Accubath™ Heated Quartz Wet Process Tanks
Accubath™ heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…
Heated Quartz Wet Process Tanks
Accubath™ PTFE, PVDF, PFA, NPP Wet Process Tanks
Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…
PTFE, PVDF, PFA, NPP Tanks
Accubath™ Sapphire Wet Etching Process Tanks
Accubath™ sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…
Sapphire Wet Etch Tanks
Wet Process Tank Compatibility
Get the best wet process tank for your processes, chemistries, and applications.
Our material compatibility guide helps engineers specify which tank and cleaning systems best fit their needs.
Material Compatibility with Common Chemistries
PVDF, PFA, or Quartz Megasonic Systems
Accumeg™ Megasonic Cleaning Tanks & Systems
Gapless Transducer offers better process uniformity in the tank
Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals
- Reliable components
- Extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- High watt density
- Operates at 70°C+
- Field replaceable transducer arrays
Accumeg™ Megasonic Systems