White Knight Fluid Handling is pleased to announce the release of the much-anticipated PEM050 electronic metering pump for chemical replenishing, blending, dosing, and spiking applications.
White Knight’s PEM050 electronic, stepper-controlled metering pumps dispense up to 50 ml of high-purity chemical with ±0.01% repeatability at high pressures (60-80 psi). They feature Teflon® PTFE fluid paths and fully supported rolling diaphragms to maximize chemical compatibility and discharge pressure capabilities. Positive control valves ensure accuracy by eliminating the variability typical of check valves.
PEM050 pumps offer up to 5 discharge ports that can be independently controlled with programmable system logic.
The pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. They were designed for chemical replenishing, blending, dosing, and spiking applications, as well as uses in cleaning of CVD equipment and photolithography. They are ideal for photoresist, etch and clean processes, peroxide spiking in piranha mixtures, and other blending of chemical mixtures into process tanks prior to the introduction of substrates.
Please contact your sales representative for more information.
Or, contact White Knight at (435) 783-6040 or toll free at (888) 796.2476.
E-mail: firstname.lastname@example.org, or visit wkfluidhandling.com/pem050