Overview
Aquarius® water heating systems are ideal for high-purity processes that require accurate, precise temperature control and continuous flows of hot purified water, such as deionized (DI) water or ultrapure water (UPW). They feature Heateflex® heating coils, Power-to-Flow™ control systems, and operator safeties. Various output options help meet demanding flow and temperature requirements. Aquarius® provides an operational cost savings by reducing the need for multiple heaters. Aquarius-ECO™ models are also available for improved water and energy conservation.
Power-to-Flow™ Control
Power-to-Flow™ controls provide accurate temperature output in single-pass heating applications. It eliminates undesirable overshoots or drops in temperature. The sophisticated control systems feature multi-loop capability and feed-forward functions to moderate variations in the process flow rate. It measures flow and temperature at various stages, and adjusts the power applied to each heating zone accordingly. This advanced integrated system reacts quickly to flow variations to provide a steady stream of DIW at a stable temperature.
Features & Benefits
- Ultrapure PVDF/PFA wetted surfaces
- High-resolution touch-screen
- User-friendly graphical user interface (GUI)
- Plug-and-play system with complete integration of controls
- No N2 purge required
Temperature Controls
- Excellent temperature stability
- Fast response to temperature and flow variations
- Eliminates excessive overshoots and drops in temperature
- Programmable logic controller (PLC) with Power-to-Flow™ control delivers constant, stable, and accurate temperature output
- Ethernet read/write connection enables rapid transfer of heater data to fab SECS/GEM systems (other communications available)
Safety Features
- Short Circuit Current Rating (SCCR) at 100 kA
- Ground fault circuit interrupter (GFCI) system with a sub-30 mA rating
- Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and hi-limit thermocouples
- Redundant safety monitoring relay for door interlock switch and EMO
- NIST-certified thermocouples
- Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation
- Ground options for electrical safety and DI water compatibility
Aquarius-ECO™ systems are upgraded recirculating models that utilizes ultrapure White Knight pumps with Heateflex’s advanced heating technology. This upgraded system improves performance and provides energy and water savings while still providing the same temperature performance. The valve may be located at the point of use.
Demand Mode: Fluid goes to process when it is in demand.
Recirculation Mode: Fluid recirculates and maintains temperature. No fluid is used.
Heateflex® Aquarius-ECO™ Ultrapure DI Water Systems
- Reduce water
- Reduce energy consumption
- Save money
- Heated Point-of-Use systems
- Complete heated coverage on demand
- No wasted, unheated water to drain
- React quickly to flow variations
- Provide accurate output temperature
- Reduce excessive temperature drops and overshoots
- SEMI S2/S3
Specifications
Heater Element |
Heateflex® Coil |
|---|---|
Wetted Surfaces |
PVDF/PFA |
Sizes |
40-225 kW (voltage dependent) |
Voltages |
200-480 VAC, 3-ph (wattage dependent) |
Temperature |
95º C (203º F) |
Temperature Accuracy |
+/- 0.1º C (usage dependent) |
Flow |
0.5-32 GPM (1.9-122 LPM) |
Pressure |
60 PSIG @ 95ºC |
Efficiency |
>99 % |
*All specifications dependent on configuration.
Dimensions
Inches H x W x D
Model |
kW |
Low VAC |
High VAC |
|---|---|---|---|
DI-40 |
40 |
78 x 24 x 24 |
78 x 24 x 24 |
DI-80 |
80 |
78 x 32 x 24 |
78 x 24 x 24 |
DI-100 |
100 |
78 x 39 x 24 |
78 x 32 x 24 |
DI-120 |
120 |
78 x 39 x 24 |
78 x 32 x 24 |
DI-140 |
140 |
N/A |
78 x 32 x 24 |
DI-160 |
160 |
N/A |
78 x 32 x 24 |
DI-200 |
200 |
N/A |
78 x 39 x 24 |
DI-225 |
225 |
N/A |
78 x 39 x 24 |
Model |
kW |
Low VAC |
High VAC |
*Low VAC: 200-240 VAC, 3-Phase
*High VAC: 380-480 VAC, 3-Phase
Options
- Fusible Disconnect with Lock-out/Tag-out
- Auto Purge (Pump Not Included)
- Resistivity Sensor
- Leak Alarms (Critical and Non-Critical)
- Discrete Interface
- Analog Interface
- Dry Contact Interface
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