概要
Aquarius® water heating systems are ideal for high-purity processes that require accurate, precise temperature control and continuous flows of hot purified water, such as deionized (DI) water or ultrapure water (UPW). They feature Heateflex® heating coils, Power-to-Flow™ control systems, and operator safeties. Various output options help meet demanding flow and temperature requirements. Aquarius provides an operational cost savings by reducing the need for multiple heaters. Aquarius-ECO™ models are also available for improved water and energy conservation.
Power-to-Flow™ Control
Power-to-Flow™ controls provide accurate temperature output in single-pass heating applications. It eliminates undesirable overshoots or drops in temperature. The sophisticated control systems feature multi-loop capability and feed-forward functions to moderate variations in the process flow rate. It measures flow and temperature at various stages, and adjusts the power applied to each heating zone accordingly. This advanced integrated system reacts quickly to flow variations to provide a steady stream of DIW at a stable temperature.
特長とメリット
- Ultrapure PVDF/PFA wetted surfaces
- High-resolution touch-screen
- User-friendly graphical user interface (GUI)
- Plug-and-play system with complete integration of controls
- No N2 purge required
温度管理
- Excellent temperature stability
- Fast response to temperature and flow variations
- Eliminates excessive overshoots and drops in temperature
- Programmable logic controller (PLC) with Power-to-Flow™ control delivers constant, stable, and accurate temperature output
- Ethernet read/write connection enables rapid transfer of heater data to fab SECS/GEM systems (other communications available)
安全機能
- Short circuit current rating at 100 kA
- Ground fault circuit interrupter, sub-30 mA rating
- Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and hi-limit thermocouples
- Redundant safety monitoring relay for door interlock switch and EMO
- NIST-certified thermocouples
- Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation
- Ground options for electrical safety and DIW compatibility
仕様
Heater Element |
Heateflex® Coil |
|---|---|
Wetted Surfaces |
PVDF/PFA |
Sizes |
40-225 kW (voltage dependent) |
Voltages |
200-480 VAC, 3-ph (wattage dependent) |
Temperature |
95º C (203º F) |
Temperature Accuracy |
+/- 0.1º C (usage dependent) |
Flow |
0.5-32 GPM (1.9-122 LPM) |
Pressure |
60 PSIG @ 95ºC |
Efficiency |
>99 % |
*All specifications dependent on configuration.
寸法
インチ H x W x D
Model |
kW |
Low VAC |
High VAC |
|---|---|---|---|
DI-40 |
40 |
78 x 24 x 24 |
78 x 24 x 24 |
DI-80 |
80 |
78 x 32 x 24 |
78 x 24 x 24 |
DI-100 |
100 |
78 x 39 x 24 |
78 x 32 x 24 |
DI-120 |
120 |
78 x 39 x 24 |
78 x 32 x 24 |
DI-140 |
140 |
N/A |
78 x 32 x 24 |
DI-160 |
160 |
N/A |
78 x 32 x 24 |
DI-200 |
200 |
N/A |
78 x 39 x 24 |
DI-225 |
225 |
N/A |
78 x 39 x 24 |
Model |
kW |
Low VAC |
High VAC |
*Low VAC: 200-240 VAC, 3-Phase
*High VAC: 380-480 VAC, 3-Phase
構成
- Fusible Disconnect with Lock-out/Tag-out
- Auto Purge (Pump Not Included)
- Resistivity Sensor
- Leak Alarms (Critical and Non-Critical)
- Discrete Interface
- Analog Interface
- Dry Contact Interface
- SEMI S2/S3
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