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White Knight metering pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. They were designed for chemical replenishing, blending, dosing, and spiking applications, as well as uses in cleaning of CVD equipment and photolithography. They are ideal for photoresist, etch and clean processes, peroxide spiking in piranha mixtures, and other blending of chemical mixtures into process tanks prior to the introduction of substrates.
- Fully adjustable stroke speeds
- Safe, leak-free operation with no maintenance
- No exposed metalics prevents corrosion and contamination
- Fully-swept PTFE fluid path for ultra-pure applications
- PTFE rolling diaphragm with PP housing
- Easy to install in any orientation
PEM050 electronic metering pumps with adjustable stroke that is capable of dispensing up to 50ml with ± 0.01% repeatability. They operate at 60-80 psi with programmable system logic and a fully supported rolling diaphragm. There are 2, 3, 4, 5 and 6 port options.
PPM100 pneumatic metering pumps dispense up to 100ml of corrosive media with ± 0.1% repeatability. They operate at 60-85 psi with an adjustable stroke and a fully supported rolling diaphragm. Two positive control valves ensure accuracy by eliminating variability that is typical of check valves.
Blending & Mixing Heaters
Heateflex Ultrapure Fluid Blending & Mixing Systems
Mixing and blending are often the most demanding operations in chemical process applications. Heateflex engineers solutions for industries that rely heavily on mixing, blending and heating technology, such as found in the semiconductor, life science, and food & beverage industries. Heateflex tools enable fast blend times, with added flexibility, ease of cleaning, and a range of customized features that are carefully designed to optimize scale-up and to ensure effective and efficient mixing.
Heateflex also incorporates blending technologies in temperature trimming applications where precise degree control is of utmost importance. Our patented technologies achieve accurate and consistent DI water temperatures by successfully blending cool/ambient water with heated supply water.
Aquarius® deionized (DI) water heaters are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.
- Ultra-pure design with PVDF/PFA wetted surfaces
- Programmable logic controller delivers enhanced temperature stability
- No N2 purge required
- Plug-and-play system with fully integrated controls
- High-resolution touch-screen
- Save costs by reducing the need for multiple immersion heaters