半導体製造用暖房器

概要
Heateflex has been a pioneer in the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.

Heateflex engineers design products for applications such as DI water heating, fluid and gas heating and heat exchange, filtration, temperature, and liquid level sensing and control that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. Heateflex empowers our customers with adaptable temperature control solutions that provide extreme precision and efficiency.

暖房器応用

Heateflex Aquarius 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム are the perfect solution for high-purity heating applications that…

Aquarius® 暖房器
Heateflex Fluidix 蒸気で動脱イオン(DI)温水器システム

Fluidix® 蒸気で動脱イオン(DI)温水器システム

Fluidix® 蒸気で動脱イオン(DI)温水器システム offer the semiconductor industry a low-cost alternative to…

Fluidix® 暖房器
Heateflex PVDF PFA 超純インライン流体暖房器

PVDF/PFA 超純インライン流体暖房器

For semiconductor, solar, MEMS, and other industries that require the most exacting standards of purity…

PVDF/PFA 暖房器
Heateflex Quartz 高純度インライン流体暖房器

Quartz 高純度インライン流体暖房器

Quartz 高純度インライン流体暖房器 meet the stringent heating standards required for semiconductor manufacturing. This heater…

Quartz 暖房器
Heateflex Vesper PVDF PFA 熱交換器

Vesper™ PVDF PFA 熱交換器

Vesper™ Series of PVDF/PFA 熱交換器 offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ 暖房器
Heateflex Poseidon ステンレス鋼超純流体暖房器

Poseidon™ ステンレス鋼超純流体暖房器

Poseidon™ ステンレス鋼超純流体暖房器 offer a unique option for manufacturing operations requiring…

Poseidon™ 暖房器
Heateflex True Sanitary インライン流体暖房器

True Sanitary インライン流体暖房器

Heateflex True Sanitary インライン流体暖房器 meet the demanding fluid heating applications of semiconductor, medical..

True Sanitary 暖房器
Heateflex N2 ステンレス鋼暖房器

N2 ステンレス鋼暖房器

ステンレス鋼 N2 ステンレス鋼 are for high-purity wafer drying and parts cleaning. Heateflex ステンレス鋼 N2 ステンレス鋼 are suitable for nitrogen,…

N2 ステンレス鋼暖房器
Heateflex Aries 溶剤暖房器

Aries 溶剤暖房器

Aries 溶剤暖房器 safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries 溶剤暖房器
Heateflex Aries PFA IPA 暖房器

Aries PFA IPA 暖房器

Aries PFA IPA heaters safely and effectively heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA) and EKC…

Aries PFA IPA 暖房器
Heateflex PFA Immersion Tank Grid Heaters

PFA Immersion Tank 暖房器

Heateflex immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA Tank 暖房器
Heateflex Aquarius 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller delivers enhanced temperature stability
  • No N2 purge required
  • Plug-and-play system with fully integrated controls
  • High-resolution touch-screen
  • Save costs by reducing the need for multiple immersion heaters
Aquarius® DI Water Heater Systems