半導体製造用暖房器

Overview
Our teams have pioneered the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.

Our engineers design products for applications such as deionized water heating, fluid and gas heating, heat exchange, filtration, temperature control, and liquid level sensing that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. Heateflex empowers our customers with adaptable temperature control solutions that provide extreme precision and efficiency.

Accuheat PFA インライン薬液ヒーター

Accuheat® PFA In-Line Chemical Heaters

Accuheat® PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA Chemical Heaters
Accuheat 石英高純度インライン薬液ヒーター Dual Tube 12000 Watts

Accuheat® Quartz In-line Chemical Heaters

Accuheat® quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…

Quartz Chemical Heaters
Accuheat PFA インライン溶剤ヒーター

Accuheat® PFA In-Line Solvent Heaters

Accuheat® PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA Solvent Heaters
Accuheat Quartz 石英インライン気体ヒーター

Accuheat® Quartz In-Line Gas Heaters

Accuheat® quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

Quartz Gas Heaters
Heateflex Aquarius 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム are the perfect solution for high-purity heating applications that…

Aquarius® Heaters
Heateflex Fluidix 蒸気で動脱イオン(DI)温水器システム

Fluidix® 蒸気で動脱イオン(DI)温水器システム

Fluidix® 蒸気で動脱イオン(DI)温水器システム offer the semiconductor industry a low-cost alternative to…

Fluidix® Heaters
Heateflex PFA 超純インライン流体暖房器

Ultrapure In-Line PFA Fluid Heaters

HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…

PFA Heaters
Heateflex LH1 PVDF PFA 超純インライン流体ヒーター

Ultrapure In-Line PVDF/PFA Fluid Heaters

PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries…

PVDF/PFA Heaters
Heateflex PFA Immersion Tank Grid Heaters

PFA Immersion Tank 暖房器

Heateflex immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA Tank Heaters
Heateflex Vesper PVDF PFA 熱交換器

Vesper™ PVDF PFA 熱交換器

Vesper™ Series of PVDF/PFA 熱交換器 offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ Heaters
Heateflex Aries 溶剤暖房器

Aries 溶剤暖房器

Aries 溶剤暖房器 safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries Solvent Heaters
Heateflex Poseidon ステンレス鋼超純流体暖房器

Poseidon™ ステンレス鋼超純流体暖房器

Poseidon™ ステンレス鋼超純流体暖房器 offer a unique option for manufacturing operations requiring…

Poseidon™ Heaters
Heateflex N2 ステンレス鋼暖房器

N2 ステンレス鋼暖房器

ステンレス鋼 N2 ステンレス鋼 are for high-purity wafer drying and parts cleaning. Heateflex ステンレス鋼 N2 ステンレス鋼 are suitable for nitrogen,…

N2 SS Heaters
Heateflex True Sanitary インライン流体暖房器

True Sanitary インライン流体暖房器

Heateflex True Sanitary インライン流体暖房器 meet the demanding fluid heating applications of semiconductor, medical..

Vesper™ Heaters
Heateflex 超高純度流体およびガス用暖房器

See All White Knight Fluid and Gas Heaters

White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.

All White Knight Heaters
Heateflex Aquarius 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller delivers enhanced temperature stability
  • No N2 purge required
  • Plug-and-play system with fully integrated controls
  • High-resolution touch-screen
  • Save costs by reducing the need for multiple immersion heaters
Aquarius® DI Water Heater Systems