PEM050 Electronic Metering Pump

White Knight Fluid Handling is pleased to announce the release of the much-anticipated PEM050 electronic metering pump for chemical replenishing, blending, dosing, and spiking applications. The PEM050 dispense up to 50 ml of high-purity chemical with ±0.01% repeatability at high pressures (60-80 psi). They feature PTFE fluid paths and fully supported rolling diaphragms to…

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2013 Best of West Finalist

Solid State Technology and SEMI have selected the Closed-Loop Control System as a 2013 Best of West Award finalist. The closed-loop system provides complete control of high-purity chemical processes and delivery systems with customizable feedback capability to maintain optimum system performance. It is designed to support process tools that require a set flow or pressure at the point of use.

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CPC-1 Closed-Loop Controller

The Closed-Loop Controller (CPC-1) automatically adjusts to maintain a set pressure or flow rate in high purity, closed-loop chemical pumping systems to compensate for variables in wafer processes, such as opening/closing chamber valves or clogging filters. The controlled closed-loop system improves process repeatability, increases chip yields, and simplifies automation to save customers time and resources.…

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