PFA Immersion Tank Heaters

Overview

HFI Series immersion heaters are the perfect solution for heating harsh chemicals or DI water to constant temperatures in ultrapure tanks, including PVDF, PFA, and quartz tanks. Their PFA/PTFE wetted surfaces are ideal for use in high-purity applications where chemical compatibility is of utmost importance. HFI heaters utilize the Heateflex® element to provide high-efficiency heating with superior temperature control and maximum power output in a compact footprint. The heaters are available in various sizes that easily fit new and existing systems common to semiconductor, solar, MEMs, and other technological industries.

Heateflex PFA Immersion Tank Frame Heaters

Features & Benefits

Ultrapure PTFE/PFA wetted surfaces
Reliable heating of harsh chemicals
Maximum power in compact footprint
Maximum 200°C heating capability
Fast temperature response and efficiency
Each configuration capable of various voltage-to-wattage combinations
Integrate easily into most PVDF, PFA, and quartz wet process tanks
Sizes for many tank dimensions
Compact height of 1-5/8 inch
Safety features include hi-limit sensor and encapsulated ground wire
No N2 purge required

Optional Perforated Grids

Top grids separate heaters from wafer carriers and components to increase the available tank space
Bottom grids separate heaters from the tank floor
Available for all frame sizes
Adds 1/8 inch to height

Heateflex PFA Immersion Tank Frame Heaters Perforated Grids

*Shown with top and bottom grid.

Specifications

Heater Element	Heateflex® Coil
Wetted Surfaces	PFA/PTFE
Wattages	1.0 – 20 kW
Voltages	120 – 480 VAC 1 or 3 phase
Sizes (LxW)	7x5 to 19x14 inch
Height	1-5/8 inch
Temperature	200°C (392°F)
Hi-Limit Sensor	Type-J thermocouple
Ground Wire	Encapsulated
Lead Wire	15-ft

*All specifications depend on size, voltage, wattage, and customer utilization. See configurations for sizing, capability, and compatibility.

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Standard Configurations

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Model	Size	Length	Width	Wattage	Wattage	Voltage	Phase
HFI-0705-010-B-J-GE	7 x 5 in	7	5	1.0 kW	0-1.9	120 VAC	1-Phase
HFI-0705-023-E-J-GE	7 x 5 in	7	5	1.7 kW	0-1.9	200 VAC	1-Phase
HFI-0705-023-E-J-GE	7 x 5 in	7	5	1.9 kW	0-1.9	208 VAC	1-Phase
HFI-0707-020-B-J-GE	7 x 7 in	7	7	2.0 kW	2-3.9	120 VAC	1-Phase
HFI-0705-023-E-J-GE	7 x 5 in	7	5	2.1 kW	2-3.9	220 VAC	1-Phase
HFI-0707-030-F-J-GE	7 x 7 in	7	7	2.1 kW	2-3.9	200 VAC	1-Phase
HFI-0705-023-E-J-GE	7 x 5 in	7	5	2.3 kW	2-3.9	230 VAC	1-Phase
HFI-0707-030-F-J-GE	7 x 7 in	7	7	2.3 kW	2-3.9	208 VAC	1-Phase
HFI-0707-030-F-J-GE	7 x 7 in	7	7	2.5 kW	2-3.9	220 VAC	1-Phase
HFI-0707-030-F-J-GE	7 x 7 in	7	7	2.8 kW	2-3.9	230 VAC	1-Phase
HFI-0707-030-F-J-GE	7 x 7 in	7	7	3.0 kW	2-3.9	240 VAC	1-Phase
HFI-0905-020-B-J-GE	9 x 5 in	9	5	2.0 kW	2-3.9	120 VAC	1-Phase
HFI-0905-030-F-J-GE	9 x 5 in	9	5	2.1 kW	2-3.9	200 VAC	1-Phase
HFI-0905-030-F-J-GE	9 x 5 in	9	5	2.3 kW	2-3.9	208 VAC	1-Phase
HFI-0905-030-F-J-GE	9 x 5 in	9	5	2.5 kW	2-3.9	220 VAC	1-Phase
HFI-0905-030-XX-J-GE	9 x 5 in	9	5	2.7 kW	2-3.9	380 VAC	1-Phase
HFI-0905-030-F-J-GE	9 x 5 in	9	5	2.8 kW	2-3.9	230 VAC	1-Phase
HFI-0905-030-XX-J-GE	9 x 5 in	9	5	3.0 kW	2-3.9	400 VAC	1-Phase
HFI-0905-030-F-J-GE	9 x 5 in	9	5	3.0 kW	2-3.9	240 VAC	1-Phase
HFI-0907-040-D-J-GE	9 x 7 in	9	7	3.3 kW	2-3.9	200 VAC	1-Phase
HFI-0909-055-L-J-GE	9 x 9 in	9	9	3.4 kW	2-3.9	380 VAC	1-Phase
HFI-0909-050-F-J-GE	9 x 9 in	9	9	3.5 kW	2-3.9	200 VAC	1-Phase
HFI-0907-040-D-J-GE	9 x 7 in	9	7	3.6 kW	2-3.9	208 VAC	1-Phase
HFI-0909-050-F-J-GE	9 x 9 in	9	9	3.7 kW	2-3.9	208 VAC	1-Phase
HFI-0909-055-L-J-GE	9 x 9 in	9	9	3.8 kW	2-3.9	400 VAC	1-Phase
HFI-0907-040-D-J-GE	9 x 7 in	9	7	4.0 kW	4-5.9	220 VAC	1-Phase
HFI-0909-050-F-J-GE	9 x 9 in	9	9	4.2 kW	4-5.9	220 VAC	1-Phase
HFI-0909-050-F-J-GE	9 x 9 in	9	9	4.6 kW	4-5.9	230 VAC	1-Phase
HFI-0909-050-F-J-GE	9 x 9 in	9	9	5.0 kW	4-5.9	240 VAC	1-Phase
HFI-0909-055-L-J-GE	9 x 9 in	9	9	5.5 kW	4-5.9	480 VAC	1-Phase
HFI-1105-040-D-J-GE	11 x 5 in	11	5	3.3 kW	2-3.9	200 VAC	1-Phase
HFI-1107-050-F-J-GE	11 x 7 in	11	7	3.5 kW	2-3.9	200 VAC	1-Phase
HFI-1107-055-L-J-GE	11 x 7 in	11	7	3.5 kW	2-3.9	380 VAC	1-Phase
HFI-1105-040-D-J-GE	11 x 5 in	11	5	3.6 kW	2-3.9	208 VAC	1-Phase
HFI-1107-050-F-J-GE	11 x 7 in	11	7	3.7 kW	2-3.9	208 VAC	1-Phase
HFI-1107-055-L-J-GE	11 x 7 in	11	7	3.8 kW	2-3.9	400 VAC	1-Phase
HFI-1105-040-D-J-GE	11 x 5 in	11	5	4.0 kW	4-5.9	220 VAC	1-Phase
HFI-1107-050-F-J-GE	11 x 7 in	11	7	4.2 kW	4-5.9	220 VAC	1-Phase
HFI-1107-050-F-J-GE	11 x 7 in	11	7	4.6 kW	4-5.9	230 VAC	1-Phase
HFI-1109-070-F-J-GE	11 x 9 in	11	9	4.8 kW	4-5.9	200 VAC	1-Phase
HFI-1107-050-F-J-GE	11 x 7 in	11	7	5.0 kW	4-5.9	240 VAC	1-Phase
HFI-1109-070-F-J-GE	11 x 9 in	11	9	5.2 kW	4-5.9	208 VAC	1-Phase
HFI-1111-088-L-J-GE	11 x 11 in	11	11	5.5 kW	4-5.9	380 VAC	1-Phase
HFI-1107-055-L-J-GE	11 x 7 in	11	7	5.5 kW	4-5.9	480 VAC	1-Phase
HFI-1109-070-F-J-GE	11 x 9 in	11	9	5.9 kW	4-5.9	220 VAC	1-Phase
HFI-1111-088-L-J-GE	11 x 11 in	11	11	6.1 kW	6-7.9	400 VAC	1-Phase
HFI-1109-070-F-J-GE	11 x 9 in	11	9	6.4 kW	6-7.9	230 VAC	1-Phase
HFI-1109-070-F-J-GE	11 x 9 in	11	9	7.0 kW	6-7.9	240 VAC	1-Phase
HFI-1111-088-L-J-GE	11 x 11 in	11	11	8.8 kW	8-9.9	480 VAC	1-Phase
HFI-1305-045-L-J-GE	13 x 5 in	13	5	2.8 kW	2-3.9	380 VAC	1-Phase
HFI-1305-045-L-J-GE	13 x 5 in	13	5	3.1 kW	2-3.9	400 VAC	1-Phase
HFI-1305-050-F-J-GE	13 x 5 in	13	5	3.5 kW	2-3.9	200 VAC	1-Phase
HFI-1305-050-F-J-GE	13 x 5 in	13	5	3.7 kW	2-3.9	208 VAC	1-Phase
HFI-1305-050-F-J-GE	13 x 5 in	13	5	4.2 kW	4-5.9	220 VAC	1-Phase
HFI-1309-068-L-J-GE	13 x 9 in	13	9	4.3 kW	4-5.9	380 VAC	1-Phase
HFI-1305-045-L-J-GE	13 x 5 in	13	5	4.5 kW	4-5.9	480 VAC	1-Phase
HFI-1305-050-F-J-GE	13 x 5 in	13	5	4.6 kW	4-5.9	230 VAC	1-Phase
HFI-1309-068-L-J-GE	13 x 9 in	13	9	4.7 kW	4-5.9	400 VAC	1-Phase
HFI-1307-070-F-J-GE	13 x 7 in	13	7	4.8 kW	4-5.9	200 VAC	1-Phase
HFI-1309-070-F-J-GE	13 x 9 in	13	9	4.8 kW	4-5.9	200 VAC	1-Phase
HFI-1305-050-F-J-GE	13 x 5 in	13	5	5.0 kW	4-5.9	240 VAC	1-Phase
HFI-1309-070-F-J-GE	13 x 9 in	13	9	5.2 kW	4-5.9	208 VAC	1-Phase
HFI-1307-070-F-J-GE	13 x 7 in	13	7	5.2 kW	4-5.9	208 VAC	1-Phase
HFI-1309-070-F-J-GE	13 x 9 in	13	9	5.9 kW	4-5.9	220 VAC	1-Phase
HFI-1307-070-F-J-GE	13 x 7 in	13	7	5.9 kW	4-5.9	220 VAC	1-Phase
HFI-1311-090-Q-J-GE	13 x 11 in	13	11	6.2 kW	6-7.9	200 VAC	3-Phase
HFI-1309-070-F-J-GE	13 x 9 in	13	9	6.4 kW	6-7.9	230 VAC	1-Phase
HFI-1307-070-F-J-GE	13 x 7 in	13	7	6.4 kW	6-7.9	230 VAC	1-Phase
HFI-1309-068-L-J-GE	13 x 9 in	13	9	6.8 kW	6-7.9	480 VAC	1-Phase
HFI-1311-090-Q-J-GE	13 x 11 in	13	11	6.8 kW	6-7.9	208 VAC	3-Phase
HFI-1311-110-L-J-GE	13 x 11 in	13	11	6.9 kW	6-7.9	380 VAC	1-Phase
HFI-1309-070-F-J-GE	13 x 9 in	13	9	7.0 kW	6-7.9	240 VAC	1-Phase
HFI-1307-070-F-J-GE	13 x 7 in	13	7	7.0 kW	6-7.9	240 VAC	1-Phase
HFI-1311-110-L-J-GE	13 x 11 in	13	11	7.6 kW	6-7.9	400 VAC	1-Phase
HFI-1311-090-Q-J-GE	13 x 11 in	13	11	7.6 kW	6-7.9	220 VAC	3-Phase
HFI-1311-104-E-J-GE	13 x 11 in	13	11	7.9 kW	6-7.9	200 VAC	1-Phase
HFI-1311-090-W-J-GE	13 x 11 in	13	11	8.1 kW	8-9.9	380 VAC	3-Phase
HFI-1311-090-Q-J-GE	13 x 11 in	13	11	8.3 kW	8-9.9	230 VAC	3-Phase
HFI-1311-104-E-J-GE	13 x 11 in	13	11	8.5 kW	8-9.9	208 VAC	1-Phase
HFI-1311-090-Q-J-GE	13 x 11 in	13	11	9.0 kW	8-9.9	240 VAC	3-Phase
HFI-1311-090-W-J-GE	13 x 11 in	13	11	9.0 kW	8-9.9	400 VAC	3-Phase
HFI-1311-104-E-J-GE	13 x 11 in	13	11	9.5 kW	8-9.9	220 VAC	1-Phase
HFI-1311-104-E-J-GE	13 x 11 in	13	11	10.4 kW	10-11.9	230 VAC	1-Phase
HFI-1311-110-L-J-GE	13 x 11 in	13	11	11.0 kW	10-11.9	480 VAC	1-Phase
HFI-1505-055-L-J-GE	15 x 5 in	15	5	3.4 kW	2-3.9	380 VAC	1-Phase
HFI-1505-050-F-J-GE	15 x 5 in	15	5	3.5 kW	2-3.9	200 VAC	1-Phase
HFI-1505-050-F-J-GE	15 x 5 in	15	5	3.7 kW	2-3.9	208 VAC	1-Phase
HFI-1505-055-L-J-GE	15 x 5 in	15	5	3.8 kW	2-3.9	400 VAC	1-Phase
HFI-1505-050-F-J-GE	15 x 5 in	15	5	4.2 kW	4-5.9	220 VAC	1-Phase
HFI-1505-050-F-J-GE	15 x 5 in	15	5	4.6 kW	4-5.9	230 VAC	1-Phase
HFI-1505-050-F-J-GE	15 x 5 in	15	5	5 kW	4-5.9	240 VAC	1-Phase
HFI-1505-055-L-J-GE	15 x 5 in	15	5	5.5 kW	4-5.9	480 VAC	1-Phase
HFI-1509-090-L-J-GE	15 x 9 in	15	9	5.6 kW	4-5.9	380 VAC	1-Phase
HFI-1509-090-L-J-GE	15 x 9 in	15	9	6.3 kW	6-7.9	400 VAC	1-Phase
HFI-1507-070-XX-J-GE	15 x 7 in	15	7	6.3 kW	6-7.9	380 VAC	1-Phase
HFI-1509-100-F-J-GE	15 x 9 in	15	9	6.9 kW	6-7.9	200 VAC	1-Phase
HFI-1507-070-XX-J-GE	15 x 7 in	15	7	7 kW	6-7.9	400 VAC	1-Phase
HFI-1509-100-F-J-GE	15 x 9 in	15	9	7.5 kW	6-7.9	208 VAC	1-Phase
HFI-1509-100-F-J-GE	15 x 9 in	15	9	8.4 kW	8-9.9	220 VAC	1-Phase
HFI-1509-090-L-J-GE	15 x 9 in	15	9	9.0 kW	8-9.9	480 VAC	1-Phase
HFI-1509-100-F-J-GE	15 x 9 in	15	9	9.2 kW	8-9.9	230 VAC	1-Phase
HFI-1511-120-O-J-GE	15 x 11 in	15	11	9.9 kW	8-9.9	200 VAC	3-Phase
HFI-1509-100-F-J-GE	15 x 9 in	15	9	10.0 kW	10-11.9	240 VAC	1-Phase
HFI-1511-113-W-J-GE	15 x 11 in	15	11	10.2 kW	10-11.9	380 VAC	3-Phase
HFI-1514-165-V-J-GE	15 x 14 in	15	14	10.3 kW	10-11.9	380 VAC	3-Phase
HFI-1514-150-Q-J-GE	15 x 14 in	15	14	10.4 kW	10-11.9	200 VAC	3-Phase
HFI-1511-120-O-J-GE	15 x 11 in	15	11	10.7 kW	10-11.9	208 VAC	3-Phase
HFI-1514-150-Q-J-GE	15 x 14 in	15	14	11.2 kW	10-11.9	208 VAC	3-Phase
HFI-1511-113-W-J-GE	15 x 11 in	15	11	11.3 kW	10-11.9	400 VAC	3-Phase
HFI-1514-165-V-J-GE	15 x 14 in	15	14	11.4 kW	10-11.9	400 VAC	3-Phase
HFI-1511-120-O-J-GE	15 x 11 in	15	11	12.0 kW	12-13.9	220 VAC	3-Phase
HFI-1514-150-Q-J-GE	15 x 14 in	15	14	12.6 kW	12-13.9	220 VAC	3-Phase
HFI-1514-150-Q-J-GE	15 x 14 in	15	14	13.7 kW	12-13.9	230 VAC	3-Phase
HFI-1514-150-Q-J-GE	15 x 14 in	15	14	15.0 kW	14-15.9	240 VAC	3-Phase
HFI-1514-165-V-J-GE	15 x 14 in	15	14	16.5 kW	16-17.9	480 VAC	3-Phase
HFI-1907-088-L-J-GE	19 x 7 in	19	7	5.5 kW	4-5.9	380 VAC	1-Phase
HFI-1907-088-L-J-GE	19 x 7 in	19	7	6.1 kW	6-7.9	400 VAC	1-Phase
HFI-1909-090-Q-J-GE	19 x 9 in	19	9	6.2 kW	6-7.9	200 VAC	3-Phase
HFI-1905-070-XX-J-GE	19 x 5 in	19	5	6.3 kW	6-7.9	380 VAC	1-Phase
HFI-1909-090-Q-J-GE	19 x 9 in	19	9	6.8 kW	6-7.9	208 VAC	3-Phase
HFI-1905-070-XX-J-GE	19 x 5 in	19	5	7.0 kW	6-7.9	400 VAC	1-Phase
HFI-1909-090-Q-J-GE	19 x 9 in	19	9	7.6 kW	6-7.9	220 VAC	3-Phase
HFI-1909-090-W-J-GE	19 x 9 in	19	9	8.1 kW	8-9.9	380 VAC	3-Phase
HFI-1909-090-Q-J-GE	19 x 9 in	19	9	8.3 kW	8-9.9	230 VAC	3-Phase
HFI-1911-135-V-J-GE	19 x 11 in	19	11	8.5 kW	8-9.9	380 VAC	3-Phase
HFI-1907-088-L-J-GE	19 x 7 in	19	7	8.8 kW	8-9.9	480 VAC	1-Phase
HFI-1909-090-Q-J-GE	19 x 9 in	19	9	9.0 kW	8-9.9	240 VAC	3-Phase
HFI-1909-090-W-J-GE	19 x 9 in	19	9	9.0 kW	8-9.9	400 VAC	3-Phase
HFI-1911-135-V-J-GE	19 x 11 in	19	11	9.4 kW	8-9.9	400 VAC	3-Phase
HFI-1911-150-Q-J-GE	19 x 11 in	19	11	10.4 kW	10-11.9	200 VAC	3-Phase
HFI-1911-150-Q-J-GE	19 x 11 in	19	11	11.2 kW	10-11.9	208 VAC	3-Phase
HFI-1911-150-Q-J-GE	19 x 11 in	19	11	12.6 kW	12-13.9	220 VAC	3-Phase
HFI-1914-205-V-J-GE	19 x 14 in	19	14	12.8 kW	12-13.9	380 VAC	3-Phase
HFI-1911-135-V-J-GE	19 x 11 in	19	11	13.5 kW	12-13.9	480 VAC	3-Phase
HFI-1911-150-Q-J-GE	19 x 11 in	19	11	13.7 kW	12-13.9	230 VAC	3-Phase
HFI-1914-205-V-J-GE	19 x 14 in	19	14	14.2 kW	14-15.9	400 VAC	3-Phase
HFI-1914-208-Q-J-GE	19 x 14 in	19	14	14.5 kW	14-15.9	200 VAC	3-Phase
HFI-1911-150-Q-J-GE	19 x 11 in	19	11	15.0 kW	14-15.9	240 VAC	3-Phase
HFI-1914-208-Q-J-GE	19 x 14 in	19	14	15.6 kW	14-15.9	208 VAC	3-Phase
HFI-1914-208-Q-J-GE	19 x 14 in	19	14	17.5 kW	16-17.9	220 VAC	3-Phase
HFI-1914-208-Q-J-GE	19 x 14 in	19	14	19.2 kW	18-19.9	230 VAC	3-Phase
HFI-1914-205-V-J-GE	19 x 14 in	19	14	20.5 kW	20-21.9	480 VAC	3-Phase
HFI-1914-208-Q-J-GE	19 x 14 in	19	14	20.8 kW	20-21.9	240 VAC	3-Phase

PFA Immersion Tank Heaters

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Features & Benefits

Optional Perforated Grids

Specifications

Standard Configurations