White Knight high-purity pumps enable semiconductor manufacturers to build smaller circuits at lower costs. Our pumps are built on decades of innovative engineering and in-house manufacturing. They offer safe, reliable operation with low maintenance even in the harshest and most demanding environments. White Knight pumps deliver, circulate, reclaim and transport high-purity chemicals for semiconductor fabrication.
Ultra-pure air-operated double-bellows pumps (AODB pumps) feature PTFE and PFA flow paths. These reliable, leak-free pumps offer high flow rates, steady pressures and stable temperatures. They do not contain metals or elastomer O-rings. They are dead-head capable, and provide high suction lift.
High-purity air-operated double-diaphragm pumps (AODD pumps) feature PTFE or UHMW polyethylene (UHMWPE) corrosion-resistant fluid paths. These safe, reliable pumps offer superior performance and simple maintenance. PSB Series AODD pumps are direct retrofit replacements for obsolete chemical delivery pumps.
Pneumatic metering pumps and electronic metering pumps feature PTFE flow paths and accurately dispense up to 100 ml and 50 ml, respectively. Their fully-supported rolling diaphragms maximize pressure capabilities and ensure safe, reliable chemical dispense for chemical replenishing, blending, dosing and spiking.
Automatically maintain laminar flow or steady pressure. White Knight closed-loop systems feature metal-free pumps with PTFE and PFA flow paths. They provide stable temperatures, dead-head, and suction lift.
Control your high-purity chemical processes and delivery systems. Simplify process automation to save time, resources and reduce costs.
- ≤ 140 lpm (36 gpm) flow rates
- ≤ 7 Bar (100 psi) pressures
- ≤ 210°C (410°F) temperatures
- Maintain stable temperatures
- No metals, no corrosion
- No elastomer O-rings, no leaks
- No electric motors, no heat rise
- No impellers, no microbubbles
PVDF, Quartz, or Stainless Steel Megasonic Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays