Heateflex Aquarius-ECO Ultrapure DI Water System Modes

Aquarius-ECO™ Conserves Ultra-Pure Water & Energy

Ultra-Pure Water Conservation with Aquarius-ECO™ Heated Ultra-Pure Water (UPW) is critical in Semiconductor manufacturing to ensure purity and high yields. With constant demand for chips, and increasing needs to conserve water, the world’s largest OEMs and Fabs have been upgrading their tools and facilities to focus on enhancing water and energy efficiencies. The Aquarius® DI…