Aquarius® 脱イオン(DI)温水器システム

Heateflex Aquarius 脱イオン(DI)温水器システム

概要

Aquarius® deionized (DI) water heater is the perfect solution for high-purity heating applications requiring accurate temperature control. Aquarius® heaters provide continuous flows of at-temperature, hot DI water. Its Power-to-Flow Control™ system provides accurate temperature control. The systems eliminate undesirable overshoots or drops in fluid temperature. Aquarius® heaters are available in various models with a range of heater outputs that can provides operational cost savings, and eliminate the need for multiple heaters.

温度管理

Aquarius’ Programmable Logic Controller (PLC) uses Power-to-Flow Control to manage multi-loop capability and feed-forward functions. It quickly detects variations in process flow rate and adjusts the power supplied at each zone of the multi-stage heat process, producing a steady stream of DI water at a stable temperature.

作り付けの安全

Aquarius® includes a wide range of operator safety features. For example, the system includes an advanced ground fault circuit interrupter (GFCI) system with a sub-30 mamp rating. Furthermore, it has a Short Circuit Current Rating (SCCR) of 100,000 Amps. And, the door interlocks, the EMO, and the GFCIs feature redundant safety PLC systems, and NIST-certified thermocouples. Finally, dual pressure relief valves ensure rapid dissipation for both input and output flows.

ハイライト

At the heart of the Aquarius® is the patented Heateflex heating coil, with PVDF/PFA wetted surfaces. DI water temperature is 95º C (203º F), with 0.1º C temperature accuracy, at 60 PSIG. Heater flows are 0.5 GPM (1.9 LPM) to 32 GMP (122 LPM). And with models from 40 kW to 225 kW available (200 VAC to 480 VAC, 3-ph), the Aquarius® provides an operational cost savings by reducing the need for multiple heaters.

冊子

Aquarius® 冊子Advantages of Using Hot DI Water

オーナーマニュル

Aquarius System ManualAquarius Controller ManualHeateflex Warranty

システム図

Aquarius システム図

認証

SEMI S2, S3, S8 & UL 認証

動画

Replacing Fuses
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特長とメリット

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller with power-to-flow control™ delivers enhanced temperature stability with constant, stable, and accurate temperature output
  • High-resolution touch-screen with user-friendly graphical user interface meets and exceeds stringent requirements for UL-499, Semi s2, Semi s3, and CE
  • Plug-and-play system with complete integration of controls
  • Ethernet read/write connection enables rapidly transfer of heater data to a fab SECS/GEM system (other communications available)
  • No N2 purge required

安全機能

  • Short circuit current rating at 100 kA Amps
  • Ground fault circuit interrupter, sub-30 mAmp rating
  • Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and high-limit thermocouples
  • NIST-certified thermocouples
  • Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation

Power-To-Flow™ Control

Heateflex’s patented Power-To-Flow Control™ is an innovative control system designed to provide accurate temperature output in single pass heating applications. Power-To-Flow Control eliminates undesirable overshoots or drops in temperature. The sophisticated Aquarius® temperature control system features multi-loop capability and feed-forward functions to compensate for variations in the process flow rate. It measures the flow rate of fluid as it comes into the heater, measuring the temperature at various stages in the heating process, and then adjusting the proportion of power applied to each heating zone based on these measurements. This advanced integrated control method reacts quickly to any variations in flow, providing a steady flow of DI water at a stable temperature.

  • Excellent Temperature Stability
  • Rapid Response to Temperature & Flow Variations
  • Eliminates Excessive Overshoots & Drops in Temperature

仕様

Heater
Patented Heateflex® Coil
Wetted Surfaces
PVDF/PFA
Sizes
40 kW to 225 kW (dependent on customer voltage)
Voltages
200 VAC to 480 VAC, 3-ph (dependent on wattage)
Temperature
95º C (203º F)
Temperature Accuracy
+/- 0.1º C (contingent on customer’s facilitation)
Flow
0.5 GPM (1.9 LPM) to 32 GPM (122 LPM)
Pressure
60 PSIG @ 95ºC
Efficiency
>99 %
MTBF
10.29 years

寸法

インチ H x W x D

Model
kW
Low VAC Standard Model
High VAC Standard Model
Low VAC with Recirculation
High VAC with Recirculation
DI-40
40
78 x 32 x 24
78 x 24 x 24
78 x 24 x 24
78 x 24 x 24
DI-80
80
78 x 32 x 24
78 x 24 x 24
78 x 32 x 24
78 x 24 x 24
DI-100
100
78 x 39 x 24
78 x 32 x 24
78 x 39 x 24
78 x 32 x 24
DI-120
120
78 x 39 x 24
78 x 32 x 24
78 x 39 x 24
78 x 32 x 24
DI-160
160
N/A
78 x 39 x 24
N/A
78 x 39 x 24
DI-200
200
N/A
78 x 39 x 24
N/A
78 x 39 x 24
DI-225
225
N/A
78 x 39 x 24
N/A
78 x 39 x 24
Model
kW
Low VAC Standard Model
High VAC Standard Model
Low VAC with Recirculation
High VAC with Recirculation

*Low VAC: 200-240 VAC, 3-Phase · High VAC: 380-480 VAC, 3-Phase

構成

  • Built-in recirculation
  • Fusible Disconnect with Lock-out/Tag-out
  • Auto Purge (Pump Not Included)
  • Resistivity Sensor
  • Leak Alarms (Critical and Non-Critical)
  • Discrete Interface
  • Analog Interface
  • Dry Contact Interface
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