White Knight high-purity pumps enable semiconductor manufacturers to build smaller circuits at lower costs. Our pumps are built on decades of innovative engineering and in-house manufacturing. They offer safe, reliable operation with low maintenance even in the harshest and most demanding environments. White Knight pumps deliver, circulate, reclaim and transport high-purity chemicals for semiconductor fabrication.
Ultra-pure air-operated double-bellows pumps (AODB pumps) feature PTFE and PFA flow paths. These reliable, leak-free pumps offer high flow rates, steady pressures and stable temperatures. They do not contain metals or elastomer O-rings. They are dead-head capable, and provide high suction lift.
High-purity air-operated double-diaphragm pumps (AODD pumps) feature PTFE or UHMW polyethylene (UHMWPE) corrosion-resistant fluid paths. These safe, reliable pumps offer superior performance and simple maintenance.
Pneumatic metering pumps and electronic metering pumps feature PTFE flow paths and accurately dispense up to 100 ml and 50 ml, respectively. Their fully-supported rolling diaphragms maximize pressure capabilities and ensure safe, reliable chemical dispense for chemical replenishing, blending, dosing and spiking.
Automatically maintain and accurately control pressure for circulation loops or multiple dispense points without additional circuitry or feedback. Pressure regulators are remotely piloted and feature fully-swept PTFE and PFA flow paths.
White Knight pressure vessels provide laminar flow at the point of use. They feature chemically-resistant PTFE and PFA fluid paths for chemical dispense and mixing in harsh applications.
White Knight debubblers reduce bubbles from chemical delivery and wafer process systems. They feature chemically-resistant PTFE and PFA fluid paths for high-purity chemical applications.
High-Purity Closed-Loop Pump Systems
Automatically maintain laminar flow or steady pressure. White Knight closed-loop systems feature metal-free pumps with PTFE and PFA flow paths. They provide stable temperatures, dead-head, and suction lift.
Control your high-purity chemical processes and delivery systems. Simplify process automation to save time, resources and reduce costs.
- ≤ 140 lpm (36 gpm) flow rates
- ≤ 7 Bar (100 psi) pressures
- ≤ 210°C (410°F) temperatures
- Maintain stable temperatures
- No metals, no corrosion
- No elastomer O-rings, no leaks
- No electric motors, no heat rise
- No impellers, no microbubbles
Accubath™ Heated Quartz Wet Process Tanks
Accubath™ heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…
Accubath™ PTFE, PVDF, PFA, NPP Wet Process Tanks
Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
Accubath™ Heated SS Wet Process Tanks
Accubath™ heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…
Accubath™ Sapphire Wet Etching Process Tanks
Accubath™ sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…
PVDF, PFA, or Quartz Megasonic Systems
Accumeg™ Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays
Accuheat™ PFA In-Line Chemical Heaters
Accuheat™ PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…
Accuheat™ Quartz In-line Chemical Heaters
Accuheat™ quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…
Accuheat™ PFA In-Line Solvent Heaters
Accuheat™ PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…
Accuheat™ Quartz In-Line Gas Heaters
Accuheat™ quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…
Aquarius® DI Water Heaters
Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…
Ultrapure In-Line PFA Fluid Heaters
HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…
Ultrapure In-Line PVDF/PFA Fluid Heaters
PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries…
PFA Immersion Tank Heaters
PFA immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…
Vesper™ Heat Exchangers
Vesper™ Series of PVDF/PFA heat exchangers offer various solutions for heating, cooling, and temperature trimming for…
HX50 Compact Heaters
HX50 in-line heaters feature compact 50-mm (2-in) diameter housings for low wattage and low-flow applications where space is limited.
See All White Knight Fluid and Gas Heaters
White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.
Discontinued heaters systems include: Aries Solvent Heaters, Fluidix® Steam-Powered DIW Heaters, Poseidon™ Stainless Steel Heaters, SX Stainless Steel Heaters, Demeter™ Systems…