Fluidix® 蒸気で動脱イオン(DI)温水器システム

Heateflex Fluidix 蒸気で動脱イオン(DI)温水器システム

概要

Fluidix® 蒸気で動脱イオン(DI)温水器システム offer the semiconductor industry a low-cost alternative to using electricity to heat large volumes of DI water. We field test all heaters, and verify them for longevity and reliability. PVDF/PFA wetted parts in the Fluidix ensure the highest levels of DI water purity. Uniform process temperatures are ensured via an operator-controlled PLC/touchscreen interface.

Industry-Leading Reliability

Since the first Fluidix system was installed in 1982, this product has heated more than 400 million gallons of DI water annually throughout the semiconductor industry.

MORE THAN 400 MILLION GALLONS OF DI WATER HEATED ANNUALLY, AND COUNTING!

作り付けの安全

Fluidix® heaters incorporate a number of safety features.  For example, on the steam side of the system there’s an over-temperature Resistance Temperature Detector (RTD). On the process side of the Fluidix, there are safeties or monitors for over-temperature, process low-pressure, and leak detection.  And, last by not least, this heater includes a pressure relief valve and an auto-isolation feature with a cold bypass.

ハイライト

Fluidix® models are available in sizes ranging from 500,000 BTU/hour to 3,000,000 BTU/hour, or approximately 200 kW to 800 kW. Heating temperature is 95º C, with a temperature accuracy of +- 0.5º C. Heater flow is 0.5 GPM (1.9 LPM) to 100 GPM (378 LPM). Steam side pressure is 15 psi, and process side pressure is 68 psi.

特長とメリット

  • Ultra-pure design with PVDF/PFA wetted surfaces
  • Low cost of ownership because it utilizes steam, which costs less compared to an electrical heater
  • PLC with touch-screen controls
  • PLC with mixing valve temperature control for +/- 0.5º C provides precise temperature control
  • Reliable technology with over 30 years of proven operation in the field — over 400 million gallons of heated DI water

安全機能

Steam Side

  • Over Temperature RTD

Process Side

  • Over Temperature Protection
  • Pressure Relief Valve
  • Process Low-Pressure Monitor
  • Leak Detection
  • Auto-Isolation with Cold Bypass

冊子

Fluidix® 冊子Advantages of Using the Fluidix® 蒸気で動脱イオン(DI)温水器システムAdvantages of Using Hot DI Water

オーナーマニュル

Fluidix® オーナーマニュルFluidix® Controller オーナーマニュルHeateflex Warranty

システム図

Fluidix® システム図
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仕様

暖房器蒸気で動脱イオン(DI)温水器システム
Wetted SurfacesPVDF/PFA
Sizes500,000-3,000,000 Btu/hr, or approximately 200 kW- 800 kW
TemperatureAmbient to 95º C
Temperature Accuracy+/- 0.5º C (contingent on customer's facilitation)
Flow0.5 GPM (1.9 LPM) to 100 GPM (378 LPM)
PressureSteam Side, 15 psi;  Process Side, 68 psi

寸法

モデル
GPM
寸法
PC-3273
15
38 x 38 x 78 インチ
PC-5760
25
57 x 57 x 78 インチ
PC-6810
30
57 x 57 x 78 インチ
PC-11217
40
68 x 68 x 78 インチ
PC-11350
50
68 x 68 x 78 インチ
モデル
GPM
寸法

*Higher flow rates available.

構成

  • Remote Touch Screen
  • Auto Isolation Contamination Prevention System
  • Ethernet
  • Training
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