Electronic Metering Pumps
PEM050 electronic stepper pumps accurately dispense 1-50 ml of corrosive media in PTFE fluid paths for chemical replenishing, blending, dosing, and spiking applications. These reliable pumps feature fully-supported rolling diaphragms, which maximize discharge pressure capabilities. Positive control valves ensure accuracy by eliminating the variability that is typical of check valves. They offer up to 5 discharge ports that can be independently controlled with programmable system logic.
- Electronically controlled adjustable stroke
- Dispense volume up to 50 ml
- Highly accurate; ± 0.01% repeatability
- 60 – 80 psi capability
- Programmable system logic
- 2 to 6 port configurable
Pneumatic Pumps
PPM100 pneumatic metering pumps accurately dispense up to 100 ml of high-purity chemical in a PTFE fluid path. It operates with a fully supported rolling diaphragm to maximize discharge pressure capabilities. Two positive control valves ensure accuracy by eliminating variability that is typical of check valves.
- Manually controlled adjustable stroke
- Dispense volume up to 100ml
- Highly accurate; ± 0.1% repeatability
- 60 – 85 psi capability
Overview
White Knight metering pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. The pumps accurately dispense high-purity chemicals for replenishing, blending, dosing and spiking applications, as well as cleaning CVD equipment and in photolithography. They are ideal for photoresist, etch and clean processes, peroxide spiking in piranha mixtures, and other blending of chemical mixtures into process tanks prior to the introduction of substrates.
Features & Benefits
- Fully adjustable stroke speed
- Safe, leak-free operation with no maintenance
- No exposed metalics prevents corrosion and contamination
- PTFE fully-swept fluid path for ultra-pure applications
- PTFE rolling diaphragm with PP housing
- Visual position reference for easy setup and monitoring
- Easy to install and service with snap-in/out mount
- Can be installed in any orientation
- Clean room assembly, testing and packaging
- Leak detection port
- Self-priming
- Compact footprint
- Minimal hold-up volume
- Positive inlet/outlet valving prevents flow through
Specifications
| Dispense Range | 1 - 50 ml per stroke |
10 - 100 ml per stroke |
| Dispense Repeatability | ± 0.01% (Full Scale) |
± 0.1% (Full Scale) |
| Cycles Per Minute | up to 6 CPM |
up to 12 CPM |
| Air Consumption SCF per Cycle |
1-3 SCFM |
0.038-0.048 SCFM |
| Fluid Path Materials | PTFE |
PTFE |
| Valve Actuation Air Pressure |
4.14 - 5.52 Bar (60 - 80 psi) |
4.14 - 5.86 Bar (60 - 85 psi) |
| Max Discharge Pressure | 3.8 Bar (55 psi) |
5.86 Bar (85 psi) |
| Temperature Capability | up to 100°C (212°F) |
up to 100°C (212°F) |
| Weight | 2.95 kg (6.5 lb) |
1.6 kg (3.5 lb) |
| Suction Lift* | 4.6 m (15 ft) |
4.6 m (15 ft) |
| Communication | Serial, Ethernet, or Digital (0-5 V, 0-10 V, 4-20 mA) |
- |
| Leak Detection Options | Valve Position Sensing |
Valve Position Sensing |
*Suction lift diminishes over time. Recommended installation level less than 4.6 m (15 ft) above source. Optimized parameters can improve repeatability (up to ± 0.01%). Minimize suction lift to maximize repeatability. Tests conducted with water at ambient temperature. Dispense range measured at full stroke with maximum and minimum supply pressures at 80 psi and 60 psi. Contact White Knight for details.
Dimensions
"A" |
"B" |
|
|---|---|---|
| PEM050-02 | 2.7 (69) |
11.0 (279) |
| PEM050-03 | 4.2 (107) |
12.5 (318) |
| PEM050-04 | 4.2 (107) |
12.5 (318) |
| PEM050-05 | 5.7 (145) |
14.0 (356) |
| PEM050-06 | 5.7 (145) |
14.0 (356) |
Download PEM050 Dimensions (PDF)
