Aquarius® Deionized Water Heater Systems

Heateflex Aquarius Deionized (DI) Water Heater Systems

Overview

Aquarius® DI water heating systems are ideal for high-purity processes that require continuous flows of hot DI water with accurate and precise temperature control. The heaters feature the ultrapure Heateflex® heating coil, Power-to-Flow™ control systems, and many operator safeties. Various output options help meet demanding flow and temperature requirements. Aquarius® systems offer operational cost savings by reducing the need for multiple heaters. Aquarius-ECO™ models are also available for improved water and energy conservation.

Power-to-Flow™ Control

Power-to-Flow™ controls provide accurate temperature output in single-pass heating applications. It eliminates undesirable overshoots or drops in temperature. The sophisticated control systems feature multi-loop capability and feed-forward functions to moderate variations in the process flow rate. It measures flow and temperature at various stages, and adjusts the power applied to each heating zone accordingly. This advanced integrated system reacts quickly to flow variations to provide a steady stream of DIW at a stable temperature.

Aquarius® Spec SheetAdvantages of Using Hot DIW
Aquarius Ordering Instructions
Aquarius System ManualAquarius Controller Manual
Aquarius System Drawing
SEMI S2, S3, S8 & UL Certificates
Replacing Fuses
Get QuoteHeateflex DistributorsCalculators for Heaters

Features & Benefits

  • Ultrapure PVDF/PFA wetted surfaces
  • High-resolution touch-screen
  • User-friendly graphical user interface (GUI)
  • Plug-and-play system with complete integration of controls
  • No N2 purge required

Temperature Controls

  • Excellent temperature stability
  • Fast response to temperature and flow variations
  • Eliminates excessive overshoots and drops in temperature
  • Programmable logic controller (PLC) with Power-to-Flow™ control delivers constant, stable, and accurate temperature output
  • Ethernet read/write connection enables rapid transfer of heater data to fab SECS/GEM systems (other communications available)

Safety Features

  • Meets or exceeds stringent requirements for UL-499, SEMI S2, SEMI S3, and CE
  • Short Circuit Current Rating (SCCR) at 100 kA
  • Ground fault circuit interrupter (GFCI) system with a sub-30 mA rating
  • Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and hi-limit thermocouples
  • Redundant safety monitoring relay for door interlock switch and EMO
  • NIST-certified thermocouples
  • Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation
  • Ground options for electrical safety and DIW compatibility

Aquarius-ECO™ systems are upgraded recirculating models that utilizes ultrapure White Knight pumps with Heateflex’s advanced heating technology. This upgraded system improves performance and provides energy and water savings while still providing the same temperature performance. The valve may be located at the point of use.

Demand Mode: Fluid goes to process when it is in demand.

Recirculation Mode: Fluid recirculates and maintains temperature. No fluid is used.

Heateflex® Aquarius-ECO™ Ultrapure DI Water Systems
Heateflex Aquarius-ECO Ultrapure DI Water Systems
  • Reduce water
  • Reduce energy consumption
  • Save money
  • Heated Point-of-Use systems
  • Complete heated coverage on demand
  • No wasted, unheated water to drain
  • React quickly to flow variations
  • Provide accurate output temperature
  • Reduce excessive temperature drops and overshoots

Specifications

Heater Element
Heateflex® Coil
Wetted Surfaces
PVDF/PFA
Sizes
40-225 kW
(voltage dependent)
Voltages
200-480 VAC, 3-ph
(wattage dependent)
Temperature
95º C (203º F)
Temperature Accuracy
+/- 0.1º C
(usage dependent)
Flow
0.5-32 GPM
(1.9-122 LPM)
Pressure
60 PSIG @ 95ºC
Efficiency
>99 %

*All specifications dependent on configuration.

Dimensions

Inches H x W x D

Model
kW
Low VAC
High VAC
DI-40
40
78 x 24 x 24
78 x 24 x 24
DI-80
80
78 x 32 x 24
78 x 24 x 24
DI-100
100
78 x 39 x 24
78 x 32 x 24
DI-120
120
78 x 39 x 24
78 x 32 x 24
DI-140
140
N/A
78 x 32 x 24
DI-160
160
N/A
78 x 32 x 24
DI-200
200
N/A
78 x 39 x 24
DI-225
225
N/A
78 x 39 x 24
Model
kW
Low VAC
High VAC

*Low VAC: 200-240 VAC, 3-Phase
*High VAC: 380-480 VAC, 3-Phase

Options

  • Fusible Disconnect with Lock-out/Tag-out
  • Auto Purge (Pump Not Included)
  • Resistivity Sensor
  • Leak Alarms (Critical and Non-Critical)
  • Discrete Interface
  • Analog Interface
  • Dry Contact Interface
Get QuoteHeateflex Distributors