Chemical Blending, Mixing, Spiking

Metering Pumps to Accurately Dispense Corrosive Media

Metering Pumps

White Knight metering pumps offer adjustable flow rates for use in single-wafer processing tools or premix vessels to ensure exact chemistry mixtures, and allow for in-situ mixing directly at the head. They were designed for chemical replenishing, blending, dosing, and spiking applications, as well as uses in cleaning of CVD equipment and photolithography. They are ideal for photoresist, etch and clean processes, peroxide spiking in piranha mixtures, and other blending of chemical mixtures into process tanks prior to the introduction of substrates.

Fully adjustable stroke speeds
Safe, leak-free operation with no maintenance
No exposed metalics prevents corrosion and contamination
Fully-swept PTFE fluid path for ultra-pure applications
PTFE rolling diaphragm with PP housing
Easy to install in any orientation

Metering Pumps

Electronic Metering Pumps

PEM050 electronic metering pumps with adjustable stroke that is capable of dispensing up to 50ml with ± 0.01% repeatability. They operate at 60-80 psi with programmable system logic and a fully supported rolling diaphragm. There are 2, 3, 4, 5 and 6 port options.

PEM050 Metering Pumps

Pneumatic Metering Pump

PPM100 pneumatic metering pumps dispense up to 100ml of corrosive media with ± 0.1% repeatability. They operate at 60-85 psi with an adjustable stroke and a fully supported rolling diaphragm. Two positive control valves ensure accuracy by eliminating variability that is typical of check valves.

PPM100 Metering Pump

Blending & Mixing Heaters

Heateflex Ultrapure Fluid Blending & Mixing Systems

Overview
Mixing and blending are often the most demanding operations in chemical process applications. Heateflex engineers solutions for industries that rely heavily on mixing, blending and heating technology, such as found in the semiconductor, life science, and food & beverage industries. Heateflex tools enable fast blend times, with added flexibility, ease of cleaning, and a range of customized features that are carefully designed to optimize scale-up and to ensure effective and efficient mixing.

Heateflex also incorporates blending technologies in temperature trimming applications where precise degree control is of utmost importance. Our patented technologies achieve accurate and consistent DI water temperatures by successfully blending cool/ambient water with heated supply water.

Products

Fluidix^® Steam-Powered DI Water Heater Systems

Fluidix^® steam-powered deionized (DI) water heater systems offer the semiconductor industry a low-cost alternative to…

Fluidix® Heaters

Markets

Semiconductor

Life Sciences

Food & Beverage

Industrial

Aquarius^® Deionized (DI) Water Heater Systems

Aquarius^® deionized (DI) water heaters are the perfect solution for high-purity DI Water heating applications that require highly accurate temperature control. Its Power-to-Flow Control^® feature provides one of the most accurate temperature controls available in DI water heating systems, and it eliminates undesirable overshoots or drops in temperature due to inadequate PID controllers. Aquarius^® systems are engineered to deliver high flows of continuous, at-temperature, hot DI water.