반도체 제조용 히터

개요
Our team pioneered the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.

Our engineers design products for applications such as DI water heating, fluid and gas heating, heat exchange, filtration, temperature control, and liquid level sensing that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. We empower our customers with adaptable temperature control solutions that provide extreme precision and efficiency.

Accuheat PFA In-Line Chemical Heaters

Accuheat® PFA 인라인 케미컬 히터

Accuheat® PFA 인라인 케미컬 히터 are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA 인라인 케미컬 히터
Accuheat Quartz In-Line Chemical Heaters Dual Tube 12000 Watts

Accuheat® 석영 인라인 케미컬 히터

Accuheat® 석영 인라인 케미컬 히터 consist of ultra-pure 석영 tubes, wrapped in a heater element that provides…

석영 인라인 케미컬 히터
Accuheat PFA In-Line Solvent Heaters

Accuheat® PFA 인라인 용제 히터

Accuheat® PFA 인라인 용제 히터 are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA 인라인 용제 히터
Accuheat Quartz In-Line Gas Heaters

Accuheat® 석영 인라인 Gas 히터

Accuheat® 석영 인라인 Gas 히터 for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

석영 인라인 Gas 히터
Heateflex Aquarius Deionized (DI) Water Heater Systems

Aquarius® 탈 이온수 (DIW) 히터

Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…

Aquarius® 탈 이온수 히터
Heateflex Fluidix Steam Powered Deionized DI Water Heater Systems

Fluidix® 스팀 구동 식 탈 이온수 (DIW) 히터

Fluidix® 스팀 구동 식 탈 이온수 (DIW) 히터 offer the semiconductor industry a low-cost alternative to…

Fluidix® 탈 이온수 히터
Heateflex PFA 초 순수 인라인 유체 히터

PFA 초 순수 인라인 유체 히터

HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…

PVDF/PFA 유체 히터
Heateflex LH1 PVDF/PFA 초 순수 인라인 유체 히터

PVDF/PFA 초 순수 인라인 유체 히터

PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries…

PVDF/PFA 유체 히터
Heateflex PFA Immersion Tank Grid Heaters

PFA 침지 탱크 히터

White Knight 침지 탱크 히터 are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA 침지 탱크 히터
Heateflex Vesper PVDF PFA Heat Exchangers

Vesper™ PVDF PFA 열교환 기

Vesper™ Series of PVDF/PFA heat exchangers offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ 열교환 기
Heateflex Aries 용제 히터

Aries 용제 히터

Aries 용제 히터 safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries 용제 히터
Heateflex 스테인레스 스틸 울트라 퓨어 유체 히터

Poseidon™ 스테인레스 스틸 울트라 퓨어 유체 히터

Poseidon™ 스테인레스 스틸 울트라 퓨어 유체 히터 offer a unique option for manufacturing operations requiring…

Poseidon™ 유체 히터
Heateflex N2 Stainless Steel Heaters

스테인레스 스틸 N2 히터

스테인레스 스틸 N2 히터 are for high-purity wafer drying and parts cleaning. Heateflex stainless steel N2 heaters are suitable for nitrogen,…

스테인레스 스틸 N2 히터
Heateflex True Sanitary In-Line Fluid Heaters

True Sanitary 인라인 유체 히터

Heateflex True Sanitary 인라인 유체 히터 meet the demanding fluid heating applications of semiconductor, medical..

True Sanitary 유체 히터
Heateflex 초 순수 유체 및 가스 히터

White Knight 유체 및 가스 히터

White Knight offers a variety of ultra-pure heaters for deionized water, chemicals, gases, and solvents.

White Knight 유체 및 가스 히터
Heateflex Aquarius Deionized (DI) Water Heater Systems

Aquarius® 탈 이온수 (DIW) 히터

Aquarius® 탈 이온수 (DIW) 히터 are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller delivers enhanced temperature stability
  • No N2 purge required
  • Plug-and-play system with fully integrated controls
  • High-resolution touch-screen
  • Save costs by reducing the need for multiple immersion heaters
Aquarius® 탈 이온수 (DIW) 히터