White Knight metering pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. They were designed for chemical replenishing, blending, dosing, and spiking applications, as well as uses in cleaning of CVD equipment and photolithography. They are ideal for photoresist, etch and clean processes, peroxide spiking in piranha mixtures, and other blending of chemical mixtures into process tanks prior to the introduction of substrates.
- Fully adjustable stroke speeds
- Safe, leak-free operation with no maintenance
- No exposed metalics prevents corrosion and contamination
- Fully-swept PTFE fluid path for ultra-pure applications
- PTFE rolling diaphragm with PP housing
- Easy to install in any orientation
PEM050 electronic metering pumps with adjustable stroke that is capable of dispensing up to 50ml with ± 0.01% repeatability. They operate at 60-80 psi with programmable system logic and a fully supported rolling diaphragm. There are 2, 3, 4, 5 and 6 port options.
PPM100 pneumatic metering pumps dispense up to 100ml of corrosive media with ± 0.1% repeatability. They operate at 60-85 psi with an adjustable stroke and a fully supported rolling diaphragm. Two positive control valves ensure accuracy by eliminating variability that is typical of check valves.
Why Choose White Knight?
We Solve Fluid Handling Problems
White Knight Benefits
We understand the importance of quality materials and purity in the manufacturing environment. We go to great lengths to guarantee the purest, cleanest pumps with the industry’s best warranty.
White Knight engineers design superior fluid handling solutions for CMP slurry.