Our teams have pioneered the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.
Our engineers design products for applications such as deionized water heating, fluid and gas heating, heat exchange, filtration, temperature control, and liquid level sensing that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. Heateflex empowers our customers with adaptable temperature control solutions that provide extreme precision and efficiency.
Aquarius® 脱イオン（DI）温水器システム are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.
- Ultra-pure design with PVDF/PFA wetted surfaces
- Programmable logic controller delivers enhanced temperature stability
- No N2 purge required
- Plug-and-play system with fully integrated controls
- High-resolution touch-screen
- Save costs by reducing the need for multiple immersion heaters