Metering Pumps
Metering pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. They accurately dispense high-purity chemicals for replenishing, blending, dosing and spiking applications. They are ideal for photoresist, etch and clean processes.
- Fully adjustable stroke speed controlled manually or electronically
- Dispense volume ≤ 50 or ≤ 100 ml, depending on model
- Highly accurate; ± 0.01% or ± 0.1% repeatability, depending on model
- No exposed metals prevents corrosion and contamination
- PTFE fully-swept fluid path for ultra-pure chemicals
- PEM pump features programmable system logic, and can have 2-6 ports
Mini Pumps
PPMC mini pumps are capable of up to 300 ml/min flow rates and 160 psi discharge pressures. They feature PTFE and PFA fluid paths, and spring-loaded checks enable the pump to mount in any direction. Solenoid valves actuate each suction and dispense.
- ≤ 300 ml/min flow rates
- ≤ 11 bar (160 psi) fluid pressure
- ≤ 7 Bar (100) psi supply air
- ≤ 100°C (212°F)
- ≤ 0.5 m (20 in) suction lift
- Metal-free fluid path
Specifications
| Dispense Range or Max Flow Rate | 1 - 50 ml per stroke |
10 - 100 ml per stroke |
~0.75 ml per stroke |
| Dispense Repeatability | ± 0.01% (Full Scale) |
± 0.1% (Full Scale) |
- |
| Cycles Per Minute | ≤ 6 CPM |
≤ 12 CPM |
≤ 400 CPM |
| Fluid Path Materials | PTFE |
PTFE |
PTFE, PFA |
| Max Air Pressure | 4.14 - 5.86 Bar (60 - 85 PSI) |
4.14 - 5.86 Bar (60 - 85 PSI) |
7 bar (100 psi) |
| Max Discharge Pressure | 5.51 Bar (80 psi) |
5.86 Bar (85 psi) |
11 Bar (160 psi) |
| Temperature Capability | ≤ 100°C (212°F) |
≤ 100°C (212°F) |
≤ 100°C (212°F) |
| Suction Lift | 4.6 m (15 ft) |
4.6 m (15 ft) |
508 mm (20 in) |
| Communication | Serial, Ethernet, or Digital (0-5 V, 0-10 V, 4-20 mA) |
- |
Turck Connector 5 Pin O-ring Sealed |
| Leak Detection Options | Valve Position Sensing |
Valve Position Sensing |
- |
*Suction lift diminishes over time. Recommended installation level less than 4.6 m (15 ft.) above source.
**Optimized parameters can improve repeatability. Minimize suction lift to maximize repeatability. Contact White Knight for details.
Tests conducted with water at ambient temperature. Dispense range measured at full stroke with maximum and minimum supply pressures at 80 psi and 60 psi.