PFA Immersion Tank Heaters

Overview

HFI Series immersion heaters are the perfect solution for heating harsh chemicals or DI water to constant temperatures in ultrapure tanks, including PVDF, PFA, and quartz tanks. Their PFA/PTFE wetted surfaces are ideal for use in high-purity applications where chemical compatibility is of utmost importance. HFI heaters utilize the Heateflex® element to provide high-efficiency heating with superior temperature control and maximum power output in a compact footprint. The heaters are available in various sizes that easily fit new and existing systems common to semiconductor, solar, MEMs, and other technological industries.

Heateflex PFA Immersion Tank Frame Heaters
PFA Heaters Spec Sheet
PFA Immersion Tank Heater Manual
HFI Ordering InstuctionsGet QuoteHeateflex Distributors
Verification of Compliance IEC/EN/UL 61010-1Test Report IEC/EN/UL 61010-1
Calculators for Heaters

Features & Benefits

  • Ultrapure PTFE/PFA wetted surfaces
  • Reliable heating of harsh chemicals
  • Maximum power in compact footprint
  • Maximum 200°C heating capability
  • Fast temperature response and efficiency
  • Each configuration capable of various voltage-to-wattage combinations
  • Integrate easily into most PVDF, PFA, and quartz wet process tanks
  • Sizes for many tank dimensions
  • Compact height of 1-5/8 inch
  • Safety features include hi-limit sensor and encapsulated ground wire
  • No N2 purge required

Optional Perforated Grids

  • Top grids separate heaters from wafer carriers and components to increase the available tank space
  • Bottom grids separate heaters from the tank floor
  • Available for all frame sizes
  • Adds 1/8 inch to height
Heateflex PFA Immersion Tank Frame Heaters Perforated Grids

*Shown with top and bottom grid.

Specifications

Heater Element Heateflex® Coil
Wetted Surfaces PFA/PTFE
Wattages 1.0 – 20 kW
Voltages 120 – 480 VAC
1 or 3 phase
Sizes (LxW) 7x5 to 19x14 inch
Height 1-5/8 inch
Temperature 200°C (392°F)
Hi-Limit Sensor Type-J thermocouple
Ground Wire Encapsulated
Lead Wire 15-ft

*All specifications depend on size, voltage, wattage, and customer utilization. See configurations for sizing, capability, and compatibility.

Get QuoteHeateflex Distributors

Standard Configurations

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Model Size Length Width Wattage Wattage Voltage Phase
HFI-0705-010-B-J-GE7 x 5 in751.0 kW0-1.9120 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in751.7 kW0-1.9200 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in751.9 kW0-1.9208 VAC1-Phase
HFI-0707-020-B-J-GE7 x 7 in772.0 kW2-3.9120 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in752.1 kW2-3.9220 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.1 kW2-3.9200 VAC1-Phase
HFI-0705-023-E-J-GE7 x 5 in752.3 kW2-3.9230 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.3 kW2-3.9208 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.5 kW2-3.9220 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in772.8 kW2-3.9230 VAC1-Phase
HFI-0707-030-F-J-GE7 x 7 in773.0 kW2-3.9240 VAC1-Phase
HFI-0905-020-B-J-GE9 x 5 in952.0 kW2-3.9120 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.1 kW2-3.9200 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.3 kW2-3.9208 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.5 kW2-3.9220 VAC1-Phase
HFI-0905-030-XX-J-GE9 x 5 in952.7 kW2-3.9380 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in952.8 kW2-3.9230 VAC1-Phase
HFI-0905-030-XX-J-GE9 x 5 in953.0 kW2-3.9400 VAC1-Phase
HFI-0905-030-F-J-GE9 x 5 in953.0 kW2-3.9240 VAC1-Phase
HFI-0907-040-D-J-GE9 x 7 in973.3 kW2-3.9200 VAC1-Phase
HFI-0909-055-L-J-GE9 x 9 in993.4 kW2-3.9380 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in993.5 kW2-3.9200 VAC1-Phase
HFI-0907-040-D-J-GE9 x 7 in973.6 kW2-3.9208 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in993.7 kW2-3.9208 VAC1-Phase
HFI-0909-055-L-J-GE9 x 9 in993.8 kW2-3.9400 VAC1-Phase
HFI-0907-040-D-J-GE9 x 7 in974.0 kW4-5.9220 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in994.2 kW4-5.9220 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in994.6 kW4-5.9230 VAC1-Phase
HFI-0909-050-F-J-GE9 x 9 in995.0 kW4-5.9240 VAC1-Phase
HFI-0909-055-L-J-GE9 x 9 in995.5 kW4-5.9480 VAC1-Phase
HFI-1105-040-D-J-GE11 x 5 in1153.3 kW2-3.9200 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1173.5 kW2-3.9200 VAC1-Phase
HFI-1107-055-L-J-GE11 x 7 in1173.5 kW2-3.9380 VAC1-Phase
HFI-1105-040-D-J-GE11 x 5 in1153.6 kW2-3.9208 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1173.7 kW2-3.9208 VAC1-Phase
HFI-1107-055-L-J-GE11 x 7 in1173.8 kW2-3.9400 VAC1-Phase
HFI-1105-040-D-J-GE11 x 5 in1154.0 kW4-5.9220 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1174.2 kW4-5.9220 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1174.6 kW4-5.9230 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1194.8 kW4-5.9200 VAC1-Phase
HFI-1107-050-F-J-GE11 x 7 in1175.0 kW4-5.9240 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1195.2 kW4-5.9208 VAC1-Phase
HFI-1111-088-L-J-GE11 x 11 in11115.5 kW4-5.9380 VAC1-Phase
HFI-1107-055-L-J-GE11 x 7 in1175.5 kW4-5.9480 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1195.9 kW4-5.9220 VAC1-Phase
HFI-1111-088-L-J-GE11 x 11 in11116.1 kW6-7.9400 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1196.4 kW6-7.9230 VAC1-Phase
HFI-1109-070-F-J-GE11 x 9 in1197.0 kW6-7.9240 VAC1-Phase
HFI-1111-088-L-J-GE11 x 11 in11118.8 kW8-9.9480 VAC1-Phase
HFI-1305-045-L-J-GE13 x 5 in1352.8 kW2-3.9380 VAC1-Phase
HFI-1305-045-L-J-GE13 x 5 in1353.1 kW2-3.9400 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1353.5 kW2-3.9200 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1353.7 kW2-3.9208 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1354.2 kW4-5.9220 VAC1-Phase
HFI-1309-068-L-J-GE13 x 9 in1394.3 kW4-5.9380 VAC1-Phase
HFI-1305-045-L-J-GE13 x 5 in1354.5 kW4-5.9480 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1354.6 kW4-5.9230 VAC1-Phase
HFI-1309-068-L-J-GE13 x 9 in1394.7 kW4-5.9400 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1374.8 kW4-5.9200 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1394.8 kW4-5.9200 VAC1-Phase
HFI-1305-050-F-J-GE13 x 5 in1355.0 kW4-5.9240 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1395.2 kW4-5.9208 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1375.2 kW4-5.9208 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1395.9 kW4-5.9220 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1375.9 kW4-5.9220 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13116.2 kW6-7.9200 VAC3-Phase
HFI-1309-070-F-J-GE13 x 9 in1396.4 kW6-7.9230 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1376.4 kW6-7.9230 VAC1-Phase
HFI-1309-068-L-J-GE13 x 9 in1396.8 kW6-7.9480 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13116.8 kW6-7.9208 VAC3-Phase
HFI-1311-110-L-J-GE13 x 11 in13116.9 kW6-7.9380 VAC1-Phase
HFI-1309-070-F-J-GE13 x 9 in1397.0 kW6-7.9240 VAC1-Phase
HFI-1307-070-F-J-GE13 x 7 in1377.0 kW6-7.9240 VAC1-Phase
HFI-1311-110-L-J-GE13 x 11 in13117.6 kW6-7.9400 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13117.6 kW6-7.9220 VAC3-Phase
HFI-1311-104-E-J-GE13 x 11 in13117.9 kW6-7.9200 VAC1-Phase
HFI-1311-090-W-J-GE13 x 11 in13118.1 kW8-9.9380 VAC3-Phase
HFI-1311-090-Q-J-GE13 x 11 in13118.3 kW8-9.9230 VAC3-Phase
HFI-1311-104-E-J-GE13 x 11 in13118.5 kW8-9.9208 VAC1-Phase
HFI-1311-090-Q-J-GE13 x 11 in13119.0 kW8-9.9240 VAC3-Phase
HFI-1311-090-W-J-GE13 x 11 in13119.0 kW8-9.9400 VAC3-Phase
HFI-1311-104-E-J-GE13 x 11 in13119.5 kW8-9.9220 VAC1-Phase
HFI-1311-104-E-J-GE13 x 11 in131110.4 kW10-11.9230 VAC1-Phase
HFI-1311-110-L-J-GE13 x 11 in131111.0 kW10-11.9480 VAC1-Phase
HFI-1505-055-L-J-GE15 x 5 in1553.4 kW2-3.9380 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1553.5 kW2-3.9200 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1553.7 kW2-3.9208 VAC1-Phase
HFI-1505-055-L-J-GE15 x 5 in1553.8 kW2-3.9400 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1554.2 kW4-5.9220 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1554.6 kW4-5.9230 VAC1-Phase
HFI-1505-050-F-J-GE15 x 5 in1555 kW4-5.9240 VAC1-Phase
HFI-1505-055-L-J-GE15 x 5 in1555.5 kW4-5.9480 VAC1-Phase
HFI-1509-090-L-J-GE15 x 9 in1595.6 kW4-5.9380 VAC1-Phase
HFI-1509-090-L-J-GE15 x 9 in1596.3 kW6-7.9400 VAC1-Phase
HFI-1507-070-XX-J-GE15 x 7 in1576.3 kW6-7.9380 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1596.9 kW6-7.9200 VAC1-Phase
HFI-1507-070-XX-J-GE15 x 7 in1577 kW6-7.9400 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1597.5 kW6-7.9208 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1598.4 kW8-9.9220 VAC1-Phase
HFI-1509-090-L-J-GE15 x 9 in1599.0 kW8-9.9480 VAC1-Phase
HFI-1509-100-F-J-GE15 x 9 in1599.2 kW8-9.9230 VAC1-Phase
HFI-1511-120-O-J-GE15 x 11 in15119.9 kW8-9.9200 VAC3-Phase
HFI-1509-100-F-J-GE15 x 9 in15910.0 kW10-11.9240 VAC1-Phase
HFI-1511-113-W-J-GE15 x 11 in151110.2 kW10-11.9380 VAC3-Phase
HFI-1514-165-V-J-GE15 x 14 in151410.3 kW10-11.9380 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151410.4 kW10-11.9200 VAC3-Phase
HFI-1511-120-O-J-GE15 x 11 in151110.7 kW10-11.9208 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151411.2 kW10-11.9208 VAC3-Phase
HFI-1511-113-W-J-GE15 x 11 in151111.3 kW10-11.9400 VAC3-Phase
HFI-1514-165-V-J-GE15 x 14 in151411.4 kW10-11.9400 VAC3-Phase
HFI-1511-120-O-J-GE15 x 11 in151112.0 kW12-13.9220 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151412.6 kW12-13.9220 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151413.7 kW12-13.9230 VAC3-Phase
HFI-1514-150-Q-J-GE15 x 14 in151415.0 kW14-15.9240 VAC3-Phase
HFI-1514-165-V-J-GE15 x 14 in151416.4 kW16-17.9480 VAC3-Phase
HFI-1907-088-L-J-GE19 x 7 in1975.5 kW4-5.9380 VAC1-Phase
HFI-1907-088-L-J-GE19 x 7 in1976.1 kW6-7.9400 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1996.2 kW6-7.9200 VAC3-Phase
HFI-1905-070-XX-J-GE19 x 5 in1956.3 kW6-7.9380 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1996.8 kW6-7.9208 VAC3-Phase
HFI-1905-070-XX-J-GE19 x 5 in1957.0 kW6-7.9400 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1997.6 kW6-7.9220 VAC3-Phase
HFI-1909-090-W-J-GE19 x 9 in1998.1 kW8-9.9380 VAC3-Phase
HFI-1909-090-Q-J-GE19 x 9 in1998.3 kW8-9.9230 VAC3-Phase
HFI-1911-135-V-J-GE19 x 11 in19118.5 kW8-9.9380 VAC3-Phase
HFI-1907-088-L-J-GE19 x 7 in1978.8 kW8-9.9480 VAC1-Phase
HFI-1909-090-Q-J-GE19 x 9 in1999.0 kW8-9.9240 VAC3-Phase
HFI-1909-090-W-J-GE19 x 9 in1999.0 kW8-9.9400 VAC3-Phase
HFI-1911-135-V-J-GE19 x 11 in19119.4 kW8-9.9400 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191110.4 kW10-11.9200 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191111.2 kW10-11.9208 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191112.6 kW12-13.9220 VAC3-Phase
HFI-1914-205-V-J-GE19 x 14 in191412.8 kW12-13.9380 VAC3-Phase
HFI-1911-135-V-J-GE19 x 11 in191113.5 kW12-13.9480 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191113.7 kW12-13.9230 VAC3-Phase
HFI-1914-205-V-J-GE19 x 14 in191414.2 kW14-15.9400 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191414.5 kW14-15.9200 VAC3-Phase
HFI-1911-150-Q-J-GE19 x 11 in191115.0 kW14-15.9240 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191415.6 kW14-15.9208 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191417.5 kW16-17.9220 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191419.2 kW18-19.9230 VAC3-Phase
HFI-1914-205-V-J-GE19 x 14 in191420.5 kW20-21.9480 VAC3-Phase
HFI-1914-208-Q-J-GE19 x 14 in191420.8 kW20-21.9240 VAC3-Phase