Low Flow Pumps

High-purity pumps with low flow rates

White Knight Metering Pumps

Metering Pumps

Metering pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. They accurately dispense high-purity chemicals for replenishing, blending, dosing and spiking applications. They are ideal for photoresist, etch and clean processes.

  • Fully adjustable stroke speed controlled manually or electronically
  • Dispense volume ≤ 50 or ≤ 100 ml, depending on model
  • Highly accurate; ± 0.01% or ± 0.1% repeatability, depending on model
  • No exposed metals prevents corrosion and contamination
  • PTFE fully-swept fluid path for ultra-pure chemicals
  • PEM pump features programmable system logic, and can have 2-6 ports
High-Purity Metering Pumps
PEM050 Spec SheetPPM100 Spec Sheet
White Knight PHC40 High-Pressure Pump

High-Pressure Pumps

PHC40 high-pressure metering pump offers up to 40 bar (580 psi) liquid discharge pressures. It dispenses up to 60 ml per minute. They feature metal-free flow paths to prevent ionic contamination. They are capable of receiving up to 7 Bar (100 psi) air supply pressures.

  • Continuous, steady flow
  • ≤ 40 bar (580 psi) discharge
  • ≤ 7 Bar (100) psi supply air
  • ≤ 60 ml per minute
  • Metal-free fluid path
  • Pressure-multiplying design
High-Pressure Pumps
PHC40 Specification Sheet
White Knight PPMC Mini-Pump for High-Purity Chemicals

Mini Pumps

PPMC mini pumps are capable of up to 300 ml/min flow rates and 160 psi discharge pressures. They feature PTFE/PFA fluid paths, and spring-loaded checks enable the pump to mount in any direction. Solenoid valves actuate each suction and dispense.

  • ≤ 300 ml/min flow rates
  • ≤ 11 bar (160 psi) fluid pressure
  • ≤ 7 Bar (100) psi supply air
  • ≤ 100°C (212°F)
  • ≤ 0.5 m (20 in) suction lift
  • Metal-free fluid path
PPMC Mini Pumps
PPMC Specification Sheet

Specifications

 
Dispense Range or Max Flow Rate
1 - 50 ml per stroke
10 - 100 ml per stroke
60 ml/min
~0.75 ml per stroke
Dispense Repeatability
± 0.01% (Full Scale)
± 0.1% (Full Scale)
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-
Cycles Per Minute
≤ 6 CPM
≤ 12 CPM
≤ 5 CPM
≤ 400 CPM
Fluid Path Materials
PTFE
PTFE
Sapphire, PEEK,
PTFE, FFKM
PTFE, PFA
Max Air Pressure
4.14 - 5.86 Bar
(60 - 85 PSI)
4.14 - 5.86 Bar
(60 - 85 PSI)
7 bar (100 psi)
7 bar (100 psi)
Max Discharge Pressure
5.51 Bar (80 psi)
5.86 Bar (85 psi)
40 Bar (580 psi)
11 Bar (160 psi)
Temperature Capability
≤ 100°C (212°F)
≤ 100°C (212°F)
≤ 80°C (176°F)
≤ 100°C (212°F)
Suction Lift
4.6 m (15 ft)
4.6 m (15 ft)
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508 mm (20 in)
Communication
Serial, Ethernet, or Digital
(0-5 V, 0-10 V, 4-20 mA)
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-
Turck Connector
5 Pin O-ring Sealed
Leak Detection Options
Valve Position Sensing
Valve Position Sensing
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-
 

*Suction lift diminishes over time. Recommended installation level less than 4.6 m (15 ft.) above source.
**Optimized parameters can improve repeatability. Minimize suction lift to maximize repeatability. Contact White Knight for details.
Tests conducted with water at ambient temperature. Dispense range measured at full stroke with maximum and minimum supply pressures at 80 PSI and 60 PSI.