Heaters for Semiconductor Manufacturing

Overview
Our teams have pioneered the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.

Our engineers design products for applications such as deionized water heating, fluid and gas heating, heat exchange, filtration, temperature control, and liquid level sensing that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. Heateflex empowers our customers with adaptable temperature control solutions that provide extreme precision and efficiency.

Accuheat PFA In-Line Chemical Heaters

Accuheat® PFA In-Line Chemical Heaters

Accuheat® PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA Chemical Heaters
Accuheat Quartz In-Line Chemical Heaters Dual Tube 12000 Watts

Accuheat® Quartz In-line Chemical Heaters

Accuheat® quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…

Quartz Chemical Heaters
Accuheat PFA In-Line Solvent Heaters

Accuheat® PFA In-Line Solvent Heaters

Accuheat® PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA Solvent Heaters
Accuheat Quartz In-Line Gas Heaters

Accuheat® Quartz In-Line Gas Heaters

Accuheat® quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

Quartz Gas Heaters
Heateflex Aquarius Deionized (DI) Water Heater Systems

Aquarius® Deionized (DI) Water Heater Systems

Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…

Aquarius® Heaters
Heateflex Fluidix Steam Powered Deionized DI Water Heater Systems

Fluidix® Steam-Powered DI Water Heater Systems

Fluidix® steam-powered deionized (DI) water heater systems offer the semiconductor industry a low-cost alternative to…

Fluidix® Heaters
Heateflex PFA Ultra-Pure In-Line Fluid Heaters

Ultrapure In-Line PFA Fluid Heaters

HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…

PFA Heaters
Heateflex LH1 PVDF/PFA Ultra-Pure In-Line Fluid Heaters for DI Water and Mild Chemicals

Ultrapure In-Line PVDF/PFA Fluid Heaters

PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries…

PVDF/PFA Heaters
Heateflex PFA Immersion Tank Grid Heaters

PFA Immersion Tank Heaters

PFA immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA Tank Heaters
Heateflex Vesper PVDF PFA Heat Exchangers

Vesper™ PVDF PFA Heat Exchangers

Vesper™ Series of PVDF/PFA heat exchangers offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ Heaters
Heateflex Aries Solvent Heaters

Aries Solvent Heater

Aries solvent heaters safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries Solvent Heaters
Heateflex Poseidon Stainless Steel Ultra-Pure Fluid Heater Systems

Poseidon™ SS Ultra-Pure Fluid Heater Systems

Poseidon™ stainless steel ultra-pure fluid heater systems offer a unique option for manufacturing operations requiring…

Poseidon™ Heaters
Heateflex N2 Stainless Steel Heaters

N2 SS Heaters

Stainless steel N2 heaters are for high-purity wafer drying and parts cleaning. Heateflex stainless steel N2 heaters are suitable for nitrogen,…

N2 SS Heaters
Heateflex True Sanitary In-Line Fluid Heaters

True Sanitary In-Line Fluid Heaters

Heateflex True Sanitary in-line fluid heaters meet the demanding fluid heating applications of semiconductor, medical…

Vesper™ Heaters
Heateflex Ultra-Pure Fluid and Gas Heaters

See All White Knight Fluid and Gas Heaters

White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.

All White Knight Heaters
Heateflex Aquarius Deionized (DI) Water Heater Systems

Aquarius® Deionized (DI) Water Heater Systems

Aquarius® deionized (DI) water heaters are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller delivers enhanced temperature stability
  • No N2 purge required
  • Plug-and-play system with fully integrated controls
  • High-resolution touch-screen
  • Save costs by reducing the need for multiple immersion heaters
Aquarius® DI Water Heater Systems