White Knight Pumps for Flat Panel Displays Applications

Products for Manufacturing Electronics

Flat-Panel Displays & Microprocessors

White Knight Pumps

White Knight’s semiconductor pumps are ideal for manufacturing flat-panel displays and other electronics. They are built on decades of innovative engineering and in-house manufacturing experience. The pumps are safe, reliable, and require little maintenance even in the harshest and most demanding environments. White Knight pumps deliver, circulate, reclaim and transport high-purity chemicals for manufacturing electronics.

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White Knight High-Purity Pneumatic Bellows Pumps

Bellows Pumps

Ultra-pure air-operated double-bellows pumps (AODB pumps) feature Teflon® PTFE and PFA flow paths. These reliable, leak-free pumps offer high flow rates, steady pressures and stable temperatures. They do not contain metals or elastomer O-rings. They are dead-head capable, and provide high suction lift.

Bellows Pumps
White Knight High-Purity Air-Operated Double-Diaphragm Pumps

Diaphragm Pumps

High-purity air-operated double-diaphragm pumps (AODD pumps) feature Teflon® PTFE or UHMW (PE) corrosion-resistant fluid paths. These safe, reliable pumps offer superior performance and simple maintenance. PSB Series AODD pumps are direct retrofit replacements for obsolete chemical delivery pumps.

Diaphragm Pumps
White Knight Metering Pumps for Chemical Dispense

Metering Pumps

Pneumatic metering pumps and electronic metering pumps feature Teflon® PTFE flow paths and accurately dispense up to 100 ml and 50 ml, respectively. Their fully-supported rolling diaphragms maximize pressure capabilities and ensure safe, reliable chemical dispense for chemical replenishing, blending, dosing and spiking.

Metering Pumps
White Knight PPMC Mini-Pump for High-Purity Chemicals

Mini-Pump

Mini-pumps offer up to 300 ml/min flow rates and 160 psi discharge pressures. They feature Teflon® PTFE and PFA fluid paths. Spring-loaded checks enable mounting in any direction. Solenoid valves actuate each suction and dispense.

Mini-Pump
White Knight High-Purity Back-Pressure Regulators

Pressure Regulators

Automatically maintain and accurately control pressure for circulation loops or multiple dispense points without additional circuitry or feedback. Pressure regulators are remotely piloted and feature fully-swept Teflon® PTFE and PFA flow paths.

Pressure Regulators
White Knight High-Purity Pressure Vessels

Pressure Vessels

White Knight pressure vessels provide laminar flow at the point of use. They feature chemically-resistant PTFE and PFA fluid paths for chemical dispense and mixing in harsh applications.

Pressure Vessels
CBA Debubbler Pressure Vessels

Debubblers

White Knight debubblers reduce bubbles from chemical delivery and wafer process systems. They feature chemically-resistant PTFE and PFA fluid paths for high-purity chemical applications.

Debubblers
White Knight Closed-Loop Control Systems

High-Purity Closed-Loop Pump Systems

Automatically maintain laminar flow or steady pressure. White Knight closed-loop systems feature metal-free pumps with Teflon® PTFE and PFA flow paths. They provide stable temperatures, dead-head, and suction lift.

Control your high-purity chemical processes and delivery systems. Simplify process automation to save time, resources and reduce costs.

  • ≤ 140 lpm (36 gpm) flow rates
  • ≤ 7 Bar (100 psi) pressures
  • ≤ 210°C (410°F) temperatures
  • Maintain stable temperatures
  • No metals, no corrosion
  • No elastomer O-rings, no leaks
  • No electric motors, no heat rise
  • No impellers, no microbubbles
High-Purity Closed-Loop Systems

Wet Process Tanks

Global Standard for Static and Recirculating Processes

Accubath Heated Quartz Process Tank Silicon Nitride Etch

Accubath® Heated Quartz Wet Process Tanks

Accubath® heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

Heated Quartz Tanks
Accubath PVDF QDR Process Tank

Accubath® Teflon, PVDF, PFA, NPP Wet Process Tanks

Accubath® Teflon, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

PTFE, PVDF, PFA, NPP Tanks
Accubath Stainless Steel Recirculating Heated Tank

Accubath® Heated SS Wet Process Tanks

Accubath® heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…

Heated SS Tanks
Accubath XE-Lab System Wet Etch Bath

Accubath® Sapphire Wet Etching Process Tanks

Accubath® sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Sapphire Wet Etch Tanks
Accumeg Megasonic Cleaning Tank Systems PVDF Quick Dump
Accumeg Megasonic Cleaning Tank Systems Quartz Recirculating
Accumeg Megasonic Cleaning Tank Systems Stainless Steel

PVDF, Quartz, or Stainless Steel Megasonic Systems

Accumeg® Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays, components rated > 50,000 hours MTBF
Accumeg® Megasonic Systems

White Knight Heaters

Ultra-Pure Fluid & Gas Heating Solutions

Accuheat PFA In-Line Chemical Heaters

Accuheat® PFA In-Line Chemical Heaters

Accuheat® PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA Chemical Heaters
Accuheat Quartz In-Line Chemical Heaters Dual Tube 12000 Watts

Accuheat® Quartz In-line Chemical Heaters

Accuheat® quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…

Quartz Chemical Heaters
Accuheat PFA In-Line Solvent Heaters

Accuheat® PFA In-Line Solvent Heaters

Accuheat® PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA Solvent Heaters
Accuheat Quartz In-Line Gas Heaters

Accuheat® Quartz In-Line Gas Heaters

Accuheat® quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

Quartz Gas Heaters
Heateflex Aquarius Deionized (DI) Water Heater Systems

Aquarius® Deionized (DI) Water Heater Systems

Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…

Aquarius® Heaters
Heateflex Fluidix Steam Powered Deionized DI Water Heater Systems

Fluidix® Steam-Powered DI Water Heater Systems

Fluidix® steam-powered deionized (DI) water heater systems offer the semiconductor industry a low-cost alternative to…

Fluidix® Heaters
Heateflex PVDF PFA Ultra-Pure In-Line Fluid Heaters

PVDF/PFA Ultra-Pure In-Line Fluid Heaters

For semiconductor, solar, MEMS, and other industries that require the most exacting standards of purity…

PVDF/PFA Heaters
Heateflex Quartz High-Purity In-Line Fluid-Heaters

Quartz High-Purity In-Line Fluid Heaters

Quartz high-purity in-line fluid heaters meet the stringent heating standards required for semiconductor manufacturing. This heater…

Quartz Heaters
Heateflex Aries Solvent Heaters

Aries Solvent Heater

Aries solvent heaters safely heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA), EKC photoresist remover…

Aries Solvent Heaters
Heateflex Aries PFA IPA Heaters

Aries PFA IPA Heaters

Aries PFA IPA heaters safely and effectively heat thermally-sensitive fluids such as Isopropyl Alcohol (IPA) and EKC…

Aries PFA IPA Heaters
Heateflex PFA Immersion Tank Grid Heaters

PFA Immersion Tank Heaters

PFA immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA Tank Heaters
Heateflex Ultra-Pure Fluid and Gas Heaters

See All White Knight Fluid and Gas Heaters

White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.

All White Knight Heaters