Megasonic Cleaning Systems - White Knight Fluid Handling

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Megasonic Cleaning Systems

White Knight offers Imtec Accumeg™ and PCT HyperClean™ systems. PCT and Imtec are leaders in advanced megasonic cleaning technology, offering high-frequency, non-damaging cleaning solutions for semiconductors, optics, medical implants, and industrial parts. Both solutions are ideal for high-purity, precision cleaning applications.

Imtec’s Accumeg™ systems efficiently deliver continuous megasonic energy across the entire process tank to ensure fast, uniform cleaning and prevent particle reattachment. Unlike pulsed systems, its full-coverage transducer array avoids energy loss from shadowing or sequencing. Accumeg combines proven reliability with low maintenance.

PCT’s HyperClean™ systems features moving-beam and phase-shifting technology, achieving over 90% acoustic energy efficiency, housed in compact, high-purity quartz vessels. The systems incorporate PCT’s unique generators and transducers for reliable submicron cleaning at elevated temperatures, while reducing chemical use and cleanroom footprint.

These systems sets the industry standard in high-purity, high-power megasonic cleaning and offer reliable, innovative solutions for a wide range of applications, including semiconductors, optics, MEMS, LEDs, solar cells, and flat panels.

Megasonic Products

Accumeg Quartz Megasonic Process Tank with Generator and Quick Dump Rinse

Accumeg™ Megasonic Systems

Accumeg Megasonics provide process uniformity thru gapless transducers with tightly matched crystals wired together in parallel for small potential difference between crystals.

Accumeg Megasonic Systems

PCT Systems Megasonic HyperClean Cleaning System

HyperClean™ Megasonic Systems

HyperClean offers unique energy-transfer technology for superior submicron cleaning, reduced operating costs, and high reliability.

HyperClean™ Megasonic Systems

Large Capacity Mini-Meg 150

Mini Megasonic system for cleaning, process enhancement, stripping, or plating that can accommodate a fully loaded common 6-in (150mm) 25 wafer carrier.

Mini-Meg 150 Systems

Original Mini-Meg 100

Fully functional megasonic system with the portability to allow them to be used in a fume hood or mounted on a small wet bench.

Mini-Meg 100 Systems

PCT Systems Megasonic HyperClean Generator

HyperClean™ Megasonic Generators

Versatile, fully featured megasonic generators for super fine geometries with more fragile structures and substrates.

HyperClean™ Megasonic Generators

PCT Systems Megasonic Submersible Transducer

Megasonic Submersible Arrays

Coupled with our RF Generators, submersible transducer modules can retrofit into your existing tank, or bulkhead transducer plate to mount into your fabricated tank.

Megasonic Submersible Transducer Arrays

PCT Systems Megasonic Custom Tank and Transducer

Bath-Mounted Transducer and Megasonics Generator

Bulkhead megasonic transducer assemblies in Halar or Tefzel coated aluminum and stainless steel with frequencies from 450 KHz to 2.2 MHz can be mounted horizontally in the floor or vertically in the sidewall of a tank.

Bath-Mounted Transducer and Megasonics Generator

Megasonic Quick Dump Rinser

Designed for low water volume, while providing the ultimate in megasonic cleaning, these QDRs are available in a variety of vessel materials, feature four-side overflow, and integrated control systems.

Quick Dump Rinser Systems

PCT Systems Quanta-Clean Ultrasonic Cleaning Systems

Quanta-Clean Ultrasonics

High-performance ultrasonic equipment designed specifically for “Critical Clean” applications.

Quanta-Clean Ultrasonic Systems

Megasonic Services

For over 20 years, Imtec and PCT Systems have delivered innovative, high-performance cleaning solutions for semiconductor manufacturing. Trusted worldwide for both standard and custom products, we support evolving process needs driven by fragile structures and complex geometries.

Megasonic Energy Audits

Our applications engineer will visit your facility, identify and troubleshoot your equipment, calibrate the system and perform on-site repairs if necessary — saving you time and money and possibly eliminating the need to ship your equipment in for repairs. Conducting regular audits for energy uniformity and cleaning efficiency enables our technicians to optimize your systems or determine the need for repairs. Each audit produces a complete performance report and full system evaluation.

Energy Audit Process:

Inspect and analyze your system
Performance map your entire system
Calibrate transducer with generator
Tune and optimize system performance

Megasonic Generator Upgrades

Our generators can be used to upgrade or replace a damaged generator. As a part of the process we analyze our customer’s system, formulate an interface box, and work on finding a complete solution. Customers will see marked performance improvement. Plus, we keep generators in stock which can dramatically reduce down time.

Improve performance of your cleaning system with a new megasonic generator. Our independently tuned generators improve cleaning effectiveness, even when integrated with megasonic cleaning systems made by other manufacturers.

Our self-tuning generators optimize transducer frequencies and deliver higher acoustic energy to the wafer surface. Uniform acoustic energy levels provide consistent removal of particle contamination within and across substrates in the process bath.

To initiate an audit, please provide the following information:

The number of systems that need review
The manufacturer of the systems
The model number of the systems
The tank capacity
Any issues with performance

Custom Tanks

Customized Solutions

A specific service may not appear on our website, but feel free to contact us to determine how we can work for you. We can provide a customized solution plan for the service you need.

PCT Systems, Inc. provides end-users and OEM’s customized solutions for their particular needs. We can design and provide customized equipment for megasonic assisted tools and transducers, heated tanks, R&D sized tools and Megasonic or Ultrasonic standalone wet benches.

Plastic Welding Tank Fabrication

Tank fabrication involves incorporating and addressing specifications, materials production methods, testing procedures, as well as keeping in mind the different methodologies utilized by each manufacturer. We offer plastic welding and tank fabrication from many different plastic materials, and tank rebuild services at our fabrication facility in Fremont, California.

Equipment Upgrades

PCT Systems has been successful at replacing legacy megasonic equipment from Verteq and many other OEM’s that no longer support older model megasonic tools.

If you’re in the market to upgrade your legacy megasonic tools, PCT Systems, Inc. can provide a customized action plan on how to address your upgrade requirements.

Sonochemical Reactors

Our patented processes for sonolysis and sonochemical reactors can assist customers with remediation and water treatment. In addition, our sonochemical reactor research can be utilized for life sciences, bio-chemical industries, and chemical mass transport. We advocate a growth mindset for sonochemical reactors by focusing on anything that can be improved by sonochemical and acoustic energy interactions. Contact us directly regarding this facet of our services.

Repairs

Repairs & Refurbishments

PCT offers quartz tank repair and heated bath refurbishment – even tanks/baths supplied by other manufacturers. PCT can restore cracked and chipped quartz tanks, and rebuild your heated constant temperature bath with new Inconel heaters, thermal safety devices, and new fire retardant plastic enclosure

Don’t throw away a damaged Quartz piece. PCT can evaluate it and provide an estimate for repair. You might be surprised at the savings by repairing a damaged tank over purchasing a replacement.

Repairs Process

Submit a Repair Request with a complete description of the damages to your tank or heated bath along with photos. Include any specifications for heaters such as wattage and voltage used.
Based on the photos, PCT will determine if your quartz tank is repairable and will respond with a cost estimate along with shipping instructions.
Upon receipt, PCT will evaluate the tank to confirm repairability and make any necessary adjustments to the price quote and payment terms.
PCT will strip the tank down to fuse, grind and polish the quartz vessel, then rebuild the tank.
Upon completion of repairs, PCT will thoroughly inspect and test the tank for structural integrity and performance.
PCT will provide photos of the repaired tank along with test reports prior to its return shipment.
Heated baths will be supplied with updated drawings and specifications along with a 6 month warranty.

Megasonic Cleaning Technology

How Megasonic Cleaning Works:

Megasonic cleaning uses high-frequency sound waves—typically in the megahertz range—generated by a piezoelectric transducer to create microscopic cavitation bubbles in a fluid. These small, energetic bubbles form and collapse rapidly, producing gentle yet powerful cleaning action that dislodges submicron particles from delicate surfaces without causing damage. Unlike lower-frequency ultrasonic cleaning, which produces larger, potentially harmful bubbles, megasonic bubbles penetrate tight spaces, crevices, and complex geometries—making this method ideal for cleaning sensitive components like silicon wafers, semiconductors, and medical devices.

Benefits of Megasonic Cleaning:

No moving parts for improved cleanliness
Improved energy uniformity—no dead spots
More than 90% acoustical-energy efficiency
Uniform particle removal
High-energy density with low-power output for extended transducer life
High-purity heated quartz vessel for the highest-purity processing
Easy to retrofit to existing wet stations
Available for wafers up to 450 mm and beyond
Optional filtered/recirculation version
Acid / solvent / stripper-compatible materials available
Available in manual and automatic stand-alone systems
Frequency range 450 KHz – 1 MHz

Megasonic vs. Ultrasonic Cleaning:

As semiconductor devices become smaller and more delicate, ultrasonic cleaning—typically under 100 kHz—is increasingly unsuitable due to its high cavitation energy, which can damage sensitive structures. In contrast, megasonic cleaning uses higher frequencies (600–2000 kHz) that generate smaller, gentler cavitation bubbles. This allows for effective particle removal without harming fragile substrates. Factors like fluid surface tension and distance from the transducer can influence cleaning performance, but frequency remains the key differentiator—making megasonic cleaning the preferred choice for advanced semiconductor applications.

Megasonic Cleaning Applications

Megasonic cleaning is utilized for several applications:

Disk Drive components

When large amounts of media need to be cleaned quickly, the unsurpassed power and intensity of megasonic processing removes even stubborn particles with quick efficiency. When small and discrete three-dimensional parts require the removal of the smallest particles, megasonic processing sends energy through and across parts and substrates to clean in those hidden recesses.

Electrochemical processing

Whether plating, polishing/etching or grid-xing surface layers, concentration polarization and fluid stagnation in trenches and vias can lead to slow diffusion limited processing. Megasonic processing allows sonic energy to transfer through substrates and across features to maximize bulk fluid movement even in small trenches and recesses to minimize diffusion limiting stagnant locations.

Flat and flex panel

When ample areas require sonic energy, megasonic processing with wide area megasonic nozzle technology provides the processing fluid directly to the substrate surface simultaneously with the sonic energy to uniformly process large areas efficiently.

LED

We offer sonic assisted and non-sonic tanks for use in LED manufacturing. High temperature quartz constant temperature baths, and megasonic assisted tanks for post scribe clean applications.

MEMS

Developing resist and wet etching substrates can be a problem because of the discrete features and tortuous paths that the processing liquid must follow. Fluid stagnation producing dead areas can lead to locally slow diffusion limited mass transfer. Megasonic processing can allow sonic energy to transfer through substrates and across discrete devices eliminating stagnant areas and increasing mass transfer rates.

Nanoscale Particle

Cleaning of sub 50 nanometer particles is becoming a real challenge. With megasonics processing technologies multiple frequencies up to 2 MHz can be utilized simultaneously to provide special processing modes to clean even the smallest particles on the most delicate features.

Optics

Sensitive optics can be damaged by low frequency. Ultrasonic tanks have the potential to cause crazing and cracking. We offer a wide range of high frequency Megasonic tanks for cleaning optics after various lapping and polishing processes.

Resist Stripping

When it is time for stripping resists, megasonic processing can be combined with dissolved ozone or other chemicals in various liquids to produce the highest gas transfer rates available. Megasonic processing can disrupt thin liquid boundary layers to enhance mass transfer of various gases and liquids needed for enhanced processing.

Solar Cell Fabrication

When rapid particle removal, increased etch rates and substrate cleaning is required on large scale substrates, megasonic processors can assist in new manufacturing technologies.