-Phase
HFI-1305-045-L-J-GE13 x 5 in1354.5 kW4-5.9480 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1354.6 kW4-5.9230 VAC1-Phase
HFI-1309-068-L-J-GE13 x 9 in1394.7 kW4-5.9400 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1374.8 kW4-5.9200 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1394.8 kW4-5.9200 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1355.0 kW4-5.9240 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1395.2 kW4-5.9208 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1375.2 kW4-5.9208 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1395.9 kW4-5.9220 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1375.9 kW4-5.9220 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13116.2 kW6-7.9200 VAC3-Phase
HFI-1309-070-F-J-GE13 x 9 in1396.4 kW6-7.9230 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1376.4 kW6-7.9230 VAC1-Phase
HFI-1309-068-L-J-GE13 x 9 in1396.8 kW6-7.9480 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13116.8 kW6-7.9208 VAC3-Phase
HFI-1311-110-L-J-GE13 x 11 in13116.9 kW6-7.9380 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1397.0 kW6-7.9240 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1377.0 kW6-7.9240 VAC1-Phase
HFI-1311-110-L-J-GE13 x 11 in13117.6 kW6-7.9400 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13117.6 kW6-7.9220 VAC3-Phase
HFI-1311-104-E-J-GE13 x 11 in13117.9 kW6-7.9200 VAC1-Phase
HFI-1311-090-W-J-GE13 x 11 in13118.1 kW8-9.9380 VAC3-Phase
HFI-1311-090-Q-J-GE13 x 11 in13118.3 kW8-9.9230 VAC3-Phase
HFI-1311-104-E-J-GE13 x 11 in13118.5 kW8-9.9208 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13119.0 kW8-9.9240 VAC3-Phase
HFI-1311-090-W-J-GE13 x 11 in13119.0 kW8-9.9400 VAC3-Phase
HFI-1311-104-E-J-GE13 x 11 in13119.5 kW8-9.9220 VAC1-Phase
HFI-1311-104-E-J-GE13 x 11 in131110.4 kW10-11.9230 VAC1-Phase
HFI-1311-110-L-J-GE13 x 11 in131111.0 kW10-11.9480 VAC1-Phase
HFI-1505-055-L-J-GE15 x 5 in1553.4 kW2-3.9380 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1553.5 kW2-3.9200 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1553.7 kW2-3.9208 VAC1-Phase
HFI-1505-055-L-J-GE15 x 5 in1553.8 kW2-3.9400 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1554.2 kW4-5.9220 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1554.6 kW4-5.9230 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1555 kW4-5.9240 VAC1-Phase
HFI-1505-055-L-J-GE15 x 5 in1555.5 kW4-5.9480 VAC1-Phase
HFI-1509-090-L-J-GE15 x 9 in1595.6 kW4-5.9380 VAC1-Phase
HFI-1509-090-L-J-GE15 x 9 in1596.3 kW6-7.9400 VAC1-Phase
HFI-1507-070-XX-J-GE15 x 7 in1576.3 kW6-7.9380 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1596.9 kW6-7.9200 VAC1-Phase
HFI-1507-070-XX-J-GE15 x 7 in1577 kW6-7.9400 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1597.5 kW6-7.9208 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1598.4 kW8-9.9220 VAC1-Phase
HFI-1509-090-L-J-GE15 x 9 in1599.0 kW8-9.9480 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1599.2 kW8-9.9230 VAC1-Phase
HFI-1511-120-O-J-GE15 x 11 in15119.9 kW8-9.9200 VAC3-Phase
HFI-1509-100-F-J-GE15 x 9 in15910.0 kW10-11.9240 VAC1-Phase
HFI-1511-113-W-J-GE15 x 11 in151110.2 kW10-11.9380 VAC3-Phase
HFI-1514-165-V-J-GE15 x 14 in151410.3 kW10-11.9380 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151410.4 kW10-11.9200 VAC3-Phase
HFI-1511-120-O-J-GE15 x 11 in151110.7 kW10-11.9208 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151411.2 kW10-11.9208 VAC3-Phase
HFI-1511-113-W-J-GE15 x 11 in151111.3 kW10-11.9400 VAC3-Phase
HFI-1514-165-V-J-GE15 x 14 in151411.4 kW10-11.9400 VAC3-Phase
HFI-1511-120-O-J-GE15 x 11 in151112.0 kW12-13.9220 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151412.6 kW12-13.9220 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151413.7 kW12-13.9230 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151415.0 kW14-15.9240 VAC3-Phase
HFI-1514-165-V-J-GE15 x 14 in151416.4 kW16-17.9480 VAC3-Phase
HFI-1907-088-L-J-GE19 x 7 in1975.5 kW4-5.9380 VAC1-Phase
HFI-1907-088-L-J-GE19 x 7 in1976.1 kW6-7.9400 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1996.2 kW6-7.9200 VAC3-Phase
HFI-1905-070-XX-J-GE19 x 5 in1956.3 kW6-7.9380 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1996.8 kW6-7.9208 VAC3-Phase
HFI-1905-070-XX-J-GE19 x 5 in1957.0 kW6-7.9400 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1997.6 kW6-7.9220 VAC3-Phase
HFI-1909-090-W-J-GE19 x 9 in1998.1 kW8-9.9380 VAC3-Phase
HFI-1909-090-Q-J-GE19 x 9 in1998.3 kW8-9.9230 VAC3-Phase
HFI-1911-135-V-J-GE19 x 11 in19118.5 kW8-9.9380 VAC3-Phase
HFI-1907-088-L-J-GE19 x 7 in1978.8 kW8-9.9480 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1999.0 kW8-9.9240 VAC3-Phase
HFI-1909-090-W-J-GE19 x 9 in1999.0 kW8-9.9400 VAC3-Phase
HFI-1911-135-V-J-GE19 x 11 in19119.4 kW8-9.9400 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191110.4 kW10-11.9200 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191111.2 kW10-11.9208 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191112.6 kW12-13.9220 VAC3-Phase
HFI-1914-205-V-J-GE19 x 14 in191412.8 kW12-13.9380 VAC3-Phase
HFI-1911-135-V-J-GE19 x 11 in191113.5 kW12-13.9480 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191113.7 kW12-13.9230 VAC3-Phase
HFI-1914-205-V-J-GE19 x 14 in191414.2 kW14-15.9400 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191414.5 kW14-15.9200 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191115.0 kW14-15.9240 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191415.6 kW14-15.9208 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191417.5 kW16-17.9220 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191419.2 kW18-19.9230 VAC3-Phase
HFI-1914-205-V-J-GE19 x 14 in191420.5 kW20-21.9480 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191420.8 kW20-21.9240 VAC3-Phase