半導体製造用ヒーター

概要
Our team has pioneered the development of ultra-pure heating equipment for the semiconductor market since 1974. We have built a reputation by providing products that meet and exceed stringent industry (SEMI) requirements for safety, quality and performance to enable improved yields in semiconductor manufacturing processes.

Our engineers design products for applications such as DI water heating, fluid and gas heating, heat exchange, filtration, temperature control, and liquid level sensing that align industry needs with improved material technologies. A recently-completed expansion of the company’s cleanroom production facilities ensures compliance with customer expectations as production volumes increase. We empower our customers with adaptable temperature control solutions that provide extreme precision and efficiency.

Accuheat PFA インライン薬液ヒーター

Accuheat® PFA インライン薬液ヒーター

Accuheat® PFA インライン薬液ヒーター are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA 薬液ヒーター
Accuheat 石英高純度インライン薬液ヒーター Dual Tube 12000 Watts

Accuheat® 石英高純度インライン薬液ヒーター

Accuheat® 石英高純度インライン薬液ヒーター consist of ultra-pure quartz tubes, wrapped in a heater element that provides…

石英高純度薬液ヒーター
Accuheat PFA インライン溶剤ヒーター

Accuheat® PFA インライン溶剤ヒーター

Accuheat® PFA インライン溶剤ヒーター are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA 溶剤ヒーター
Accuheat Quartz 石英インライン気体ヒーター

Accuheat® 石英インライン気体ヒーター

Accuheat® 石英インライン気体ヒーター for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

石英気体ヒーター
Heateflex Aquarius 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム

Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…

Aquarius® ヒーター
Heateflex Fluidix 蒸気で動脱イオン(DI)温水器システム

Fluidix® 蒸気で動く脱イオン(DI)温水器システム

Fluidix® 蒸気で動く脱イオン(DI)温水器システム offer the semiconductor industry a low-cost alternative to…

Fluidix® ヒーター
Heateflex PFA 超純インライン流体暖房器

PFA 超純インライン流体ヒーター

HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…

PFA ヒーター
Heateflex LH1 PVDF PFA 超純インライン流体ヒーター

PVDF/PFA 超純インライン流体ヒーター

PVDF/PFA 超純インライン流体ヒーター ideal for heating deionized water, acids, and less aggressive process chemistries…

PVDF/PFA ヒーター
Heateflex PFA Immersion Tank Grid Heaters

PFA 浸漬タンクヒーター

浸漬タンクヒーター are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA 浸漬タンクヒーター
Heateflex Vesper PVDF PFA 熱交換器

Vesper™ PVDF PFA 熱交換器

Vesper™ Series of PVDF/PFA 熱交換器 offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ ヒーター
Heateflex Aries 溶剤暖房器

Aries 溶剤ヒーター

Aries solvent heaters safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries 溶剤ヒーター
Heateflex Poseidon ステンレス鋼超純流体暖房器

Poseidon™ ステンレス鋼超純流体ヒーター

Poseidon™ stainless steel ultra-pure fluid heater systems offer a unique option for manufacturing operations requiring…

Poseidon™ ヒーター
Heateflex N2 ステンレス鋼暖房器

ステンレス鋼 N2 ヒーター

ステンレス鋼 N2 ヒーター are for high-purity wafer drying and parts cleaning. They are suitable for nitrogen, clean dry air (CDA) and other inert gases.

ステンレス鋼 N2 ヒーター
Heateflex True Sanitary インライン流体暖房器

True Sanitary インライン流体ヒーター

True Sanitary インライン流体ヒーター meet the demanding fluid heating applications of semiconductor, medical..

True Sanitary ヒーター
Heateflex 超高純度流体およびガス用暖房器

White Knight 超高純度流体およびガス用ヒーター

White Knight offers a variety of ultra-pure heaters for deionized water (DIW), chemicals, gases, and solvents.

Heateflex 流体およびガス用ヒーター
Heateflex Aquarius 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム

Aquarius® 脱イオン(DI)温水器システム are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Programmable logic controller delivers enhanced temperature stability
  • No N2 purge required
  • Plug-and-play system with fully integrated controls
  • High-resolution touch-screen
  • Save costs by reducing the need for multiple immersion heaters
Aquarius® DI Water Heater Systems