Product Release: PPM100 Pneumatic Metering Pumps
White Knight’s high-purity PPM100 pneumatic metering pumps feature PTFE fluid paths. They are capable of dispensing up to 100 ml of corrosive media with +/-0.1% repeatability at high-pressure (60-85 psi). The pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and they allow for in-situ mixing directly at the head. The pumps are designed for chemical replenishing, blending, dosing, and spiking applications, as well as uses in cleaning of CVD equipment and photolithography. They are ideal for photoresist, etch and clean processes, peroxide spiking in piranha mixtures, and other blending of chemical mixtures into process tanks prior to the introduction of substrates.