White Knight Fluid Handling

Solutions for Semiconductor, Solar, LEDs, Displays, Electronics

White Knight High-Purity Pneumatic Bellows Pumps

Bellows Pumps

White Knight pneumatic bellows pumps feature Teflon® PTFE and PFA flow paths. These reliable, leak-free pumps offer high flow rates, steady pressures and stable temperatures. They do not contain metals or elastomer O-rings. They are dead-head capable, and provide suction lift.

Bellows Pumps
White Knight High-Purity Air-Operated Double-Diaphragm Pumps

Diaphragm Pumps

White Knight pneumatic diaphragm (AODD) pumps feature Teflon® PTFE or UHMW (PE) corrosion-resistant fluid paths. They are ideal for corrosive or toxic liquids such as acids, fuels, glues, paints, resins, inks, or slurry. PSB Series pumps are direct retrofit replacements for obsolete chemical delivery pumps.

Diaphragm Pumps
White Knight Metering Pumps for Chemical Dispense

Metering Pumps

White Knight pneumatic and electronic metering pumps accurately dispense up to 100 ml and 50 ml, respectively. Their fully-supported Teflon® PTFE rolling diaphragms maximize pressure capabilities and ensure safe, reliable chemical dispense.

Metering Pumps
White Knight PPMC Mini-Pump for High-Purity Chemicals

Mini-Pump

Mini-pumps offer up to 300 ml/min flow rates and 160 psi discharge pressures. They feature Teflon® PTFE and PFA fluid paths, and spring-loaded checks enable them to mount in any direction. Solenoid valves actuate each suction and dispense.

Mini-Pump
CBA Debubbler Pressure Vessels

Debubblers

White Knight debubblers reduce bubbles from chemical delivery and wafer process systems. They feature chemically-resistant PTFE and PFA fluid paths for high-purity chemical applications.

Debubblers
White Knight High-Purity Back-Pressure Regulators

Pressure Regulators

Automatically maintain and accurately control pressure for circulation loops or multiple dispense points without additional circuitry or feedback. Pressure regulators are remotely piloted and feature fully-swept Teflon® PTFE and PFA flow paths.

Pressure Regulators
White Knight Non-Metalic High-Purity Filter Housings

Filter Housings

Universal, compact, multi-chamber filter housings with PTFE and PFA fluid paths for high-purity chemicals. Dual-bowl and quad-bowl filter housings are available in parallel or in-line (series) models.

Filter Housings
Accudry IPA Vapor Dryer

IPA Vapor Dryers

Accudry® IPA dryers uses differences between the surface tension of deionized water and isopropyl alcohol (IPA) vapor to ensure fast and effective drying of substrates.

IPA Vapor Dryer
White Knight Closed-Loop Control Systems

High-Purity Closed-Loop Pump Systems

Automatically maintain laminar flow or steady pressure. White Knight closed-loop systems feature metal-free pumps with Teflon® PTFE and PFA flow paths. They provide stable temperatures, dead-head, and suction lift.

Control your high-purity chemical processes and delivery systems. Simplify process automation to save time, resources and reduce costs.

  • ≤ 140 lpm (36 gpm) flow rates
  • ≤ 7 Bar (100 psi) pressures
  • ≤ 210°C (410°F) temperatures
  • Maintain stable temperatures
  • No metals, no corrosion
  • No elastomer O-rings, no leaks
  • No electric motors, no heat rise
  • No impellers, no microbubbles
High-Purity Closed-Loop Systems

Wet Process Tanks

Global Standard for Static and Recirculating Processes

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath® Heated Quartz Wet Process Tanks

Accubath® heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

Heated Quartz Tanks
Accubath PVDF QDR Process Tank

Accubath® Teflon, PVDF, PFA, NPP Wet Process Tanks

Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

PTFE, PVDF, PFA, NPP Tanks
Accubath Stainless Steel Recirculating Heated Tank

Accubath® Heated SS Wet Process Tanks

Accubath® heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…

Heated SS Tanks
Accubath XE-Lab System Wet Etch Bath

Accubath® Sapphire Wet Etching Process Tanks

Accubath® sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Sapphire Wet Etch Tanks
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, Quartz, or Stainless Steel Megasonic Systems

Accumeg® Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems

White Knight Heaters

Ultra-Pure Fluid & Gas Heating Solutions

Accuheat PFA In-Line Chemical Heaters

Accuheat® PFA In-Line Chemical Heaters

Accuheat® PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA Chemical Heaters
Accuheat Quartz In-Line Chemical Heaters Dual Tube 12000 Watts

Accuheat® Quartz In-line Chemical Heaters

Accuheat® quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…

Quartz Chemical Heaters
Accuheat PFA In-Line Solvent Heaters

Accuheat® PFA In-Line Solvent Heaters

Accuheat® PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA Solvent Heaters
Accuheat Quartz In-Line Gas Heaters

Accuheat® Quartz In-Line Gas Heaters

Accuheat® quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

Quartz Gas Heaters
Heateflex Aquarius Deionized (DI) Water Heater Systems

Aquarius® Deionized (DI) Water Heater Systems

Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…

Aquarius® Heaters
Heateflex Fluidix Steam Powered Deionized DI Water Heater Systems

Fluidix® Steam-Powered DI Water Heater Systems

Fluidix® steam-powered deionized (DI) water heater systems offer the semiconductor industry a low-cost alternative to…

Fluidix® Heaters
Heateflex PFA Ultra-Pure In-Line Fluid Heaters

Ultrapure In-Line PFA Fluid Heaters

HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…

PFA Heaters
Heateflex LH1 PVDF/PFA Ultra-Pure In-Line Fluid Heaters for DI Water and Mild Chemicals

Ultrapure In-Line PVDF/PFA Fluid Heaters

PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries…

PVDF/PFA Heaters
Heateflex PFA Immersion Tank Grid Heaters

PFA Immersion Tank Heaters

PFA immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA Tank Heaters
Heateflex Vesper PVDF PFA Heat Exchangers

Vesper™ PVDF PFA Heat Exchangers

Vesper™ Series of PVDF/PFA heat exchangers offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ Heaters
Heateflex Aries Solvent Heaters

Aries Solvent Heater

Aries solvent heaters safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries Solvent Heaters
Heateflex Ultrapure Fluid and Gas Heaters

See All White Knight Fluid and Gas Heaters

White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.

All White Knight Heaters