White Knight Pumps for Flat Panel Displays Applications

Products for Manufacturing Electronics

Flat-Panel Displays & Microprocessors

White Knight Pumps

White Knight’s semiconductor pumps are ideal for manufacturing flat-panel displays and other electronics. They are built on decades of innovative engineering and in-house manufacturing experience. The pumps are safe, reliable, and require little maintenance even in the harshest and most demanding environments. White Knight pumps deliver, circulate, reclaim and transport high-purity chemicals for manufacturing electronics.

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Bellows Pumps

Ultra-pure air-operated double-bellows pumps (AODB pumps) feature PTFE and PFA flow paths. These reliable, leak-free pumps offer high flow rates, steady pressures and stable temperatures. They do not contain metals or elastomer O-rings. They are dead-head capable, and provide high suction lift.

Bellows Pumps

Diaphragm Pumps

High-purity air-operated double-diaphragm pumps (AODD pumps) feature PTFE or UHMW polyethylene (UHMWPE) corrosion-resistant fluid paths. These safe, reliable pumps offer superior performance and simple maintenance.

Diaphragm Pumps

Metering Pumps

Pneumatic metering pumps and electronic metering pumps feature PTFE flow paths and accurately dispense up to 100 ml and 50 ml, respectively. Their fully-supported rolling diaphragms maximize pressure capabilities and ensure safe, reliable chemical dispense for chemical replenishing, blending, dosing and spiking.

Metering Pumps

Mini-Pump

Mini-pumps offer up to 300 ml/min flow rates and 160 psi discharge pressures. They feature PTFE and PFA fluid paths. Spring-loaded checks enable mounting in any direction. Solenoid valves actuate each suction and dispense.

Mini-Pump

Pressure Regulators

Automatically maintain and accurately control pressure for circulation loops or multiple dispense points without additional circuitry or feedback. Pressure regulators are remotely piloted and feature fully-swept PTFE and PFA flow paths.

Pressure Regulators

Pressure Vessels

White Knight pressure vessels provide laminar flow at the point of use. They feature chemically-resistant PTFE and PFA fluid paths for chemical dispense and mixing in harsh applications.

Pressure Vessels

Debubblers

White Knight debubblers reduce bubbles from chemical delivery and wafer process systems. They feature chemically-resistant PTFE and PFA fluid paths for high-purity chemical applications.

Debubblers

High-Purity Closed-Loop Pump Systems

Automatically maintain laminar flow or steady pressure. White Knight closed-loop systems feature metal-free pumps with PTFE and PFA flow paths. They provide stable temperatures, dead-head, and suction lift.

Control your high-purity chemical processes and delivery systems. Simplify process automation to save time, resources and reduce costs.

  • ≤ 140 lpm (36 gpm) flow rates
  • ≤ 7 Bar (100 psi) pressures
  • ≤ 210°C (410°F) temperatures
  • Maintain stable temperatures
  • No metals, no corrosion
  • No elastomer O-rings, no leaks
  • No electric motors, no heat rise
  • No impellers, no microbubbles
High-Purity Closed-Loop Systems

Wet Process Tanks

Global Standard for Static and Recirculating Processes

Accubath™ Heated Quartz Wet Process Tanks

Accubath™ heated quartz wet process tanks processes using quartz-compatible chemistries up to 190°C…

Heated Quartz Tanks

Accubath™ PTFE, PVDF, PFA, NPP Wet Process Tanks

Accubath™ PTFE, PVDF, PFA, NPP wet process and rinse tanks minimize welding and seams to reduce particles…

PTFE, PVDF, PFA, NPP Tanks

Accubath™ Heated SS Wet Process Tanks

Accubath™ heated stainless steel wet process tanks for reliable and safe performance in static and recirculating systems…

Heated SS Tanks

Accubath™ Sapphire Wet Etching Process Tanks

Accubath™ sapphire wet etching process tanks safely and reliably heat chemistries up to 300°C…

Sapphire Wet Etch Tanks

PVDF, PFA, or Quartz Megasonic Systems

Accumeg™ Megasonic Cleaning Tanks & Systems

Gapless Transducer offers better process uniformity in the tank

Transducers with tightly matched crystals wired together in parallel for small potential difference between crystals

  • Reliable components
  • Extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • High watt density
  • Operates at 70°C+
  • Field replaceable transducer arrays
Accumeg™ Megasonic Systems

White Knight Heaters

Ultra-Pure Fluid & Gas Heating Solutions

Accuheat™ PFA In-Line Chemical Heaters

Accuheat™ PFA in-line chemical heaters are ideal for heating hydrofluoric acid (HF), potassium hydroxide (KOH),…

PFA Chemical Heaters

Accuheat™ Quartz In-line Chemical Heaters

Accuheat™ quartz in-line chemical heaters consist of ultra-pure quartz tubes, wrapped in a heater element that provides…

Quartz Chemical Heaters

Accuheat™ PFA In-Line Solvent Heaters

Accuheat™ PFA in-line solvent heaters are ideal for Isopropyl alcohol, Acetone, Ethanol, Toluene, EKC, MEK, NMP,…

PFA Solvent Heaters

Accuheat™ Quartz In-Line Gas Heaters

Accuheat™ quartz in-line gas heaters for Nitrogen (N2), Ammonia (NH3), Helium (He), Argon (Ar), BCl3, HCl, CO, CO2,…

Quartz Gas Heaters

Aquarius® Deionized (DI) Water Heaters

Aquarius® deionized (DI) water heater systems are the perfect solution for high-purity heating applications that…

Aquarius® Heaters

Ultrapure In-Line PVDF/PFA Fluid Heaters

PVDF/PFA fluid heaters ideal for heating deionized water, acids, and less aggressive process chemistries used in high-purity…

PVDF/PFA Heaters

Ultrapure In-Line PFA Fluid Heaters

HC Series in-line heaters feature PFA flow paths for optimal compatibility with aggressive acids and chemicals…

PFA Heaters

Vesper™ PVDF PFA Heat Exchangers

Vesper™ Series of PVDF/PFA heat exchangers offer various solutions for heating, cooling, and temperature trimming for…

Vesper™ Heat Exchangers

PFA Immersion Tank Heaters

PFA immersion tank heaters are great for heating fluid baths to a constant temperature. These tank heaters are…

PFA Tank Heaters

HX50 Compact Heaters

HX50 in-line heaters feature compact 50-mm (2-in) diameter housings for low wattage and low-flow applications where space is limited.

HX50 Compact Heaters

See All White Knight Fluid and Gas Heaters

White Knight offers a wide range of ultra-pure heaters, including gas heating systems, industrial water heaters, and immersion heaters for heating deionized water, chemicals, gases, and solvents.

All White Knight Heaters

Legacy Heaters

Discontinued heaters systems include: Aries Solvent Heaters, Fluidix® Steam-Powered DIW Heaters, Poseidon™ Stainless Steel Heaters, SX Stainless Steel Heaters, Demeter™ Systems…

Legacy Heaters