Overview
Our teams have pioneered the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.
Our engineers design products for applications such as deionized water heating, fluid and gas heating, heat exchange, filtration, temperature control, and liquid level sensing that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. Heateflex empowers our customers with adaptable temperature control solutions that provide extreme precision and efficiency.
Accuheat™ PFA In-Line Chemical Heaters
Accuheat™ PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…
PFA Chemical Heaters
Accuheat™ Quartz In-line Chemical Heaters
Accuheat™ quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…
Quartz Chemical Heaters
Accuheat™ PFA In-Line Solvent Heaters
Accuheat™ PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…
PFA Solvent Heaters
Accuheat™ Quartz In-Line Gas Heaters
Accuheat™ quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…
Quartz Gas Heaters
Aquarius® 脱イオン（DI）温水器システム
Aquarius® 脱イオン（DI）温水器システム are the perfect solution for high-purity heating applications that…
Aquarius® Heaters
Fluidix® 蒸気で動脱イオン（DI）温水器システム
Fluidix® 蒸気で動脱イオン（DI）温水器システム offer the semiconductor industry a low-cost alternative to…
Fluidix® Heaters
Ultrapure In-Line PFA Fluid Heaters
HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…
PFA Heaters
Ultrapure In-Line PVDF/PFA Fluid Heaters
PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries…
PVDF/PFA Heaters
PFA Immersion Tank 暖房器
Heateflex immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…
PFA Tank Heaters
Vesper™ PVDF PFA 熱交換器
Vesper™ Series of PVDF/PFA 熱交換器 offer various solutions for heating, cooling, and temperature trimming for…
Vesper™ Heaters
Aries 溶剤暖房器
Aries 溶剤暖房器 safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…
Aries Solvent Heaters
Poseidon™ ステンレス鋼超純流体暖房器
Poseidon™ ステンレス鋼超純流体暖房器 offer a unique option for manufacturing operations requiring…
Poseidon™ Heaters
N2 ステンレス鋼暖房器
ステンレス鋼 N2 ステンレス鋼 are for high-purity wafer drying and parts cleaning. Heateflex ステンレス鋼 N2 ステンレス鋼 are suitable for nitrogen,…
N2 SS Heaters
True Sanitary インライン流体暖房器
Heateflex True Sanitary インライン流体暖房器 meet the demanding fluid heating applications of semiconductor, medical..
Vesper™ Heaters
See All White Knight Fluid and Gas Heaters
White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.
All White Knight Heaters
Aquarius® 脱イオン（DI）温水器システム
Aquarius® 脱イオン（DI）温水器システム are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.
- Ultra-pure design with PVDF/PFA wetted surfaces
- Programmable logic controller delivers enhanced temperature stability
- No N2 purge required
- Plug-and-play system with fully integrated controls
- High-resolution touch-screen
- Save costs by reducing the need for multiple immersion heaters
Aquarius® DI Water Heater Systems