化学品搅拌,混合和脉冲

计量泵可以准确地配给腐蚀的液体

计量泵

White Knight 计量泵提供在单晶片处理工具或预混容器使用,以确保精确的化学混合物,并且允许在原位直接在头部混合调节流速。 泵是在高纯化学品的精确分配补充,混合,计量等应用,以及清洗CVD设备和光刻。 他们是理想的光致抗蚀剂,蚀刻和清洗工艺,食人鱼过氧化混合物扣球,和之前推出基板化学混合物进入处理槽等混合。

  • 完全可调的行程速度
  • 安全、无泄漏操作,不需要维护
  • 无暴露的金属防止腐蚀和污染
  • 高纯度化学品完全包揽PTFE流体通道
  • PP外壳的PTFE材质的旋转膜片
  • 易于安装在任意方向
计量泵
White Knight PEM050 Electronic Metering Pumps

电动计量泵

PEM050电子计量泵具有可调节行程的能力可执行高达50 ml及±0.01%重复性。 使用PLC系统压力范围60-85 psi,支持活动的膜片。 有2、3、4、5、6接口可以选择。

PEM050电子式计量泵
White Knight PPM100 气动计量泵

气动计量泵

PPM100气动计量泵分配到具有±0.1%的重复性100毫升腐蚀性液体。 压力范围60-85 psi可调整工作行程,支持活动的膜片。 两个可以精确控制的止回阀。

PPM100气动计量泵

化学品搅拌和混合

Heateflex 化学品搅拌和混合

概述
Mixing and blending are often the most demanding operations in chemical process applications. Heateflex engineers solutions for industries that rely heavily on mixing, blending and heating technology, such as found in the semiconductor, life science, and food & beverage industries. Heateflex tools enable fast blend times, with added flexibility, ease of cleaning, and a range of customized features that are carefully designed to optimize scale-up and to ensure effective and efficient mixing.

Heateflex also incorporates blending technologies in temperature trimming applications where precise degree control is of utmost importance. Our patented technologies achieve accurate and consistent DI water temperatures by successfully blending cool/ambient water with heated supply water.

产品信息

Heateflex Fluidix 蒸汽动力去离子(DI)热水器系统

Fluidix® 蒸汽动力去离子水加热器系统

Fluidix® 蒸汽动力去离子水加热器系统 offer the semiconductor industry a low-cost alternative to…

Fluidix® Heaters
Heateflex Aquarius 去离子水加热器系统

Aquarius® 去离子水加热器系统

Aquarius® 去离子水加热器系统 are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller delivers enhanced temperature stability
  • No N2 purge required
  • Plug-and-play system with fully integrated controls
  • High-resolution touch-screen
  • Save costs by reducing the need for multiple immersion heaters
Aquarius® DI Water Heater Systems